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1、哈尔滨工业大学工学硕士学位论文AbstractInordertoovercometheshortcomingsofelectronbeamevaporationtechniqueandimprovetheadhesionstrengthbetweenthefilmandsubstrate,therebyincreasingtheelectronbeamevaporationtechnologyapplications.Inthispaper,aself-designcoilwasaddedtotheoriginallaboratoryequipment.Intheexperiment,
2、first,theradio-frequencypowerwithdrivingfrequencyof13.56MHzwasaccessedtothecylindricalcoil.MetalvaporisionizedtoplasmabytheRFglowdischargebetweenthecoilandthecrucible.Inthevacuumchamber,theverystrongbluelightwasobservedaftertheapplicationofRFpower;Second,theeffectofthegeometricconfigurationofthe
3、coil,thedischargeparameterstothereflectedpowerwerestudied,resultsshowedthatthediameterof82mmRFcoilwith3-turnandthedischargedistanceof100mmweremoreappropriateparameterswhichhavetheminimumreflectedpower.Otherthanthefluencyofelectronbeamwereabove160mA,thedischargewaseasiertohappen,butwhentheelectro
4、nbeamisgreaterthan200mA,thefilmwouldbetofalloff;Finallytheplasmaparametershasbeenstudiedbyprobeandemissionspectroscopy.Fromtheexperimentmeasurementsofprobe,itcanbefoundthattheincreaseofRFpowercausedtheenhancementofiondensityatvariouslocationsinthevacuumchamber,especiallycoilcenter.WhenRFpoweris1
5、70W,theiondensityofeachlocationincreaseddramatically.Thismayberelatedtothetransitionsindischargemode.Theincreaseofthefluencyofelectronbeamalsoleadtoimproveiondensity,butintheradiusof4cm-7cmattheradialiondensityincreasedconsiderably.Astheaxialdistanceincreases,theplasmainthesameplanetendstounifor
6、m.Byplasmaemissionspectroscopy,thecharacteristicsoftheplasmaspectrumarethesuperpositionofacontinuousseriesofcharacteristicspectrallines,whichfocusedonthecharacteristicspectrumbetween300nmto700nm.Aftercalibrationandfoundthatmostoftheparticlesareexcitedstatesoftitaniumatoms,andonlyasmallamountofap
7、riceoftitaniumions,amoreexpensivestateofthetitaniumionswasnotfound.AsRFpowerincreased,thenumberofspectralandtheintensityofspectralweregreatlyimproved.Therelativeintensityofioniclinesandsome-III-哈尔滨工业大学工学硕士学位论文atomiclines(suc
