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1、INTRODUCTIONTOFOCUSEDIONBEAMSInstrumentation,Theory,TechniquesandPracticeThispageintentionallyleftblankINTRODUCTIONTOFOCUSEDIONBEAMSInstrumentation,Theory,TechniquesandPracticeEditedbyLucilleA.GiannuzziFEICompanyFredA.StevieNorthCarolinaStateUniversitySpringereBookISBN:0-387-23
2、313-XPrintISBN:0-387-23116-1©2005SpringerScience+BusinessMedia,Inc.Print©2005SpringerScience+BusinessMedia,Inc.BostonAllrightsreservedNopartofthiseBookmaybereproducedortransmittedinanyformorbyanymeans,electronic,mechanical,recording,orotherwise,withoutwrittenconsentfromthePubli
3、sherCreatedintheUnitedStatesofAmericaVisitSpringer'seBookstoreat:http://ebooks.kluweronline.comandtheSpringerGlobalWebsiteOnlineat:http://www.springeronline.comDedicationThisbookisdedicatedtoJeffBindell,whoseinsightmadeitpossibletohaveleadingedgeinstrumentationavailableandwhose
4、inclusivenessfosteredtheinteractionsthatprovidedmuchofthematerialforthiswork.ThispageintentionallyleftblankContentsDedicationvContributingAuthorsxiPrefacexiiiTheEditorsxvAcknowledgmentsxvii1.TheFocusedIonBeamInstrument1F.A.STEVIE,L.A.GIANNUZZI,ANDB.I.PRENITZER2.Ion-SolidInterac
5、tions13L.A.GIANNUZZI,B.I.PRENITZER,B.W.KEMPSHALL3.FocusedIonBeamGasesforDepositionandEnhancedEtch53F.A.STEVIE,D.P.GRIFFIS,ANDP.E.RUSSELL4.Three-DimensionalNanofabricationUsingFocusedIonBeams73T.KAITO5.DeviceEditsandModifications87K.N.HOOGHANviiiIntroductiontoFocusedIonBeams6.Th
6、eUsesofDualBeamFIBinMicroelectronicFailureAnalysis107B.HOLDFORD7.HighResolutionLiveImagingofFIBMillingProcessesForOptimumAccuracy133P.GNAUCK,P.HOFFROGGE,M.SCHUMANN8.FIBForMaterialsScienceApplications-AReview143M.W.PHANEUF9.PracticalAspectsofFIBTEMSpecimenPreparation173R.ANDERSO
7、NANDS.J.KLEPEIS10.FIBLift-OutSpecimenPreparationTechniques201L.A.GIANNUZZI,B.W.KEMPSHALL,S.M.SCHWARZ,J.K.LOMNESS,B.I.PRENITZER,ANDF.A.STEVIE11.AFIBMicro-SamplingTechniqueAndASiteSpecificTEMSpecimenPreparationMethod229T.KAMINO,T.YAGUCHI,T.HASHIMOTO,T.OHNISHIANDK.UMEMURA12.Dual-B
8、eam(FIB-SEM)Systems247R.J.YOUNGANDM.V.MOORE13.FocusedI
