半导体制造专业英语术

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1、1stlevelpackaging第•级封装2ndlevelpackaging第二级封装aberration象花/色左absorption吸收accelerationcolumn加速管acceptor受主Accumulatev・积聚.堆积acid酸acousticstreaming声学流activeregion有源区activate激活activateddopant激活杂质activecomponent有源器件adsorption吸附aerosol悬浮颗粒airionizer空气电离化器alignmentmark对准标记

2、alignment对准alloy合金alternateadj.交替的，轮流的.预备的v・交替，轮流，改变aluminum铝aluminumsubtractiveprocess铝刻蚀工艺ambient环境amnionia(NH3)氨气ammoniumfluondc(NH4F)氟化氨ammoniumhydroxide(NH4OH)氢氧化氨amorphous非晶的，无定型analog模拟信号angstrom埃anion阴离子anisotropicetchprofile各向异性刻蚀剖面anneal退火antimony(sb)僦a

3、ntirelectivecoating(ARC)抗反射涂层APCVD常压化学气向淀积applicationspecificIC(ASIC)专用集成电路aqueoussolution水溶液areaarray面阵列argon(Ar)n.

4、化］氤arsenic(As)碑arsine(AsH3)砕化氢，砕烷ashing灰化，去胶aspectratio深宽比，高宽比aspectratiodependentetching(ARDE)与刻蚀相关的深宽比asphyxiant窒息剂assaynumber检定数atmosphericadj.

5、大气的atmosphericpressure大气压atmosphericpressureCVTD(APCVD)常压化学气向淀积atomicforcemicroscopy(?VFM)原子力显微镜atomicnumber原子序数attemptn.努力，尝试，企图vt.尝试？企图augerelectronspectroscopy(AES)俄歇电子能谱仪autodoping自掺杂automaticdefectclassification(ADC)缺陷自动分类Bback-endoflinc(BE(儿)(生产线)后瑞工序backgr

6、ind减薄backingfilm背膜bafflevt困惑，阻碍.为难（挡片）baffleassemblyn.集合.装配.集会，集结，汇编（挡片块）ballgridarray（BGA）球栅阵列ballroomlayout舞厅式布局，超净间的布局barrelreactor圆桶型反应室barriermetal阻挡层金属barriervoltage势垒电压base基极，基区batch批bayandchaselayout生产区和技术夹层区beamblow-up离子束膨胀beamcurrent束流beamdeceleration束流

7、减速beamenergy离子束能呈beol（生产线）后瑞工序bestfocus最佳聚焦BGA球栅阵列Biasing电圧拉偏BICMOS双极CMOSbincodenumber分类代码号binmap分类图bipolarjunctiontransistor(BJT)双极晶体管bipolartechnology双极技术(工艺)bird'sbeakeffect鸟嘴效应blanketdeposition均号淀积blower增压泵boat舟BOE氧化层刻蚀缓冲剂Bonvoyage［法］再见，一路顺风I平安

8、bondingpads压点b

9、ondingwire焊线，引线boron(B)硼borontrichloridc(BCL3)三氯化硼borontrifluoride(BF3)三氟化硼borophosphosilicateglass(BPSG)硼磷硅玻璃borosilicateglass(BSG)硼硅玻璃bottomantircflcctivccoating(BARC)下减反射涂层boule单晶锭bracketn.墙上凸出的托架，括弧，支架v.括在一起breakthroughstep突破步骤，起始的干法刻蚀步骤brightfielddetection亮场

10、检杳brushscrubbing涮洗bubbler带鼓泡槽bufferedoxideetch(BOE)氧化层腐蚀缓冲液bulkchemicaldistribution批鼠化学材料配送bulkgases大批气体bulkheadequipmentlayout穿壁式设备布局bumpedchip凸点式芯片buriedlaye