精密隔减振平台参数优化-分析与控制器测试

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1、万方数据AbstractParameterOptimizationofIsolationSystemforPrecisionPlatformandDesignoftheControllerSpeciality：DisaterPreventionandReductionEngineeringandProtectiveEngineeringPostgraduate：YUANJieSupervisors：XuZhao—DongVibrationisolationtechnologyforprecisionplatformisthefoundationofthedevelop

2、mentofprecisioninstrumentandmicro—manufacturing．Itplaysanimportantroleinpromotingthedevelopmentofhigh—tech．Inordertominimizethedynamicresponseoftheprecisionplatformsinawiderangeoffrequencydomainandenhancethestabilityofprecisioninstruments，ahybridvibrationisolatorbasedonthemagnetorheolog

3、ical(MR)damperwasdesignedinthispaper．Thedynamicanalysis，sensitivityanalysis，parameteroptimizationandcontrolleroftheprecisionplatformwereresearched，respectively．Thispaperfocusesonthefollowingresearches：(1)Thedynamicsanalysisoftheprecisionplatform．Onthebasisofpreliminarywork，thispaperdesi

4、gnedahybridisolationsystem．Inthisisolationsystem，thecompoundvibrationisolationbearingissetasthepassivecomponentandthemagnetorheological(MR)damperissetastheactivecomponent．A7-DOFdynamicmodelofthevibrationisolationplatformwasestablished．Andthedynamicresponseoftheplatformundertheenvironmen

5、texcitationwascalculatedusingtime—historyanalysis．Analysisresultsshowthatthepreliminarydesigncansignificantlyreducethedynamicresponseofplatform．However，therelativedisplacementofthepistonandcylinderoftheMRdamperisbeyondthepreliminarydesign，andthecontroleffectinlowfrequencyrangeisabitpooh

6、Sofurtheroptimizationofthisisolationsystemisnecessary．(2)Analysisofthesensitivityofparametersandoptimization．ThesensitivityofparametersontheobjectivefunctionsWasanalysedfirstly．Onthebasisofthesensitivityanalysisresults，aparameteroptimizationmodelofthevibrationisolationplatformWasestabli

7、shed．NSGA—IIWasadoptedasthemulti—objectiveoptimizationalgorithmforthevibrationisolationplatform，whichenhancingtheperformanceofvibrationisolationplatform，andreducingthecostsatthesametime．(3)TestoftheATmegal28basedcontroller．ThestatictestandthedynamictestsoftheATmegal28basedcontr