电射流仿真与压电厚膜微结构打印实验

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1、万方数据大连理工大学硕士学位论文Finally，theprintingexperimentsofPZTthickfilmmicro．scalestructureswerecarriedoutusingtheelectrohydrodynamicjetprintingplatformandPZTcompositesuspension．Accordingtotheresultsoftheelectrohydrodynamicjetsimulationanalysis．thePZTmicrosmactureswithlinewidthvariationswerep

2、roducedbychangingtheheightbetweenthenozzleandthesubstrate，thePZTmicrostructureswithgapvariationswereproducedbyadjustingtheparametersofX．Ysportplatform．TheinfluenceoftheprintinglayernumberonthePZTthickfilmcrackswasstudiedintheprocessofprintingPZTthickfilm．Byheattreatmentofsingleprin

3、tinglayer，theorganicsolventandresidualstresswereremoved，andthecracksofPZTthickfilmmicrostructureweresignificantlyreduced．ThepiezoelectricanddielectricpropertiesofPZT吐lickfilmbyelectrohydrodynamicjetprintingweretestedandanalyzed．WhenthepolarizationvoltagewasllVgm=1．thepiezoelectricc

4、onstantofPZTthickfilmwas66PCN～．menthefrequencywas50Hz．therelativedielectricconstantofPZTthickfilmwas233．KeyWords：Electrohydrodynamicjetprinting(E-jetprinting)；PZTcompositesuspension；PZTthickfilmmicro·scalestructures．ⅡI。万方数据电射流仿真与压电厚膜微结构打印实验目录摘要⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯IAbs

5、tract．．．．．．．．．⋯．．．．．．．．．．．．．⋯．．．．．⋯．．．．．⋯．．．．．．．⋯．．．．．．．．．．．．．．⋯．．．．．．．．．．．⋯．．．．．．⋯．⋯．．．．．．⋯．．．．．．．．．．．．．．，．．．．．．．．．．．．．．II目录⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯Ⅳ1宝苦论⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．11．1电射流打印技术⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯l1．1．I电射流打印技术简介⋯⋯⋯⋯⋯⋯⋯⋯⋯

6、⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．1．2电射流打印研究现状⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯21．2压电厚膜MEMS器件⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．51．2．1压电厚膜的应用⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯51．2．2压电厚膜的微图形化技术⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯71．3本文主要研究内容⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯82电射流打印实验平台⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯92．1实验平台的搭建⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯92．2实

7、验平台的喷印实验⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．102．3本章小结⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯一l13电射流的仿真研究⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．】23．1电射流的受力分析⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．123．2电射流仿真的数值分析⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．133．2．1流体运动方程⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯。133．2．2电场方程⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．．143．2．3VOF方法和气液自

8、由界面的追踪⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯143．