化学沉积稀土feb合金薄膜工艺与组织性能的研究

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1、化学沉积稀土Fe．B合金薄膜工艺与组织性能的研究摘要本文研究了化学沉积稀土Fe．B合金薄膜的制备工艺、组织结构和磁学性能。采用正交试验法设计并确定了化学沉积Fe．B．RE合金的前处理工艺和最佳配方，制备出试样，考察了合金薄膜的微观形貌和组织结构，测定了镀液的电化学特性、薄膜的磁学性能。在化学沉积Fe．B合金薄膜中添加稀土镧和铈，探讨它们对合金薄膜的沉积工艺、微观形貌、组织结构和磁学性能的作用机理和影响方式，以期获得综合性能优异的化学沉积Fe．B．RE半硬磁性合金薄膜。结果表明：与基体的前处理中无敏化活化相比，对基体沉积前采用敏化活化前处理得到的薄膜与基体的

2、结合力强，薄膜起皮现象少；稀土镧大幅度提高了薄膜的沉积速度，稀土铈增加了薄膜的光亮性，很大程度地提高了薄膜表面质量；不管基体是否敏化活化，镧和铈均提高了镀液的稳定性。镀液中添加稀土后，改善了阴极极化能力，降低了薄膜沉积生长的形核功，增大了形核率，使薄膜组织均匀致密。Fe．B合金薄膜以晶态生长方式沉积。合金薄膜的矫顽力大，饱和磁化强度、磁导率适中，剩余磁化强度较大，具有优良的半硬磁性能；对基体进行敏化活化前处理，能大幅度提高薄膜的初始磁导率；稀土介入后，薄膜组织均匀致密，薄膜的矫顽力增大，半硬磁性能更优异。关键词：化学沉积；稀土；Fe．B合金；敏化活化；半硬

3、磁性StudyontheProcess，StructureandPropertiesofElectrolessDepositionFe·-BAlloyFilmwithRareEarthJoinedAbstractThepreparationprocess，structureandmagneticpropertiesoftheelectrolessdepositio．nFe—Balloyfilmwithrareearthjoinedwerestudied．Thepretreatmentprocessandoptimumformulationprocessof

4、electrolessdepositionFe-·B．．REalloysfilmweredesignedandtestedusingperpenpularmethod．Thesampleswereprepared．Thestructureandmicromorphologywereobserved．Theelectrochemicalbehaviorofthebathandmagneticpropertiesofthefilmweremeasured．LaandCewereaddedtoelectrolessdepositionFe—Balloyfilm．

5、Theirmechanismofactionandinfluencemodeontheprocess，structureandpropertiesofFe—Balloyfilmwerediscussedinordertoobtaintheelectrolessdepositionalloyfilmwithexcellentsemihardmagneticproperties．TheresultsshowedthatthebondingforcebetweenthefilmandthesubstrateiSbetterafterthesubstratedea

6、ledwiththepretreatmentofsensitizationandactivationcomparedtothatwithoutpretreatment．Therareearthelementswereaddedtobath，thestabilityofitincreasesobviously,whichincreasesthedepositionrateandimprovesthefilmqualityespeciallyforthesubstratewithsensitizationandactivation．Therareearthel

7、ementschangetheelectrochemicalbehaviorofthebase，improveitscapabilityofcathodepolarization，decreasethenucleationenergyofdepositionandincreasethenucleationrateleadingtofineandcompactcrystalline，whichleadtohighercoercitiveforce(He)ofthefilm．Thefilmhasgoodsemihardmagneticpropertieswit

8、hhighcoercitiveforce，certainsatur