chemical_unlayering英文文献资料

chemical_unlayering英文文献资料

ID:39204237

大小:774.63 KB

页数:14页

时间:2019-06-27

chemical_unlayering英文文献资料_第1页
chemical_unlayering英文文献资料_第2页
chemical_unlayering英文文献资料_第3页
chemical_unlayering英文文献资料_第4页
chemical_unlayering英文文献资料_第5页
资源描述:

《chemical_unlayering英文文献资料》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库

1、st21CenturyProductAnalysisChemicalUnlayering-113ChemicalandMechanicalDeprocessing..................................................213.1WetChemicalEtching..........................................................................213.1.1SiliconEtchChemistry..............

2、.....................................................213.1.2DielectricRemoval.........................................................................313.1.3DecorationEtches/Stains................................................................513.1.4MetalInterconnecta

3、ndPolysiliconEtches......................................613.1.5GalliumArsenideEtchChemistry..................................................713.2ReactiveIonEtches..............................................................................713.2.1Nitride.............

4、.................................................................................1013.2.2SiliconDioxideEtches.................................................................1013.2.1MetalEtches............................................................................

5、.....1113.3ParallelLapping.................................................................................1113.4DieBacksidePolishing......................................................................1213.5References..................................................

6、.......................................13©2002,Semitracks,Inc.stChemicalUnlayering-1321CenturyProductAnalysis13ChemicalandMechanicalDeprocessingOnceafailuresitehasbeenlocalizedtoaparticularx-ylocation,itisoftennecessarytoexposethedefecttoexamineitmoreclosely.Thisisacco

7、mplishedthrougheitherchemicaldeprocessing,mechanicaldeprocessing,oracombinationofboth.Chemicaldeprocessingisbothanartandascience,whichrequiresbothknowledgeofthepartbeinganalyzedandsomebasicchemistryproperties.Theentireprinciplebehindchemicaldeprocessingistouncovertheph

8、ysicalmechanismcausingthedevicetofailallowingfordocumentationandfailuredetermination.Ifcareisnottaken,thephysicalevid

当前文档最多预览五页,下载文档查看全文

此文档下载收益归作者所有

当前文档最多预览五页,下载文档查看全文
温馨提示:
1. 部分包含数学公式或PPT动画的文件,查看预览时可能会显示错乱或异常,文件下载后无此问题,请放心下载。
2. 本文档由用户上传,版权归属用户,天天文库负责整理代发布。如果您对本文档版权有争议请及时联系客服。
3. 下载前请仔细阅读文档内容,确认文档内容符合您的需求后进行下载,若出现内容与标题不符可向本站投诉处理。
4. 下载文档时可能由于网络波动等原因无法下载或下载错误,付费完成后未能成功下载的用户请联系客服处理。