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1、重庆大学硕士学位论文号的转换和处理。根据微夹钳的单片柔顺机构的夹爪平行移动的特点，利用标准悬臂梁的受力与梁弯曲变形之间关系，提出一种利用非接触式位移传感器测量柔性梁的形变量来实现夹持力传感器标定的方法。4.建立了相应的实验装置分别对夹持力传感器和夹爪位移传感器进行了标定，实验测试了微夹钳的夹持力特性并与理论模型进行了比较，给出了夹持微小物体的实验来模拟实际的夹持过程。实验结果表明，微夹钳的夹爪位移与输入力、夹持力与输入力呈线性关系，夹持力模型符合实际的夹持过程。5.在集成传感基础上，辨识了微夹钳的驱动电
2、压与夹持力和夹爪位移之间的关系模型。研究了力/夹爪位移的反馈控制技术，采用PID反馈和模型参考自适应控制来提高夹持力/夹爪位移的控制精度。为了验证反馈控制系统的有效性，对系统进行了仿真研究。仿真结果表明，夹持力/夹爪位移的PID控制的误差呈周期性变化，而自适应控制对期望输入的跟踪控制误差小，控制效果较好。本文的研究工作为压电驱动微夹钳的单片柔顺机构的设计、分析与控制提供了理论基础和设计方法。关键词：微夹钳，单片柔顺机构，有限元分析，集成传感，自适应控制II英文摘要ABSTRACTMicro-assemb
3、lyandmicromanipulation,whichassemblepartswithextremelysmalldimensionalsizeasacomplicatedmicro-electromechanicalsystem(MEMS),isarapidlydevelopedfieldwithdevelopmentofmicro/nanotechnologyandMEMSs.Microgrippers,whichdirectlycontacttheoperatedobjectsastheend
4、-effectorsofmicro-assemblyandmicromanipulationsystems,playacrucialroleinmicro-assemblyandmicromanipulation.Microgrippertechnology,whichinvolvesmicro-machinery,materials,sensors,automation,electronics,andcomputers,iswidelyappliedtoMEMS,microelectronics,op
5、tics,microfluidicsandbiologicalsciences,andotherfields.Thesizeandshapeofoperatedobjectsarenotfixedandfragile.Ontheonehand,microgrippersshouldpossesslargetipdisplacementwithhighresolutionandbemovedaccuratelyinvisionfieldofmicroscopes.Ontheotherhand,inorde
6、rtoavoiddamagingmicro-parts,thegrippingforceshouldbemonitoredandfeedbackcontrolled.Therefore,microgripperswithlargetipdisplacement,highresolution,integratedgrippingforceandtipdisplacementsensors,andfeedbackcontrolleraredesired.Inthisthesis,basedonapiezoe
7、lectric-drivenmicrogripperwithparallelmovementofgrippingjaws,therelationshipsbetweentheinputandoutputofthegrippingforce/tipdisplacementareestablished,andthedynamicmodelisimproved.Themonolithiccompliantmechanism(MCM)isintegratedwithgrippingforcesensor(GFS
8、)andtipdisplacementsensor(TDS)basedonanalyzingthestrainoftheMCM,andboththegrippingforcesensorandtipdisplacementsensorarecalibrated.Thegrippingforcecharacteristicsofthedevelopedmicrogripperaretestedusingtheestablishedexperi
