硅微谐振式加速度计驱动电路优化技术研究

《硅微谐振式加速度计驱动电路优化技术研究》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、万方数据II万方数据一垒皇!墼!Abs仃actThesiliconresonantaccelerometerhassuchoutstandingadvantagesashighprecision，smallvolume，fi'equencyoutputandSOon．Itwaswidespreadusedinmilitaryandcivilapplicationfield．Toimprovetheoverallperformanceofthemicrosiliconresonantaccelerometer,someimprovementab

2、outthedrivercircuitofmicromechanicalsiliconresonantaccelerometerwasgiyeninthispaper．Theexperimentresultshownthatthepracticabilityandreliabilityofsiliconmicroresonantaccelerometerwereincreased．Researchworkmainlyincludedthefollowingcontents：(1)Theresearchstatusaboutmicrosilic

3、onresonantaccelerometersystemathomeandabroadwasintroduced．Severalcommonlyuseddrivingmodeofthesystemwasexpounded．Theworkingprincipleofsiliconmicroresonantaccelerometerwasanalyzed．Duringthechangingoftemperature，specialoutputofthesystemwasanalysed．(2)Therelationshipbetweenthev

4、oltagenoiseandphasenoisewassimplydeduced．Toimplementtheimpedancematchingofinterfacecircuit，accelerometerelectricalequivalentmodelwasestablished．Relevantmethodsweregiventosolvethisproblem．Atemperaturecompensationmethodwasmentioned．(3)Tooptimizetheloopfilterdesign，thestructur

5、eofphase—lockedloopsystemwasexpounded．Therelationshipbetweentheresonantfrequencyandthedrivewasanalyzed．Themethodofsettingthebestdrivewasgiven．(4)Toincreasetheanti-jammingabilityofsiliconmicroresonantaccelerationsystem，thePCBdesignofpowercircuitandtheSignaltransmissionwaywer

6、eimproved．Electromagneticshieldingofthesystemwasused．(5)Itwassaid，theanti—interferenceabilityofthesystemwasincreasedaftersomeimprovementaboutthedriverciecuitofthemicrosiliconresonantaccelerometerwasdone．OtherrelatedperformancemetriCSwasalsoimproved．Keywords：MicromechanicalS

7、iliconResonantAccelerometer，DriveCircuit，OptimizedDesignIII万方数据Abstmct万方数据目录摘要⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．IABSTRACT⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯III目录⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯V第一章绪论⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．11．1引言

8、⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯一11．2课题研究背景及意义⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯