面向led散热的微平板热管的制造及测试

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1、面向LED散热的微平板热管的制造及测试FabricationandTestingofMicroFlatHeatPipesModulesAbstractforLight—emittingDiodeLEDlightingtechnologyisalsoknownasthe”fourth-generationlightingtechnology”，anditisknownasenergy—saving，environmental，long-lifeandsmallsize，whichiswidelyusedinlighting

2、，backlight，signalindication,decorationandscreendisplayandotherfields，havingbroadprospectsfordevelopment．AlotofcountrieswhicharepowerfulinscienceandtechnologytakearesearchinLEDtechnologyandstartadrastictechnologyrace．ChinesenationalplanninghaslistLEDlightingtechno

3、logyintoTwelfthFiveYearPlanandMid-to—LongTermPlan．Thereis70％inputpowerofLEDchiptransformedintoheat，SO，itwillincreasethetemperatureanddestroytheLEDchip．Therefore，weneedtodesignasimpleandefficientcoolingmethodtopromotethedevelopmentoftheLEDtechnology．Heatpipeisanef

4、ficientpassivethermalconductioncomponentbasedonthemechanismofphasechangeheattransfer，SOithashigherthermalconductivitycomparedwiththenormalthermalconductionmaterial．Microflatheatpipeisanewheatpipe，itWaScreatedunderthetechnologydevelopmentofintegratedcircuit，anditC

5、andecreasethehightemperaturewhich、析1lshortentheusefullifeofLED．Inthispaper，wedesignthemicroflatheatpipeaccordingtothe10WLEDmodule．Backflowoftheworkingfluidiscausedbycapillaryforcewhichproducedbymicrogrooves．nlegrooveswerefabricatedonthesiliconwaferandfollowedbybo

6、ndingwithPyrex7740glass．TheworkingmediasteamflowacrossthevaporchamberfabricatedonPyrex7740glass．Deionizedwaterwasselectedastheworkingliquidandwedesignedachargingandsealingsystemtocompletemicroflatheatpipes．砀eequivalentthermalconductivitycoefficientwasselectedasth

7、estandardtoestimatemicroflatheatpipes．Accordingtotheformula,weneedtomeasuretheinputpowerandthetemperatureofevaporationandcondensationsections．Wedesignedandestablishedthetestingsystem．Inordertoreduceexperimentalerror,weputthetestingpartinlowvacuumenvironment．Heatf

8、luxsensorandthermocoupleswhichwerecalibratedwereusedtotesttheinputpowerandthetemperatureinspectively．Formulatedtheexperimentalprocedures，andtestedmicrofiatheat