口腔材料表面氮化锆薄膜制备工艺与性能

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1、硕l：论文U腔材料表面氮化错薄膜制备T艺‘j性能摘要不锈钢和钴铬合金是常用的口腔正畸材料，但是在临床上容易引起使用者过敏以及表面颜色与牙齿色泽差别较大而不雅观。本文通过直流和射频溅射两种方法在口腔用不”锈钢表面制得淡黄色氮化锆薄膜。采用动态超显微硬度计、扫描电子显微镜、原子力显微镜和x射线衍射仪研究了工艺参数(氮气分压、溅射功率、溅射时问、基体加热温度)对氮化锆薄膜颜色、显微硬度、粗糙度、结构及表面形貌的影响。研究结果表明：当炉内氮气分压强为25％，直流功率为100W，基体加热温度为200℃，溅射时

2、间为10min，通过逐步调节氩气与氮气的比例可获得成分均匀，膜层光滑致密，硬度高，结合力较好的淡黄色氮化锆薄膜。当氮气分压强为45％，射频功率为200W，基体加热温度200℃，溅射时间为30rain，通过逐步调节氩气与氮气比例，可获得成分均匀，膜层光滑致密，性能优异的灰黄色氮化锆薄膜。对直流溅射而言，氮气分压减小、溅射时间和功率增加，薄膜颜色均会越变越深；对射频溅射，氮气分压的影响很小。直流和射频溅射氮化锆薄膜的显微硬度随着氮气分压增大而先降后升，其余条件对硬度影响不大。SEM和AFM观察表明，随着

3、氮气分压的增加、溅射功率和溅射时间的减小，两种溅射法制备的氮化锆薄膜越不均匀和粗糙。X射线衍射分析表明，直流溅射法制备的氮化锆薄膜一般为非晶，而射频溅射法制备的氮化锆薄膜为晶态。关键词：氮化锆薄膜，直流溅射，射频溅射Abstract硕I：论文StainlesssteelandCo·Cralloy8rewidelyusedinorthodonticfield．However,manypeopleareallergictothemwhichlimitedtheiruse．Inaddition，there

4、isaremarkabledifferenceincolorbetweenteeth，stainlesssteelandCo—Cralloy．Lightyellowzirconiumnitridefilmswithcorrosionandwearresistantcharacteristicswereobtainedbytwomethods，D．Creactivesputteringandradiofrequencyreactivesputtering．Inthemeanwhile，theinflu

5、enceofparameters(partialpressureofnitrogen，sputteringpower,sputteringtimeandsubstratetemperature)onbondingforce，wearresistance，corrosionresistance，microhardnessandmicrosurfacemorphologyweretestedandanalyzedbyusingdynamicultramicrohardnesstester,SEM，AFM

6、，andX-raydiffraction．Theresultsshowedmatwhenthepartialpressureofnitrogenwas25％．theD．C．sputteringpowerwasIOOW,substratetemperaturewas200"Candsputteringtimewas10rain,lightyellowZrNfilmscouldbeacquiredbyadjustingtheArandN2flow．Theabove-mentionedZrNWaSunif

7、orm，compact，smooth，hardandwithgoodadhesion．whenthepartialpressureofnitrogenWas45％，theRFsputteringpowerWas200W,substratetemperatureWas200。Candsputtenngtimewas30min,greyyellowZrNfilmscouldbepreparedbyadjustingtheArandN2flow．Theabove-mentionedZrNwasunifor

8、m，compact,smooth．hardandwimgreatperformance．ThecolorofD．C．reactivesputteringZrNfilmsbecamedarkerasthedecreaseofpartialpressureofnitrogen,theincreaseofsputteringtimeandpower．AsforR．Ereactivesputtering,theimpactofpartialpressureofnitrogen