《薄膜材料复习题》word版

《《薄膜材料复习题》word版》由会员上传分享，免费在线阅读，更多相关内容在应用文档-天天文库。

1、1.Pleasedepicttheeffectsofionbambardmentintheprocessesoffilmgrowthandplasmaetching.2.Pleasesummarizethedepositionmethods,properties,andapplicationofdiamondfilms.3.WhatisthedistinctionbetweenPVDfromCVD?4.Pleasedescribetheprincipleofmagnetronsputteringaccordingtothe

2、followingfigure.5.PleaseexplaintheworkingprinciplesofRotaryvanepump,Diffusionpump,andCryopump.6．(a)Pleasequantitativelydiscusswhyanegativeself-biasemergesonanelectrodeintheRFdischargeplasma,(AssumingTownsendsecondary-electroncoefficientγeis0.1;electronvelocityve=9

3、.5×107cm/s,ionvelocityvi=5.2×104cm/s);(b)Deducetherelationshipformulabetweentheself-biasvalueandelectrodesize.(AssumingthesamecurrentdensityjA=jB,jA=4ε0/9dsA2×(2q/m)1/2VA3/2,jB=4ε0/9dsB2×(2q/m)1/2VB3/2)7.(1)Whatspecialx-raydiffractionconditionisrequiredforcharacte

4、rizingthinfilmmaterialscomparingwithbulkmaterials?Why?(2)Whataretheoriginscausingstressinthinfilms?8．PleasedescribethefundamentalsequentialstepsinCVDprocess.9.Pleasecalculatethethicknessuniformityofdepositionontheplateshowninthefollowingfigure(thethicknessratiobet

5、weentheedgeandcenteroftheplate)forpointsourceandsurfacesource,respectively.(3-29)10.Thefollowingfigureshowsthechangesoflatticeconstants,grainsize,anddislocationdensityofgrownthinfilmswithbombardingenergy,pleaseexplainthereasonsofthechangingtrend?(4-86)11.Pleasedis

6、cusshowsubstratetemperatureandconcentrationofsourcegasesinfluencethinfilmstructureduringCVDprocess?(6-65)12.What’stheoriginofinternalstressinthinfilms?HowtoevaluateinternalstressofthinfilmsbyXRD?13.Pleasededucetheformulacalculatingmeanfreepath.(2-14)14．Whataremole

7、cularflow,viscousflow,andturbulentflowandtheirdistinguishingcriteria?(2-22)15.(a)Pleasederivethecalculationformulaofimpurityconcentrationoriginatedfromtheresidualgasesduringthinfilmevaporationprocess.(b)AnAlfilmwasdepositedatarateofabout1μm/mininvacuumat25°C,andit

8、wasestimatedthattheoxygencontentofthefilmwas10-3.Whatwasthepartialpressureofoxygeninthesystem?(AssumingthedensityofAlfilmstobe2.7g/cm3)16.Inthefollowing