基于介观压光效应的微机械陀螺设计与的研究

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1、中北大学学位论文canreach73μ/°/s.Basedonthestructuralcharacteristicsofthemicro-gyroscope,earlyaccumulatedfabricationexperience,thefabricationprocessofthemesoscopiccalender-typesiliconmicromechanicalgyroscopewerestudiedbyusingbulksilicontechnologyandembeddedtechnology.Theprocessandstructurelayou

2、tofthemicro-gyroscopewerestudiedandthefeasibilityofthedesignprocesswasverifiedbyusingCoventorWaresoftware.Keywords：mesoscopoccalendereffect,photoniccrystals,micro-gyroscope,electrostaticdriven,high-sensitivity万方数据中北大学学位论文目录第1章绪论..........................................................

3、......................................................11.1课题的研究背景及意义................................................................................11.2国内外研究现状............................................................................................21.2.1国外研究现状.......................

4、...................................................................21.2.2国内研究现状..........................................................................................51.3论文主要研究内容及章节安排....................................................................7第2章光子晶体及介观压光效应.................

5、...........................................................92.1光子晶体........................................................................................................92.1.1光子晶体的结构及特性........................................................................102.1.2光子晶体的研究方法...........

6、.................................................................122.2介观压光效应..............................................................................................152.3镜像三周期一维光子晶体介观压光效应..................................................162.3.1光子晶体光学特性.............................

7、...................................................162.3.2光子晶体介观压光系数........................................................................182.4本章小结......................................................................................................19第3章微机械陀螺原理.....................