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ID:38148951
大小:3.19 MB
页数:5页
时间:2019-05-26
《新型磁驱动增大检测电容的高精度MEMS惯性传感器研究》由会员上传分享,免费在线阅读,更多相关内容在行业资料-天天文库。
1、第5期电子学报Vol.38No.52010年5月ACTAELECTRONICASINICAMay2010新型磁驱动增大检测电容的高精度MEMS惯性传感器研究董林玺1,2,焦继伟2,颜海霞3,孙玲玲1(1.杭州电子科技大学射频电路与系统教育部重点实验室,浙江杭州310018;2.中科院传感技术国家重点实验室,上海200050;3.东芝水电设备有限公司,浙江杭州311504)摘要:增大传感器振子的质量和静态测试电容可以减小电容式MEMS惯性传感系统的噪声,而深度粒子反应刻蚀工艺由于复杂的工艺原因,当深宽比较大时,不能刻蚀出大质量和大初始电容的传感器.据
2、此,本文研究了一种磁驱动增大检测电容的MEMS惯性传感器,通过电磁驱动器,传感器的静态测试电容可以大幅增加,在梳齿电容上刻蚀阻尼槽后,其机械噪声达到061μg每根号赫兹,仿真其共振频率为598Hz,静态位移灵敏度为07μm每重力加速度,基于硅玻璃键合工艺,制作了栅形条电容式惯性传感器,并用电磁驱动的方式测试其品质因子达到715,从而验证了制作工艺的可行性和电磁驱动器改变传感器初始静态测试电容的可行性.关键词:电容式加速度计;惯性传感器;高精度;深度粒子反应刻蚀中图分类号:TN43文献标识码:A文章编号:03722112(2010)0510
3、5305ANovelMEMSInertialSensorwiththeActuatorsDrivedbyLorentzForceforIncreasingtheInitialSensingCapacitance1,2,JIAOJiwei2,YANHaixia3,SUNLingling1DONGLinxi(1KeyLaboratoryofRFCircuitsandSystemofMinistryofEducation,HangzhouDianziUniversity,Hangzhou,Zhejiang310018,China;2Stat
4、eKeyLaboratoriesofTransducerTechnology,ChineseAcademyofSciences,Shanghai200050,China;3ToshibaHydroElectroEquipmentsCompany,Hangzhou,Zhejiang311504,China)Abstract:ThenoiseofcapacitiveMEMSinertialsensorsystemcanbedepressedbyincreasingthemassoftheseismicandinitialsensingcapacit
5、ance,whichcannotbeobtainedbydeepionetchprocesswhentheaspectratioofcombcapacitanceisverylarge.Accordingly,anovelsuperhighprecisionMEMSinertialsensorwiththeactuatorsdrivedbyLorentzforceforincreasingtheinitialsensingcapacitanceisdevelopedinthispaper.Theinitialsensitivecapacitance
6、isincreasedlargelybytheactuators,themechanicalnoiseisreducedto0.61ugpersquarerootHzbyetchingdampingslotsinthesensitivecombsofactuators.TheresonantfrequencyobtainedbyANSYSis598Hz,andthestaticdisplacementsensitivityis07μmpergaccelerationofgravity.Thegridcapacitiveinertialsens
7、orisfabricatedbyMEMSsiliconglassbondingprocess,andthequalityfactortestedbywhichthesensorisdrivedbyLorentzforceis715inair,whichprovesthefeasibilityoftheideathatthenovelMEMSsensorcanbefabricatedbysiliconglassbondingprocessanditsinitialsensingcapacitancecanbeincreasedbyLorentz
8、forceactuators.Keywords:capacitiveaccelerometer;inertialsenso
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