创新型微纳米测量探头机理的研究

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1、合肥工业大学博士学位论文创新型微纳米测量探头机理的研究姓名：陈叶金申请学位级别：博士专业：测试计量技术及仪器指导教师：范光照20070301ABSTRACT‰ekindsofinnovativemicro／nanomeasuringprobesystemwillbeintroducedinthispaper,whichdevelopedfromtheDVDpickupheactcombiningwiththeanalysisabouttheopticaltheory,themechanismstructurea

2、ndtheelectronicscharacteristicofpickuphead．Itconsistsoftheopticalnon-contactprobesystem，opticalautofocusingprobesystem，opticaltouchtriggerprobesystem．Focalell'orsignalofpickupheadisachievedaccordingtotheAstignmticalprinciple，andthattheopticalnon-contactprobe

3、s37stemwiththemeasurementrangesof2ttmandthemeasurementuncertaintyof1．1nmisobtained．ThiSprobesystemisimnmnetothevariationofretiectiveratiosandcurvatureonthesurfacesofsamplesviaimprovementofthesignalprocessmethod．Foraugmentofthemeasurementrangeofprobesystem，th

4、esystemicmodelofthevoicecoilmotorinpickupheadjsinvestigated，andthentheautofocusingnon-contactopticalprobesystemwith6001anmeasurementrangeisdevelopedviathesystemicrecognition,thedesignandcontrolofPIDparametersandthehysteresiscompensationofvoicecoilmotor．Atfir

5、st,themeasurementuncertaintyofthisprobesystemiS0．2pmbecauseoftbeinfluenceofhvsteresisandthemethodofsignalprocess．TheinfluenceofhysteresisiSresolvedassociatingthedevelopedminiatureMichelsoninterferometerwithvoicecoilmotor．Consequentlythemeasurementprecisionof

6、theautofocusingprobesystemisimprovedwiththerangeofaboutlmmandthemeasurementuncertaintyofbeaerthan30nm．Theopticaltouchtriggerprobesystemisachievedwiththebasisofthehigh-precisioncharacteristicofopticalnon．conteatprobesystemandahi曲sensitivetriggerstructure．The3

7、Dspatialforcemodelandpre-travelmodeloftheprobesystemisestablishedthatthetriggerforceislessthan40／zNand山erepeatabilityonsamedkecfioniSabout11．2nm．Thesethreekindsofprobesystemdascribadabovecouldbeassembledonhi曲-precisionmeasurementinstrumentsfordi伍：rentmeasure

8、mentdemands．Keywords：DVDPickupHead；FocalErrorSignal；Autofocusing；TouchTriggerProbe；Micro／NanoMeasurement插图清单图卜1美国NIST分子测量机⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯2图1-2光栅测量图样⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯2图1-