化学气相沉积氮化钒涂层的基础研究

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1、目录目录第一章绪论..............................................................11.1引言.............................................................11.1.1氮化钒简介.................................................11.1.2氮化钒的应用...............................................11.2涂层的制备..................

2、.....................................21.2.1热喷涂法...................................................21.2.2溶胶-凝胶法................................................31.2.3激光熔覆...................................................31.2.4自蔓延高温合成法...........................................41.2.5电火

3、花沉积法...............................................51.2.6物理气相沉积...............................................51.2.7化学气相沉积...............................................61.3氮化钒制备方法...................................................71.3.1氮化钒高温真空制备......................................

4、...71.3.2氮化钒高温非真空制备.......................................81.3.3氮化钒的其他制备方法.......................................81.4本课题研究的目的及内容...........................................91.4.1研究目的...................................................91.4.2研究内容..........................................

5、.........9第二章试验设备与方法...................................................112.1试验设备........................................................112.1.1化学气相沉积炉............................................112.1.2X射线衍射仪（XRD）.......................................112.1.3扫描电镜（SEM）.................

6、..........................122.1.4金相显微镜................................................132.1.5多功能材料表面性能试验仪..................................142.2试验材料........................................................142.2.1制备氮化钒涂层的钒源......................................142.2.2制备氮化钒涂层的反应气体......

7、............................152.3基体试件预处理..................................................152.4氮化钒涂层制备..................................................152.4.1工艺流程..................................................152.4.2工艺参数..................................................16V目录第三章涂层

8、表征..........