面向精密仪器设备的主动隔振关键技术研究(I)

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1、浙江大学机械工程学系博士学位论文面向精密仪器设备的主动隔振关键技术研究姓名：李国平申请学位级别：博士专业：机械制造及其自动化指导教师：陈子辰;魏燕定20100101浙江大学博七学位论文面向精密仪器设备的主动隔振关键技术研究第六章，研制了以工业PC机为核心的精密仪器模拟隔振平台实验系统，完成了相应的软硬件系统开发，并对隔振实验台分别进行被动隔振、主被动复合隔振的实验研究。第七章，对论文的主要研究工作和创新点作了总结，并对未来的研究工作进行了展落：上；●关键词：主动隔振；超磁致伸缩驱动器；功率流；精密仪器；振动传递率；人工免疫系统；二级隔

2、振系统。Ⅱ浙江大学博十学位论文面向精密仪器设备的主动隔振关键技术研究ABSTRACTThisdissertationreportsatheoreticalandexperimentalstudyontheactivevibrationcontrolofaprecisionvibration—isolationplatform．ItissupportedbyaprojectfundedbytheNaturalScienceFoundationofZhejiangProvince，China,矾ed“ResearchonSupportin

3、gTechnologyofActiveVibrationIsolationforPrecisionEquipmentSystems”(GrantNo．599085)．Basedonthestate—of-the—artresearchbothinChinaandabroad,thedissertationadoptstheapproachofapplyingtheoreticalanalysis，computersimulationandactualexperiments；Withsuchanappoach,anactivevibra

4、tion—isolationstrategyforprecisioninstrumentsWaSproposed，agiantmagnetostrictiveactuatorforthevibration-isolationsystemwasdeveloped,thetransmissioncharacteristicsofthepowerflowinthesystemwasanalyzed,andfinally，theactivevibration-isolationcomtrolsystemforprecisioninstrume

5、ntsWasestablishedbyadoptinganimmunecontrolmethod,Atestrigofthevibration-isolationsystemWasdeveloped,whichwasusedtocarryoutsomerelevantexperimentalstudies．InChapterOne，thebackgroundandsignificanceoftheresearchareintroduced,andthestate--of-the··artresearchofactivevibratio

6、nisolationbothinChinaandabroadisexpounded,includingthevibration—isolationstrategy，actuatorsandsensors，transmissioncharacteristicsofpowerflow，controlstrategy，etc．TheaspectsofresearchcoveredbythisdissertationarealsoChapterTwotakestheelectronicmicroscopes(akindofopticalins

7、truments)asthestudycases．Thedynamicmodelofthemulti—DOFvibration—isolationsystemintheformofplatformvibrationisolationiscreated．Thevibrationdisplacementtransmissibilityoftypicalone—stageactivevibrationisolationsystemandpassivevibrationisolationsystemaleanalyzed．Thenthevib

8、rationaccelerationtransmissibilityofthevibrationisolationsysteminonedirectionisdiscussedforthecolnlnonlyusedtw