欢迎来到天天文库
浏览记录
ID:52399593
大小:631.65 KB
页数:6页
时间:2020-03-27
《一种大量程SOI压阻式压力传感器.pdf》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、第28卷第8期传感技术学报V0l_28No.82015年8月CHINESEJOURNALOFSENSORSANDACTUATORSAug.2015APiezoresistiveSOIPressureSensorforWideMeasurementRangeZHANGRui,LIANGTing,,XIONGJijun一,LIUYutao一,WANGTaolong一.WANGXinxin,(1.KeyLaboratoryofInstrumentationScience&DynamicMeasurement(North
2、UniversityofChina),MinistryofEducation,Taiyuan030051,China2.ScienceandTechnologyonElectronicTest&MeasurementLaboratory,NorthUniversityofChina,Taiyuan030051,China)Abstract:ThispaperfocusesonstructuraldesignforoptimizingsensitivityoftraditionalpiezoresistiveSOl
3、pressuresensortoen—hancemeasurementrangeinhigh-temperatureenvironments.Bymodelingmechanicalproperties,ashallow—bossconfigurationisadopt—edforincreasingsensitivityandmeasurementrange.Keyinfluencefactorsofsensitivityincludingbossthicknessandshapeareana—lyzedand
4、simulated.Dopingconcentration,sizeofsinglepiezoresistor,arrangementofmetalwiresandtheirmaterialareobtainedwhentakingintoaccountdevicehigh—temperatureperformance.Piezoresistorlocationisarrangedonthebasisoftakingfulladvantageofmax—imum(orI—or)regionstomaintains
5、ensitivityandlinearity.Accordingtostressdistributionofthediaphragm,U—shapedpiezoresistorsarefinallyadoptedbyconsideringsensitivitylossduetofabricationdeviationofshallowbossedstructure.Finiteelementanalysis(FEA)resultsshowthattheoptimumdesignenablesthesensorch
6、iptooperateinwiderpressurecondition(within10MPa)withahighsensitivityof86.6mV/(V·MPa)andexcellentnonlinearityislessthan0.1%.Comparedwithothercurrentwide—rangesensors,thestrengthofshallowcentralbossedstructureliesinsensitivityandoverloadcapacity.Keywords:wideme
7、asurementrange;piezoresistiveSO1pressuresensor;hightemperature;finiteelementanalysis(FEA)EEACC:7230doi:10.3969~.issn.1004-1699.2015.O8.005一种大量程SO1压阻式压力传感器张瑞,梁庭,熊继军1,2,刘雨涛,王涛龙,王心心(1.中北大学仪器科学与动态测试教育部重点实验室,太原030051;2.中北大学电子测试技术国防科技重点实验室,太原030051)摘要:对传统的SOI压阻式压力传
8、感器进行了结构优化。目的是提高灵敏度,以满足在高温环境下大量程压力测量的实际需求。通过力学性能模拟,采用浅凸台结构来提高灵敏度和测量范围。分析并模拟了凸台厚度和形状对灵敏度的影响。得到了适合高温工作的掺杂浓度,压敏电阻的尺寸,金属引线的材料和布局。电阻放置在(or广-or)最大的区域以保持灵敏度和线性度。采用U形电阻补偿在浅凸台制作过程中的工艺偏差对灵敏度的影响。有限元分
此文档下载收益归作者所有