资源描述:
《cdlt1xgtznltxgtte晶体生长工艺研究及退火掺杂》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、西北_I业大学工学硕士学位论文ABSTRACTCd,_,Zn,TcisanimportantII一VIcompoundsemiconductorwithexcellentopticalandelectronicalproperties.Whenxisequalto0.04,itisusedasepitaxialsubstratesofHg,_yCdyTe.Whenxisintherangeof0.05-0.2,itcanbeusedforthefabricationofhighqualityx-ray
2、andY-raydetectors,photoelectricalmodulators,filmsolarcellsandsoon.Inparticular,thex-rayandY-raydetectorsmadefromCdo_92no,,Teareabletoreducetheleakagecurrentandimprovetheefficiencyfordetectionofradiation.Besides,thismateialcanworkatroomtemperaturefortheap
3、plicationsofnucleardetector.Inthispaper,thecoatingtechnologiesofcarbonfilmontheinnerwallofquartzampoulewerestudied,whichwereimportantforthegrowthofCdl_,Zn,Te.Bytheamelioratedtechniques,thecarbonfilmswithhighqualitywereobtained.TheingotsofCdo.9Zno.,Teandd
4、opedCdo.9Zno,,Te:InwereproducedbyACRTBridgmanmethod,andtheircompositiondistribution,opticalandelectronicalpropertiesweretested.TheresultsrevealthatthedopedingotownshigherresistivityandlowerIRtransmittance.But,therearenoobviousdifferencesbetweenthecomposi
5、tiondistributionsofthetwoingotsThedopingofInofCdZnTewaferswasalsoachievedthroughannealingbyaddingInintheannealingsources.Thespecificparameterswereestablishedaccordingtothethermodynamicprinciplesofmulti-componentsystem.Thepropertiesofthewafers,includingco
6、mpositiondistribution,opticalandelectronicalproperties,weretestedbeforeandafterannealing.TheresultsrevealthatthepresenceofIndoesnotaffectthedistributionofmaincomponents,butitdeterioratestheIRtransmittanceserously.Duringthisprocess,thelevelofdopingconcent
7、rationexceedsthedensityofCdvacancyinthecrystal.Inaddition,thepreparationofAucontactonCd,_xZnxTewaferswasstudied.Afterfurtherthermo-treatment,thestableohmAucontactwasachieved.11西北I-业大学工学硕士学位论文KeywordsCd,_,Zn,Te;coating;doping;annealing;compositiondistribu
8、tion;IRtransmitance;resistivity西北[业大学工学硕士学位沦文第1章绪论1.1引言光电子技术和信息技术是21世纪高新科技的杰出代表。作为支撑它们的物质基础,半导体材料在最近的数十年间获得了突飞猛进的发展。在这个过程中,半导体的各种物理特性不断被发现,各种物理规律不断被阐明,越来越多的半导体材料不断被研制出来。迄今为止,性能各异的半导体材料己有数千种之多。按化学组成分类,半导体材料主要分为元素半导体、化合物半导体、