离子注入与热扩散法制备光波导的.研究

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1、山东大学硕士学位论文propagatesbetweentheopficalbarrierandthesurfaceofthesample．Oneofthedrawbacksoflightionimplantationisthat,thewaveguideformationoftenneedsquitehighdosesupto1016ions／era2．EvenSO，thewaveguideisstillhardtofabricateinsomeopticalmaterials,whileheavierionneedsrelativelylo

2、werdoses．Themechanismoftheheavyionimplantationdiffersaccordingtospicesofmaterials．Itisgenerallyconsideredthat,duringtheprocedureofimplantation,ionsimplantedwillinducelatticedisturbanceinthenear-surfaceandtherefractiveindexchangesconsequently．Thistypeofwaveguidesrdiesontheen

3、hancedrefractiveindexlayerandmostlybesensitivetothepolarizationdirectionofthelight．Planarwaveguideconfinesopticalfieldone-dimensionly,whichlimitsitsapplicationinwaveguidedevices，whilechannelwaveguidesrestrictopticalwaveintwodirections．Mostopticalactiveandpassivedevicessucha

4、sopticalcoupler,modulator,opticalswitchandwaveguidelaserarebasedonchannelwaveguidestructure．Nowadays，theexplorationoffabricationmethodsofchannelwaveguidehasbecometheresearchemphasis．Theattemptoffabricatingchannelwaveguidestructureisofgreatimportanceinbothapplicationofwavegu

5、ideandthecombinationbetweennucleartechnologyandoptoelectronics．Thermaldiffusionisalsoawaveguidefabricationmethodofformingwaveguidelayerbyme&usof仃eatingsubstratewithdepositedlayerofmetalorothermaterialsonsurfaceinhightemperatureapparatus．Therefractiveindexinthediffusedwavegu

6、idelayerisslightlyhigherthanthesubstrateandtheordinaryrefractiveindexandextraordinaryrefractiveindexchangessimilarly．Themodificationamplitudeofrefractiveindexandthedepthofthewaveguidelayerdependonthethicknessofthemetalfilmadheredtothesurfaceofthesubstrate．Inthethermaldiffus

7、edlayer,theconcentrationdistributionofthediffusivematerialshowssmootholrve．Waveguidethicknessdependsondiffusiontimeandtemperature,whilechangeofthesurfacerefractiveindexliesonthethicknessofthemetalfilm．Therefractiveindexprofilealongverticaldirectionofthediffusedwaveguidelaye

8、rpresentsGaussiandistribution·Ifionimplantationisimplementedonthesurfaceofthediffu