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ID:52399425
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页数:6页
时间:2020-03-27
《一种基于悬浮吸收层的双层结构的热电堆红外探测器.pdf》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、第27卷第6期传感技术学报V0l_27No.6CHINESEJOURNALOFSENSORSANDACTUATORSJune20142014年6月DesignofThermopile·BasedInfraredDetectorswithSuspendedAbsorber·ThermopileBi-LayersCHENYuanjing,MAOHaiyang',n,TANQiulin,XUEChenyang,OUWen,CHENDapeng,XIONGJijun(1.KeyLabofInstrumentati
2、onScienceandDynamicMeasurement,NorthUniversityofChina,Taiyuan030051,China;2.KeyLaboratoryofMicroelectronicsDevicesandIntegratedTechnology,InstituteofMicroelectroaics,ChineseAcademyofSciences,Beijing100029.China;3.SmartSensorEngineeringCenter,JiangsuR&DCen
3、terforlnternetofThings,Wuxi214135,China)Abstract:Anovelinfrared(IR)detectorisdesignedandpresented.Thedetectortakesadvantageofsuspendedabsorber—thermopilebi—layerstoachievehighperformancewitharelativelysmallsize.Thebi—layersarerealizedbyusingtwoseparatedsa
4、crificiallayers,whichincludeaPoly—Sifilmbeneaththethermopilesandapolyimidedepositionoverthethermopiles.Simulationresultsdemonstratethatthedetectivity,responsibilityandresponsetimeoftheIRdetectorscanreach2.85×10cmHZ(1/2)/W1800V/Wand6ms,respectively.Moreove
5、r,thefabrication,oftheIRdetectorishighlycompatiblewithstandardCMOSprocess,whichasaresult,makesthehigh—yieldandlow—costproductionpossible.Keywords:infraredthermopiles:suspendedabsorber—thermopilebi-layers;polyimide;front—etching;CMOSprocessEEACC:2650Zdoi:1
6、0.3969/j.issn.1004-1699.2014.06.005一种基于悬浮吸收层的双层结构的热电堆红外探测器陈媛婧,毛海央,谭秋林,薛晨阳,欧文,陈大鹏,熊继军(1.中北大学纳米纳米技术研究中心,太原030051;2.中国科学院微电子研究所集成电路先导工艺研发中心,北京100029;3.江苏省物联网研究发展中心智能集成传感器工程中心,江苏无锡214135)摘要:提出一种新颖红外传感器,这种传感器采用悬浮吸收层的双层结构的优势,来实现相对小尺寸下的高探测性能。双层结构采用2种牺牲层材料,分别为聚酰亚
7、胺牺牲层和预埋在热偶条和沉底之间的多晶硅材料。仿真结果证明了该种结构的探测率、响应率和响应时间分别达到2.85x10cmHz止/w、1800v/w和6ms。本文给出了该种热电堆红外探测器高度兼容于CMOS工艺的制备流程,使器件的高效量产和低成本生产成为可能。关键词:中图分类号:TP212.1文献标识码:A文章编号:lO04—1699(2014)06-0730-06IRdetectorshavebeenwidelyusedinbothmilitarysingle.1ayershavebeenreported
8、[一]withreleasingandcivilianfields,theapplicationsincludenight—visionwindowsopenedontheabsorberlayer,whichresultsinequipment。missileguidance,militarysecurity,ther—lossofabsorptionandhinderofheatconduction.Formograph【
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