GBT3163-1993-真空技术术语.pdf

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1、621.52:006.72U3D7C8}CJ8中华人民共和国国家标准GB/T3163一93真空技术术语Terminologyforvacuumtechnology1993一12一30发布1994一08一01实施国家技术监督局发布目次1主题内容与适用范围..........................................................................................(1)2引用标准·“”··············”··”·“···········““·”····

2、···“············“············““·······“·⋯⋯(1)3一般术语·价·····“·························”···········”···································“·”⋯⋯(1)4真空泵及有关术语··························”··价··”···························“·········“一(5)5真空系统及有关术语”········“”················”·····

3、····”·······················“··”···⋯⋯(10)6真空计“·············””·“···“··”···“”·”·”·“·“·”·········”·········“·····················一(15)7检漏及有关术语·················“·”·······“·”·········”·”··········”·······················“·⋯(18)8真空镀膜技术·....................................

4、......................................................·一(20)9真空千燥和冷冻干燥····”·”··················“·········“”·”······“························⋯⋯(23)10表面分析技术···”·······“·”·······“·”············”··········“·”···················“·····⋯⋯(27)11真空冶金············“·········“·”

5、········”·”···········”··········”·”························”一(31)附录A中文索引(补充件)·························”·······”·”·······““·”··········“··”⋯〔35)附录B英文索引(补充件)······“···················································“”·············”⋯(42)中华人民共和国国家标准GB/T3163一93真空技术术语代替G

6、B3163-82Terminologyforvacuumtechnology本标准参照采用国际标准ISO3529-1981《真空技术名词术语》。主题内容与适用范围本标准规定了真空技术方面的一般术语、真空泵术语、真空计术语、真空系统术语、真空检漏术语、ri空镀膜技术术语、真空干燥术语、表面分析术语和真空冶金术语。本标准适用于真空技术方面的技术文件、标准、书籍和手册等有关资料的编写。弓1用标准CUB3101有关量、单位和符号的一般原则GB6306.1-6306.4变容真空泵性能测试方法GB6307.1-6307.2蒸汽流真空泵性能

7、测试方法一般术语标准环境条件standardambientconditions温度为20C，相对湿度为6500，大气压力为:101325Pa=1013.25mbar=760Torr,脚气体的标准状态standardreferenceconditionsforgases3温度为0'C，压力为:101325Pa,压力(压强)ppressure气体分子从某一假想平面通过时，沿该平面的正法线方向的动量改变率，除以该平面面积或气体分子作用于其容器壁表面上的力的法向分量，除以该表面面积。注:“压力”这一术语只适用于气体处于静止状态的压力或

8、稳定流动时的静态压力.帕斯卡Papascal国际单位制压力单位，lPa=1N/m'.3.5托Torrtort压力单位，1Torr=扁atm.标准大气压atmstandardatmosphere压力单位，latm=1013251'a,毫巴mbarmillibar压力单位，lmb