基于光线扫描的纳米表面三维干涉测量系统

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1、』Eii窑地厶。羔熊±=；兰位监童△BsIB△坚lABSTRACTABSTRACT：Anovelinterferometricmeasurementsystem，whichisbasedOilopticalline—scanningandsuitableforthemeasurementof3-DIIRno—surfaceprofile，isproposedThebroadbandlightemittedfromanamplifiedspontaneousemission(ASE)isdispersedintoapieceoffan—shapedligh

2、tbyablazedgratingThepieceoffan—shapedlightiscollimatedintoapieceofparallellightandthenisusedtoscanthemeasuredsurfaceDifferentwavelengthisreflectedbythedifferentmeasuredpointofthesurfaceThereflectedwavelengthisinterferedwiththereferencelightEachpixelofalinearrayCCDdetectstheinterf

3、erornetficsignalfromthecorrespondingmeasuredpointofthesurfaceTheheightofthemeasuredpointofthesurfacewillbeobtainedTheopticalline—scanninginterforon】tericmeasurementwillberealizedbydemodulatingeveryinterferometricsignalfromeachpixeloftheCCDIntheexperiment，asmoothsurfaceofamirrorlS

4、usedasthemeasuredsurfacecodemonstratethel、easibilityofthesystemAndtheresuitwegetisastraightlineafterthedataisprocessed，whichshowsthattheexperimentresultagreeswellwiththetheoreticalanalysisSomeproblemshavebeenfoundInthesystem1fit1SusedtOthepracticalmeasurementthathavefoundedthebas

5、icwork南rthefurtherresearchComparedtotheopticalpoint—scanning3-Dnano—surfaceprofilemeasurementsystem．thepresentedsystemhastheadvantagesoffastmeasurementspeedandsimplescanningstructureKEYWORDS：opticalline-scanning；interferometricmeasurement；three-dimensionalmeasuremenl：hallomeasure

6、menCCLASSNO：TB96；TP212』E立窒迤厶堂堕±堂位论童目盘目录中文摘要1llABSTRACTi、，l引言12微表丽三维形貌测量的主要方法32l微表面三维形貌测量方法的分类⋯321l接触武测量方法4212激光三角法⋯⋯5213屁微干涉法6214扫捕电子显微镜72l5原予力盟微镜82I6扫描隧道显微镜92现有测量方法的优缺点和国内外研究现状lO21现有微表面三维形貌测量方法的优缺点IO2．22国内外研究现状123基于线扫描的纳米表面三维T涉测量系统1331系统关键器件1331l光隔离器13312光纤准直器14313闪耀光栅15314压电陶瓷叠

7、堆执行器17315线阵CCD183．2系统原理2032l光纤迈克尔逊干涉仪203．22线扫描微纳米表面三维干涉测量系统214实验进展254I数据采集25411背景光噪声分析25412数据采集314．2基于MATLAB的数据处理3443系统存在的问题⋯36韭立窒堡厶=；兰亟．1．：。芏也丝塞II垂5结沦51工作总结395．2系统创新点5．3展望参考文献一⋯作者简历40独创性声叫学位论文数据集45』E立奎地厶翌鲤1．生位地童lI盏1引言微观表面形貌又被称为表面微观儿jlJ『形忐，比如醴在对零件进行_

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9、工时，山于加工刀具与被iJIA：零件之

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11、、对零件进行切削时产生的金属撕裂以及加工系统中的高频振动等种种原阑，会在零件的被