资源描述:
《飞秒激光的2002产业现状》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、RIKENReviewNo.50(January,2003):FocusedonLaserPrecisionMicrofabrication(LPM2002)Femtosecondlasermicromachining:Currentstatusandapplications#NadeemH.RizviExitechLimited,UnitedKingdomFemtosecondlaserscurrentlyshowmuchpromiseaspotentialsourcesofchoiceinanumberoflasermicro-machini
2、ngapplications,includingbiomedicine,photonics,andsemiconductors.Thestatusofmicromachiningwithfemtosecondpulsesisreviewedforavarietyofmaterialsandacomparisonmadewithothersolid-statelasers.Anoutlookfordevelopmentsinthisareaispresented.IntroductionMetalsThemicromachiningofbulkme
3、talswashistoricallyadifficultTheuseofultrashortlaserpulseshavebeenshowntobetaskusingnanosecond(orlonger)pulselasersduetoissuesanattractiveoptionforthehighqualitymicromachiningoftodowithmeltingeffectsaroundthemachinedsite,recastmanymaterialsandtheirabilityforminimaldamageandmater
4、ialandgeneraledgequalityofthemicrostructure.Thepreciseprocessinghasbeenthoroughlyresearchedformanyfinecontrolwhichwasrequiredforprecisionmicrostructures1–4)years.Theincreasingworldwideinterestinfemtosecondcouldnotbeobtainedwithsuchlasers.Recently,femtosec-lasermicromachiningan
5、dthepotentialnewmarketsbeingondlasershaveovercometheseproblemsandhighquality6)investigatedhavepromptedthelasermanufacturerstode-micromachiningisnowpossibleinarangeofbulkmetals,velopmorepowerful,simpler,rugged,andmorecompetitiveasshowninFig.1.lasersystemsandthis,inturn,hasenco
6、uragedfurtherwork.TheotherrecentdevelopmentwhichhasaffectedtheareaTheissueoffutureindustrialapplicationsoffemtosecondofmetalmicromachiningisthedevelopmentofhighrepeti-lasersisstillahottopicfordebateanditisnotcurrentlytionratesolid-statelasers,particularlyneodymiumvanadateclear
7、whichapplication,ifany,willemergeasthedominant(Nd:YVO4)lasers.Therelativelyshortpulsedurationofuseroffemtosecondtechnologyinanindustrialcontext.Thistheselasers(typicallyafewnanosecondstoafewtensofdebateisfurtherclouded,however,bythecontinuousandnanoseconds)andrepetitionrateso
8、fafewtensofkilohertzrapiddevelopmentsinothersolid-statelasersthatcon