zr基非晶合金微齿轮成形及性能研究

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1、华中科技大学硕士学位论文AbstractAsanimportantpartoftheMEMSdevices,micro-geariscurrentlydevelopingtothedirectionofcomplicationandminiaturization,andthereliabilityproblemsofitsstructurewouldemergewithitstrendtobesmallerandmoreprecision.Metallicglassshowsgreatapplicationprospectinthefieldofmicr

2、o-nanofabricationowingtoitsexcellentproperties.ThisarticlefocusesontheZr-basedmetallicglasstoresearchitssuperplasticformingprocess.Wetestedthepropertyofmicro-gearandachievehigh-speedrotationandassemblyofmicro-gearchainundermicro-meterscale.Themaincontentsareasfollows:(1)At220K/mi

3、nheatingrate,weinvestigatedthebesttemperaturerangeforZr-basedmetallicglassformingprocessandtheeffectsofdwelltimeonstrain.Accordingtothestatisticalexperiment,weanalyzedthebreakreasonofsiliconmoldandgotaconclusionthatthebreakprobabilitycanbereducedbyusingfixture.Thenthemicro-gearsw

4、ithclearandcompleteprofilewereformedandremainedamorphousstate.Inaddition,wedesignedtheoverlayprocessandmanufacturedthetwolayergear.(2)Inordertoverifythatthemorphologyofmicro-gearcansatisfyusingrequest,itsthickness,endfacetiltangleandsurfaceroughnessweretestedusingconfocalmicrosco

5、py.ThehardnessandYoung’smodulusofgearweremeasuredusingnanoindentationtechnology.Fromtheload-displacementfigure,wedrewaconclusionthatmicro-gearwouldbeeasiertodeformunderhighloadingrate.(3)Poweredbyamicro-steppingmotor,thethreedegreesoffreedommicro-platformwasestablishedtobuildmesh

6、systembetweendrivegearandmicro-gearchain.Underhigh-speed,thewearconditionofmicro-gearwasobservedafterrotationfor10hand100h.Afterthemicro-gearsystemrunning1h,wecomparedtheenergyspectrumoflubricantsofdifferentmeshsystemandcarriedouttheimpacttesttoverifytheexcellentmechanicalpropert

7、iesofmetallicglassmicro-gear.Inthispaper,theformingprocessofZr-basedmetallicglasswasstudiedandthepropertiesofmicro-gearweretested.Themicro-gearsystemwhichwasabletorunforalongtimeunderhighspeedwasassembled,thuscanbehelpfulforpromotingtheapplicationofmicro-gearinthefieldofmicro-nan

8、omanufacture.Keywords:MetallicGlass,Micr