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ID:37406942
大小:11.75 MB
页数:113页
时间:2019-05-23
《单晶硅纳米梁力电及其耦合特性理论研究》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、AbstractAbstractAttributedtothesmallmassandsize,nanoelectromechanicalsystems(NEMS)comewithextremelyhiighfundamentalresorlarlcefrequencies(GHZ),extremelyhighqualityfactors(1O’),extremelyhighforcesensitivity(10-2'N),extremelylowpowerdissipation(10。’Ⅵ.Theseattributescollectivelymaketh
2、enanobeam(theprimarycomponentofNEMS)suitableforimmensepotentialapplicationssuchasresonators,mixers,filters,sensors,andactuators.NEMSiswidelyfabricatedfromsinglecrystalsilicon,whichisoneofthecornerstonesoftheelectronicsindustry.Therefore,thesiliconnanobeamhasattractedthesignificanta
3、ttention,anditselectromechanicalpropertiesaLswellasphysicsparametershavebeenthekeyprobleminthedesignandapplicationofNEMS。Theelectromechanicalpropertiesofsiliconnanobeamdeviatefromtheirmacroscopiccounterparts,necessitatingaproperunderstandingandthedevelopmentofaccuratephyrsicaltheor
4、iesforNEMS.Asthestructuresbecomenanoscale,macroscopicmechanicswillbreakdownandatomisticbehaviorwillemerge.Atomistiesimulationmethodssuchasfirst-principlescalculations,andmoleculardynamics(MD)simulations,havebeenemployedforanaccurateanalysisofsystemscomprisingseveralhundredsofatoms.
5、AlthoughthecharacteristiclengthofNEMSisoftenafewnanometers,alargenumberofatomsareinvolved.Therefore,computationalcostisallinherentdrawbackwithinthem.Meanwhile,theclassicalphysicalmodelsorcontinuumtheoriescan’taccuratelyanalyzeelectromechanicalpropertyofthesiliconnanobeam.whichinclu
6、dessomeneweffectssuch鹊quantumsizeeffect,surfaceeffectandsoon.Inotherword,theymaynotbedirectlyapplicableiilthenanoworldbecameofthesmallscalesencounteredinNEMS.Therefore,inthisdissertaion,basedonasemi-continuumatomistielatticemodelandastress-dependentdiscretevalencestructuremodel,the
7、electromechardcalcouplingpropertiesofthesiliconnanobeamshavebeensystemicallyinvestigated.11bemainworkandinnovationsofthisdissertationaredescribed笛following:(1)Asemi-continuumatomistielatticemodelisdevelopedforthemechanicalanalysisofthesiliconbeamatmicroandnanoscale.whichcapturesthe
8、atomisticphysicsandretains
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