btosto氧化物超晶格生长模拟及电学性能研究

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1、电子科技大学硕士论文ABSTRACTinthispaper,wediscussedthewidelyappliedforegroundofsuperlaticesandexpatiatedthecharacteristicofBaTiO3/SrIi03superlaticewithimportantresearchvalue.ThesuperlatticeweregotbythemethodofLaserMolecularBeamEpitaxy(L-MBE)andcharacteristicofstructureandcapabilitywere

2、studiedindetails.WealsousedMonteCarlomethodtosimulatetheprocessinordertostudythegrowthprocessofoxidethinfilms.ThemodeloftheearlystageofthinfihngrowthhadbeeninstitutedbasedontheexperimentresultsandthegrowthprocessofthinfilmshadbeensimulatedusingMonteCarlomethodbyusingthetheory

3、ofcrystalgrowth.Theresultsindicatedthatthethinfilmsdepositedatlowgrowthspeedwererelativelysmootherthanthosedepositedathighgrowthspeed.Whenthegrowthspeedwaslower,thedisfigurementonthesubstratehadlittleinfluencetothinfilmsWeusedreflectionhigh-energyelectrondifraction(RHEED),X-r

4、ayDifraction(XRD),AtomicForceMicroscopy(AFM),X-rayphotoelectronspectroscopy(XPS)etctostudythemicro-structureandcompositionofthinfilms.TheplotsofRHEEDshowedthatthethinfilmswereatomicallysmoothandin-plane-orientedandwecouldacquirethenumbersoflaysinthethinfilms;whenthetemperatur

5、eofsubstratewasattherangeof380'Cto470'C,thethinfilmshadatomicallysmooth.Throughthecompositionanalysisofthinfilms,wefoundthattherewereinterdifusionbetweenBaTiO3layerandSrTiO3layer,andwecouldreducedifusionwhenthetemperatureofthesubstratewasreduced.Usingthevacuumevaporationtechn

6、ology,wevaporizedthegoldonfilmsaselectrodetomeasurethecapabilityofdielectrics.Theresultsmadeitclearthatthepressureofoxygen~veryimportant协thefilm'scapabilityofdielectricseventhatwecouldnotobtaingoodcapabilityofelectricsifthepressureofoxygenwasliterlowerorliterhigher.Thedielect

7、ricconstantandCurietemperatureofBaTio3/srTio3superlatticincreasedwithdecreasingthestackingperiodicity.Bymodulatingthestackingperiodicity,thehightemperatureendurancedandhighdielectricsofthinfilmswereobtainedsuccessfully.电子科技大学硕士论文KeyWords:Superlattic,MonteCarlo,LaserMolecularB

8、eamEpitaxy(L-MBE),ReflectionHigh-EnergyElectronDifraction(RHEED)独创性声