微机电系统微传感器的结构-分析和优化-研究

《微机电系统微传感器的结构-分析和优化-研究》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、O黝ABSTRACTRESEARCHONTHEMEMSSENSINGSTRUCn爪ESANA【，YSISANDOPTIMIZATIONABSTRACTMEMS(Micro-electro-mechanicalSystems)refertodevicesorsystemsintegratedwithelectricalandmechanicalcomponentsinthescaleofmicrons．Duetoitssmallsize，lowcost，lowpowerconsgmptionandhi．ghefficiency,MEMStechnologyhasbeenwidelyu

2、sedinmanyfields．ThesinglemicroresonatorisoneofthemostclassicalMEMSstructures．Becauseitcantransferthemechanicalenergytoothersstylesandithasalargeamplitudeintherangeof1KHz一1MI-Iz，ithasbeenusedinmanydevices，likeautomobilesafetyairbag，microphone，mobilephone，satelliteetc．．Thenitisimportanttoresearc

3、hthedesignandoptimizationtechnologyofmicroresonatortothedevelopmentoftheMEMS．Thisarticlestarts硒也themicroresonator’Sandmicrofilterworkingprinciple，itsstructuresanalysisandoptimization，theinfluenceofslidefilmdampmgonthecombmicroresonator’Sdynamiccharacteristic．ItaimatsettingupandimprovingtheMEMS

4、sensingsmacmresoptimizationschemebytheresearchonthemicroresonator’Soptimizationskills．Intheworkingprinciplepart，itincludestheanalysisofthemicroresonatorstructures，theprincipleofelectrostaticactuationandthekineticprinciple．It’SasolidfoundationforthedynamicanalysisandbuildingtheMATLABanalysispro

5、gramfortheseriesofmicroresonatorpartsThemicroresonatorstructureoptimizationresearchisbasedonitsstructureparameterization．TherelationsbetweenstructureparametersandnaturalfrequencyalegotfromANSYSWorkbench，whichgiveabasisfortheparametricobjectiveoptimization．Thenaturalfrequency,itsmodeofvibration

6、，theamplitude-frequencycurveandthephase—frequencycurvecanbeobtainedbythemodalanalysisandtheharmonicresponse．O黜AB盯RACTInordertoresearchthedynamiccharacteristicsofacombmicro—resonatorvibrateswithairresistance，e．g．amplitude，frequencyetc．ThiswaymakesaprogrambyANASYSparametricdesignlanguageAPDL．Int

7、heprogramthes缸1lc嘶WaSbuiltasamasspointwitharea，theairresistanceissetbyFLUIDl39elementtype，thecombfingersaresetbyTRANSl26element，andthencalculatethemodelanalysisandharmonicresponse．Comparisonbetweenmodeltrialvaluesandtheoreticalvaluessho