全英文国外知名企业PECVD培训.ppt

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1、VacuumFundamentalsBasicVacuumandLeakDetectionUsethebasicterminologyforvacuumtechnologyExplainwhatavacuumisExplainwhyavacuumisnecessaryforsomeprocessVacuumFundamentalsDiscussthetwoimportanttypesofgasflowDescribetheeffectoftemperatureandpressureonavolumeofgasUsetheterm“throug

2、hput”todescribevacuumsystem,pumpoperationandgasloadBasicVacuumandLeakDetectionVacuumcomesfromtheLatin“vacua”Empty**Avacuumisonlyreally..onlypartiallyempty.BasicVacuumandLeakDetection?Vacuum!EvangelistaTorricelliBasicVacuumandLeakDetectionForceForceEqualizedBasicVacuumandLea

3、kDetectionForceForceUnderPressure!BasicVacuumandLeakDetectionForceUnderVacuum!ForceForceBasicVacuumandLeakDetectionHowisavacuumproduced?BasicVacuumandLeakDetectionBasicVacuumandLeackDetectionVacuumPumpWorkChamberTypesofVacuumRoughVacuum(approx.759to1Torr)BasicVacuumandLeakD

4、etectionTypesofVacuumHighVacuum(approx.1x10to1x10Torr)MediumVacuum(approx.1Torrto1x10Torr)BasicVacuumandLeakDetectionTypesofVacuumRoughtoMediumVacuum(approx.759to1x10Torr)UltrahighVacuum(Lessthan1x10Torr)HighVacuum(approx.1x10to1x10Torr)WHATISA"TORR"?BasicVacu

5、umandLeakDetection76cm76cm=760mm760Torr(1mmofHg=1torr)1torr=1000milliTorr1millitorr=BasicVacuumandLeakDetection1x10TorrAtmosphericPressure(Standard)=PressureEquivalents0psig(gaugepressure)14.7poundspersquareinch(psia)29.92inchesofHg760mmofmercury760torr760,000milltorrormi

6、crons101,325pascal1.013bar1013millbarBasicVacuumandLeakDetectionRoughVacuumHighVacuumUltrahighVacuumWhereisVacuumUsedFoodprocessingEvaporationFreezedryingDistillationSputteringElectricalconductionTubeprocessingHeattreatingIntegratedcircuitmanufactureDecorativecoatingParticl

7、eaccelerationChemistryresearchE-beamweldingVapordepositionIonimplantationInsulation(thermal)SpaceresearchMaterialsresearchMetallurgyPhysicsresearchSurfaceanalysisMolecularbeamepitaxyBasicVacuumandLeakDetectionWhyaVacuum?OneWord:CLEAN!BasicVacuumandLeakDetectionWhatgasesarew

8、etryingtoremove?Gas%byVolumeNitrogen78.08Oxygen20.08Argon0.93CarbonDioxide0.03Neon