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大小:1.02 MB
页数:38页
时间:2019-03-03
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1、Source:FUNDAMENTALSOFMICROSYSTEMSPACKAGINGCHAPTER14FUNDAMENTALSOFMICROELECTROMECHANICALSYSTEMSDr.RajeshuniRameshamProf.FarrokhAyaziJetPropulsionLaboratory/GeorgiaInstituteofTechnologyCaliforniaInstituteofTechnologyDr.RezaGhaffarianJetPropulsionLaboratory/CaliforniaInstituteofT
2、echnology.................................................................................................................DesignEnvironmentICThermalManagementPackagingMaterialsSingleChipOptoandRFFunctionsDiscretePassivesEncapsulationICReliabilityICAssemblyInspectionPWBMEMSBoar
3、dManufacturingAssemblyTestDownloadedfromDigitalEngineeringLibrary@McGraw-Hill(www.digitalengineeringlibrary.com)Copyright©2004TheMcGraw-HillCompanies.Allrightsreserved.AnyuseissubjecttotheTermsofUseasgivenatthewebsite.FUNDAMENTALSOFMICROELECTROMECHANICALSYSTEMS................
4、.................................................................................................14.1WhatAreMEMS?14.2WhatAreMEMSApplications?14.3FundamentalsofMEMSDevices14.4TypesofMEMSPackagingSolutions14.5TypicalMEMSDevices14.6KeyFailureMechanismsofMEMS14.7MEMSInertialSensor
5、s:ACaseStudy14.8SummaryandFutureTrends14.9HomeworkProblems14.10SuggestedReadingCHAPTEROBJECTIVESIntroduceMEMSDescribetheMEMSapplicationsIntroducethefundamentalterminologyofMEMSdevicesandpackagingDescribeMEMSpackagingrequirementsandoptionsDescribethekeyfailuremechanismsofM
6、EMSPresentacasestudyonMEMSinertialsensorsDescribethefutureMEMStrendsCHAPTERINTRODUCTIONMEMSisthefourthtechnologywavebehindtheMicrosystemandInformationRevo-lutionthatisunderway.Eventhoughitisnotafundamentalbuildingblocklikethetransistor,itiscapableofaddingsynergytomicrominiat
7、urizeandbringaboutthekeynoncomputingfunctionsofsystemssuchasactuatingandsensing.Thetechnologyisalreadyusedinanumberofautomotiveandmedicalindustries.Inaddition,itisbegin-ningtoformthebaseofmicroelectronicandphotonicfunctions,suchasRFandOpticalMEMS.543DownloadedfromDigitalEngine
8、eringLibrary@McGraw-Hill(www.digitalengineeringlibrary.com)Co
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