可重构mems微波功率耦合器的设计与其可靠性分析-(5539)

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1、Abs扛act12．0so觚are．Whentllelengmoftllebe锄isla唱ernlaIl200pm，廿1edi恐rencebet、^，eenmemodelpredictionaIldt11efmiteelementallaJysisisless廿m5％．TheinnoVationismatourVibmtionmodelcangiVemoree任-ectiVepredictionf-0rtllecaSetllattIlel∞gmofmehorizontalbe锄ismuchla玛erm觚

2、nleleng吐lofmesupportbe锄comparedwimtllecl锄pedmodel．(3)AniInpr0Vedtest蛐nJcturewi廿lfourrotation蛐rLlctureshaSbeendesignedt0me舔uret11eresiduals仃essofMEMSbe锄s．TheinlprovedteStstructureissiInulatedbyANSYSsofhⅣare，andfabricatedbaSedonGaAs删ICp眦ess．111eeXpementalr

3、esultSshowmatmeresid向s仃essof龇ⅧMSbe锄sbaLsedonGaAsMMICprocessissosmall廿latnlee能ctofmeresiduals仃essonthes咖cturescallbei印oredaIldtheresiduals仃esshaS1ittleiInpactonⅡlereliabili哆ofmeMEMSbe锄b签edonGaAsMMICprocess．TlleiIlIloVationis岫tnleimproVed删岖tecllIliqueme笛ur

4、esmerotatiIlganglesoftheindicatorbeamsmSteadof也edenectiontocalculatetheresidual蚰陀ss，soitdoesnotneedVenlierandiseaSyt0beperf．o珊edcoⅡlparedwimnle帅icalro诅tiIlgtecⅢque．111edesi朗廿1eoDraIldimplementationofthisrecoIlfigurableMEMSmicrowavepowercouplerfiUtlleblan

5、kofGaAsMMIC-baSedmicrowaveⅧMSdeVicesaIldsyStemsiIlchhlaaIldhavean啪berofpotentialapplications．Me柚wIlile，廿lerelatedpapersa_bouttlleexpemen_talmeⅡlodaIldmodelhavebeenacceptedoruIlderreViewby恤memalio蹦J0umalsiIlⅧMSfield．碌Iywords：recoIlfigurabled№嘶。砌coupler，Me

6、MSbe锄，Stiction，Vibrationmodel，residuals仃ess，GaAsMMICprocessⅣ目录摘要⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯一IAbsl譬act⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯III目j录⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．V第一章绪论⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯

7、⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯11．1定向耦合器⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．11．1．1定向耦合器的分类⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯l1．1．2耦合度可重构定向耦合器的研究进展及现状⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯41．2MEMS梁的粘附问题⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯一71．2．1粘附效应的力学理论发展⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯81．2．2MEMS梁的粘附

8、问题的理论模型⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯91．3MEMS梁的力学模型⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯一91．3．1静态力学模型⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯101．3．2振动模型⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．111．4MEMS梁的残余应力的在线测量⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯131．4．1屈曲测量法及其研究现状⋯⋯⋯