ISO 14644-2-2015 Cleanrooms and associated controlled environments

ISO 14644-2-2015 Cleanrooms and associated controlled environments

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时间:2018-11-30

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1、INTERNATIONALISOSTANDARD14644-2Secondedition2015-12-15Cleanroomsandassociatedcontrolledenvironments—Part2:MonitoringtoprovideevidenceofcleanroomperformancerelatedtoaircleanlinessbyparticleconcentrationSallespropresetenvironnementsmaîtrisésapparentés—Partie2:Surve

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3、=BectonDickinson/5984713001,User=Zhu,JessicaNoreproductionornetworkingpermittedwithoutlicensefromIHSNotforResale,12/29/201502:36:11MSTISO14644-2:2015(E)COPYRIGHTPROTECTEDDOCUMENT©ISO2015,PublishedinSwitzerlandAllrightsreserved.Unlessotherwisespecified,nopartofthi

4、spublicationmaybereproducedorutilizedotherwiseinanyformorbyanymeans,electronicormechanical,includingphotocopying,orpostingontheinternetoranintranet,withoutpriorwrittenpermission.PermissioncanberequestedfromeitherISOattheaddressbeloworISO’smemberbodyinthecountryof

5、therequester.ISOcopyrightofficeCh.deBlandonnet8•CP401CH-1214Vernier,Geneva,SwitzerlandTel.+41227490111Fax+41227490947copyright@iso.orgwww.iso.org--```,`,,`,`,,,,```,`,```,,,`,,,-`-`,,`,,`,`,,`---ii©ISO2015–AllrightsreservedCopyrightInternationalOrganizationforSta

6、ndardizationProvidedbyIHSunderlicensewithISOLicensee=BectonDickinson/5984713001,User=Zhu,JessicaNoreproductionornetworkingpermittedwithoutlicensefromIHSNotforResale,12/29/201502:36:11MSTISO14644-2:2015(E)ContentsPageForeword.......................................

7、.................................................................................................................................................................................................ivIntroduction........................................................

8、...............................................................................................................................................................

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