cz单晶炉液位检测系统的脉冲噪声滤波分析

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1、西安理工大学硕士学位论文experimentalresultsshowthatthedesignedfilteringsystemfortheremovalofimpulsenoiseismoreadvantageousandrobustthanothermethods.Finally,thedesignedfilteringsystemisusedtoremovetheimpulsenoisemixedinthesignalcollectedbytheliquidleveldetectionsystem.Theexpe

2、rimentalresultsprovethatthedesignedfilteringsystemcaneffectivelyremovetheimpulsenoisemixedintheliquidleveldetectionsignal,whichimprovesthedetectionaccuracyofthedetectionsystemandprovidesnecessaryconditionsforthehighqualitycrystalgrowth.Keywords:Czochralskimethod;

3、Singlecrystalfurnace;Liquidleveldetection;Impulsenoise;ARmodelii万方数据目录目录1绪论........................................................................................................................................11.1研究背景与意义.........................................

4、................................................................11.1.1信息产业背景...................................................................................................11.1.2光伏产业背景............................................................................

5、.......................21.2单晶硅的制备.............................................................................................................31.2.1单晶硅常用的制备方法...................................................................................31.2.2直拉法单晶生长工艺.......

6、................................................................................61.3直拉单晶炉研究现状.................................................................................................81.4本文主要研究内容.............................................................

7、........................................92CZ单晶炉液位检测系统....................................................................................................112.1液面位置对晶体生长的影响...................................................................................112.2直拉法中传

8、统液位控制方法...................................................................................122.2.1埚跟比法..........................................................