Springer.Mechanics.of.MEMS.Springer

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1、MechanicsofMicroelectro-mechanicalSystemsThispageintentionallyleftblankNicolaeLobontiuEphrahimGarciaMechanicsofMicroelectromechanicalSystemsKLUWERACADEMICPUBLISHERSNEWYORK,BOSTON,DORDRECHT,LONDON,MOSCOWeBookISBN:0-387-23037-8PrintISBN:1-4020-8013-1©2005SpringerScience+BusinessMedia,Inc.Pr

2、int©2005KluwerAcademicPublishersBostonAllrightsreservedNopartofthiseBookmaybereproducedortransmittedinanyformorbyanymeans,electronic,mechanical,recording,orotherwise,withoutwrittenconsentfromthePublisherCreatedintheUnitedStatesofAmericaVisitSpringer'seBookstoreat:http://ebooks.kluweronlin

3、e.comandtheSpringerGlobalWebsiteOnlineat:http://www.springeronline.comToourfamiliesThispageintentionallyleftblankTABLEOFCONTENTSPrefaceix1STIFFNESSBASICS11INTRODUCTION12STIFFNESSDEFINITION13DEFORMATIONS,STRAINSANDSTRESSES64MEMBERS,LOADSANDBOUNDARYCONDITIONS145LOAD-DISPLACEMENTCALCULATIONM

4、ETHODS:CASTIGLIANO’STHEOREMS216COMPOSITEMEMBERS437PLATESANDSHELLS58Problems602MICROCANTILEVERS,MICROHINGES,MICROBRIDGES651INTRODUCTION652MICROCANTILEVERS663MICROHINGES974COMPOUNDMICROCANTILEVERS1035MICROBRIDGES114Problems1263MICROSUSPENSIONS1311INTRODUCTION1312MICROSUSPENSIONSFORLINEARMOT

5、ION1313MICROSUSPENSIONSFORROTARYMOTION170Problems1794MICROTRANSDUCTION:ACTUATIONANDSENSING1831INTRODUCTION1832THERMALTRANSDUCTION1843ELECTROSTATICTRANSDUCTION1954ELECTROMAGNETIC/MAGNETICTRANSDUCTION2125PIEZOELECTRIC(PZT)TRANSDUCTION2236PIEZOMAGNETICTRANSDUCTION2307SHAPEMEMORYALLOY(SMA)TRA

6、NSDUCTION2328BIMORPHTRANSDUCTION2389MULTIMORPHTRANSDUCTION24910OTHERFORMSOFTRANSDUCTION256Problems257viii5STATICRESPONSEOFMEMS2631INTRODUCTION2632SINGLE-SPRINGMEMS2633TWO-SPRINGMEMS2714MULTI-SPRINGMEMS2855DISPLACEMENT-AMPLIFICATIONMICRODEVICES2866LARGEDEFORMATIONS3077BUCKLING3158COMPOUNDS

7、TRESSESANDYIELDING330Problems3356MICROFABRICATION,MATERIALS,PRECISIONANDSCALING3431INTRODUCTION3432MICROFABRICATION3433MATERIALS3634PRECISIONISSUESINMEMS3655SCALING381Problems390Index395PREFACEThisbookoffersacomprehensivecoveragetothemechanicsofmicroelectromechanica