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1、SpringerNewYorkBerlinHeidelbergHongKongLondonMilanParisTokyoHANDBOOKOFMODERNSENSORSPHYSICS,DESIGNS,andAPPLICATIONSThirdEditionJACOBFRADENAdvancedMonitorsCorporationSanDiego,CaliforniaWith403IillustrationsJacobFradenAdvancedMonitorsCorporation6255FerrisSquare
2、,SuiteMSanDiego,CA92121USAjfraden@admon.comLibraryofCongressCataloging-in-PublicationDataFraden,JacobHandbookofmodernsensors:physics,designs,andapplications/JacobFraden.3rded.p.cm.Includesbibliographicalreferencesandindex.ISBN0-387-00750-4(alk.paper)1.Detect
3、orsHandbooks,manuals,etc.2.InterfacecircuitsHandbooks,manuals,etc.I.Title.TA165.F7232003681.2dc212003044597ISBN0-387-00750-4Printedonacid-freepaper.AIPPressisanimprintofSpringer-Verlag,Inc.©2004,1996Springer-VerlagNewYork,Inc.Allrightsreserved.Thisworkmayno
4、tbetranslatedorcopiedinwholeorinpartwithoutthewrittenpermissionofthepublisher(Springer-VerlagNewYork,Inc.,175FifthAvenue,NewYork,NY10010,USA),exceptforbriefexcerptsinconnectionwithreviewsorscholarlyanalysis.Useinconnectionwithanyformofinformationstorageandre
5、trieval,electronicadaptation,computersoftware,orbysimilarordissimilarmethodologynowknownorhereafterdevelopedisforbidden.Theuseinthispublicationoftradenames,trademarks,servicemarks,andsimilarterms,eveniftheyarenotidentifiedassuch,isnottobetakenasanexpressionof
6、opinionastowhetherornottheyaresubjecttoproprietaryrights.PrintedintheUnitedStatesofAmerica.987654321SPIN10919477www.springer-ny.comSpringer-VerlagNewYorkBerlinHeidelbergAmemberofBertelsmannSpringerScience+BusinessMediaGmbHTothememoryofmyfatherThispageintenti
7、onallyleftblankPrefaceSevenyearshavepassedsincethepublicationofthepreviouseditionofthisbook.Duringthattime,sensortechnologieshavemadearemarkableleapforward.Thesensitivityofthesensorsbecamehigher,thedimensionsbecamesmaller,theselec-tivitybecamebetter,andthepr
8、icesbecamelower.Whathavenotchangedarethefundamentalprinciplesofthesensordesign.TheyarestillgovernedbythelawsofNature.Arguablyoneofthegreatestgeniuseswhoeverlived,LeonardoDaVinci,hadhisownpeculia
