纳米金刚石薄膜微观结构和场发射性能研究

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1、---------------------------------------------------------------范文最新推荐------------------------------------------------------纳米金刚石薄膜微观结构和场发射性能研究摘要采用微波等离子体化学气相沉积法（MWPCVD）制备B/C比不同的掺硼纳米金刚石薄膜，通过采用扫描电子显微镜（SEM）、激光拉曼光谱（Raman）、X射线衍射分析法（XRD）和场发射性能测试对薄膜进行表征，实验结果表明，随着B

2、/C比从0ppm到4000ppm的逐步增加，晶型逐渐变得不完整，结晶程度不完全，表面呈现出大小不均一的球簇状，而且表面粗糙度也随之增加，薄膜的沉积速率降低，同时，掺硼可以促进（111）面的生长，在可见拉曼光谱中，出现由Fano效应引起500和1220cm-1特征峰。另外，由于掺硼引起导电性增强、粗糙度增加，缺陷数目增多，导致场发射性能增强。10191关键词纳米金刚石薄膜掺硼微观结构场发射21/22--------------------------------------------------------

3、-------范文最新推荐------------------------------------------------------毕业设计说明书（论文）外文摘要TitleTheMicrostructureandEnhancedFieldElectronEmissionPropertiesofBoron-dopedNanocrystallineDiamondfilmsAbstractTheboron-dopednanocrystallinediamondfilmswerepreparedonSi(100)

4、substratesbymicrowaveplasmachemicalvapordeposition.Effectsofboronconcentrationonnanocrystallinediamondfilmshavebeenstudied.Thedependenciesofsurfacemorphology,microstructure,phasecompositionandfieldelectronemissionpropertiesontheB/Cratioweresystematicallyin

5、vestigatedbyscanningelectronmicroscope,X-raydiffractometer,visibleandUVRamanspectroscopy.Withincreasingoftheboronconcentration,thediamondgrainsgathertogetherformingball-likeclusterswith21/22---------------------------------------------------------------范文最

6、新推荐------------------------------------------------------inhomogeneoussize,andthenanocrystallinediamondsurfacebecomerough.thedopedboronatomscanreductionofgrowthrateandpromotethegrowthofplane(111)surface.Itwasfoundthatsp2/sp3ratioofcarbonbondsincreased,andt

7、wopeakslocatedatapproximately500and1220cm-1resultedfromFanointerferenceintheRamanspectrawereobservedwithB/Cratio.Meanwhile,borondopingcanimprovetheirfieldelectronemissionpropertiesremarkablyduetothemodificationoffilmmorphology,theincreaseofconductivity,and

8、theintroductionofdefects.21/22---------------------------------------------------------------范文最新推荐------------------------------------------------------1.2金刚石薄膜的结构和特性1．2．1金刚石的结构金刚石的晶体结构是面心立方晶胞。其晶格常数在298K时为0.