Study_of_Light_Scattering_by_Small_Particles.pdf

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1、StudyofLightScatteringbyStudyofLightScatteringbySmallParticlesSmallParticlesHarrisonH.Chin7/1/2003LightScatteringStudyLightScatteringStudy¢StudyoflightscatteringbysmallPSLspheresusingNISTSCATMECHC++Librarycode,andcomparingtheresultswithDDSURFandXtreme.¢VarioussizesofPSLspheresonsmoothSili

2、consubstrateilluminatedwiththreewavelengths(532,350,and266nm),PandSpolarization,andvariousincidentangles.ForcomparisonpurposestheNAwassetto0.41,thevalueofourcurrenthighmaglens.Resultsindicateall3sourcesofdatahavegoodagreement.¢Assumingidenticalpowerdensity,itisinferredthatweshouldbeableto

3、detect55nmand42nmPSLspheres@350nm(P)and@266nm(P)respectively,basedoncurrentcapabilityof80nmPSLdetection@532nm(P).¢Forsmallparticles(relativetothewavelength),P-polarizationproduceshigherscatteredintensitythanS-polarizationdoes.However,thetopmountedCCDisnotpreferredforcollectingP-polarizeds

4、catteredlight.¢nandkvaluesusedforPSLandSilicon:LamdaSiPSLnmnknk2661.8504.4321.67003505.4753.0021.64005324.1520.0521.59802ModelComparisonModelComparison3ModelComparisonSummaryModelComparisonSummary¢ComparedmodelpredicteddatageneratedfromDDSURFandNIST-SCATMECHwithactualdatafromXtreme,anopti

5、caldark-fieldwaferinspectiontoolmanuinspectiontoolmanuffacturedbyINSPEX.acturedbyINSPEX.¢All3datasets(bothPandSpolarization)havegoodagreement.¢TheSCATMECHpredictedlessscatteringthanwhattheDDSSURFpredicted:–37.5%lessforP-pol.–31.7%lessforS-pol.¢Xtremedataexhibitedsomevariations,butthetrend

6、linesshowedgoodagreementwithdatafrombothmodels.–Xtremedataweresub-pixelinterpolatedbyafactorof10inbothXandYdirections.–Theinterpolatedpixelsaboveathreshold(20forPand25forS)wereintegratedandnormalizedforcomparisonpurposes.4CoordinateSystemComparisonCoordinateSystemComparison¢NISTassumesinc

7、identfrom–XbutDDSURFfrom+X.Thescatteringandtheazimuthdirectionsforbothmodelsusethesameconvention,+X.ZScatteringDirectionNISTIncidentDirectionθDDSURFIncidentDirectionθiiθYsφsX5DSCComparisonDSCComparison¢HemisphereplotsforDDSURFDSC(left)andSCATMECHDSC(right)underident