基于图像处理技术的开路关键面积提取

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1、摘要AbstractAbstractIntegratedcircuitasanewtypeofsemiconductordevicesstartedtodevelopinthe1960s.Withtheconstantenlargementofthescaleofintegratedcircuitsandtheconstantshrinkofthefeaturesizeofsemiconductordevices,tomaintainandimprovetheintegratedcircuitmanufacturingyieldbecomeahotspotofthelayo

2、utoptimizationdesignandmanufacturingtechnologyresearch.Integratedcircuitmanufacturingyieldcanbedividedintoparametricyieldandfunctionalyield,andthefunctionalyieldresearchrelatedwithlocaldefectshasbeenanimportantspotoftheintegratedcircuitmanufacture.Thecriticalarearesearchisextremelyimportan

3、tforthehighfunctionalyielddemandofthechipdesign.Thecriticalarearesearchisanimportantcontentintheintegratedcircuitmanufacturabilityresearchfield.Thecriticalareaplaysaveryimportantroleintheintegratedcircuityieldandreliabilityprediction.Becausethedefectsofintegratedcircuitisthemaincauseofcirc

4、uitfault,defectmodelanddefectdescriptionbecomethefoundationofthecriticalarearesearch.Mathematicalmorphologyisasciencebasedonstrictmathematicaltheoryandcloselywithpractice,whichisverysuitablefortheanalysisanddescriptionofgeometryelementanddefectsinIntegratedcircuitlayouts.Inthispaper,thecri

5、ticalarearesearchistoenhancetheyieldastheultimategoalandwithintegratedcircuitlayoutoptimizationastheeffectivemeans.Thispapercombinedwithimageprocessingtechnologyputsforwardanewopencriticalareacalculationmodelandextractionalgorithm,whichisappliedtothelayoutoptimization.Thepaperdesignsandimp

6、lementstheopencriticalareaextractionbasedonthemorphologicalimageprocessing.Firstly,getthecurveofthenettopologypathwithrefiningoperationinthemathematicalmorphology.Secondly,identifytheendofthenettopologypathonthenetboundarywiththehelpofhit-misstransformationinmathematicalmorphology,andfurth

7、ergetthenetflowshaft.Thirdly,thenetboundaryisdisconnectedbythenetflowshaftinordertoextractnetflowboundaries.Fourthly,implementnetflowboundariesexpansionoperationandstacktheexpansionresults.Then,completestackedoverlapregionextractionbasedonmathematicalmorpholog