半导体器件模拟

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CONTENTSPART1:NMOS1GettingStarted12CreatinganNMOSDeviceStructureUsingATHENA33NMOSDeviceSimulationUsingATLAS254CreatingNMOSStructureUsingDEVEDIT35PART2:OTHERDEVICES5ThinFilmResistor:CreatinganThinFilmResistorUsingATHENA456ZenerDiode567MSJunction:CreatingaM-SJunctiongUsingATLAS598MESFET659BJT8910SolarCell10611TFT119Appendix129

1Chapter1:
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24A2.19B᦮NMOS᪀

25Chapter3:ᵨATLASDNMOSEFᘤHI3.1ATLASJKATLAS#$LMᱥᳮḄPQᘤHIᘤ.RS⚜UᱯWXYZ᪀Ḅᵯ[F%2\ᘤ]F^ᑁ`ᱥᳮaᑴ.ᙠSILVACO'sVIRTUALWAFERFABHId᛻f,ATLASSᓫhiᵨᡈὅk#$᪶mnᐹ.ᙠ⚜UᵯpឋrᔜtuvwxyḄᐜ{|},ᘤHI~IᔠᘤHI5SPICEH.3.1.1ATLASᐭ5A3.1ḄᐭATLASḄ.ᜧ`ᑖATLASHIiᵨ$ᐭ:#$ᒹ᡻FḄ3ᦻᦻ%9#$W᪀Ḅ᪀ᦻ.ATLASᦻ.]F(run-timeoutput)]FtuḄᢣᓭ%2£¤┯¦5§£¨Ḅ©ª;¬ᦻ(logfiles)ᘤᑖ᪆^ᡠᨵ±²Ḅᵯ³ᵯ´;\ᦻ(solutionfiles)ᘤᜐM¶#·´f\vw¸ᐵḄPQஹQᦪº.A3.1ATLASḄᐭ»3.1.2ATLASḄ3{|ᙠATLAS}%¼$ᐭᦻ½¾ᒹ¿9ÀÁ{|᣸ᑡḄÄÅÆÇ(᣸ᑡ{|᝞A3.2).᝞{|┯¦%È#$┯¦%u|]FÉÊ%ᡈ~YËu|ḄÌÀÁ]F.

26GroupStatementsMESHREGION1.StructureSpecificationELECTRODEDOPINGMATERIALMODELSCONTACTINTERFACE3.NumericalMethodSelection-METHODLOGSOLVE4.LOADSAVE5.ResultsAnalysis_____EXTRACTTONYPLOTA3.2ATLAS3Å9¼ÅÍ⌕ḄÆÇ3.1.3789:ATLASᙠDECKBUILDf]FATLAS,ᐭdeckbuild-as&ÏÐ^,DECKBUILD~᝞A3.3ᡠ%ÑDECKBUILDfÒS9Ó%¨ᙠÔEᐭATLASÕÌATHENAHᙽ.nextJline)stopyJ)cont)run)quitLine:1paste)initJ)pause)clear)restart)killStop;NoneWedMar913:22:562005E;0cLitingonhost:svco-sg31ATLM>ATLASstartedATLASA3.3DECKBUILD×ØfATLASHIᘤ3.1.4ᵨATLAS=>?᪀ᙠATLAS}%#$ᘤ᪀S9ᵨ$ÌÙÒÚᩭWÜ1.Ѷ#ᦻ}ÝᐭÔÞᙠḄ᪀.ß$᪀S9ᵫᐸâu|᝞ATHENAᡈὅ

27DEVEDIT)ãä.2.ᑭᵨDECKBUILDḄæçè☢ᱯឋ%ÑATHENAᡈDEVEDITêᣚÕᩭ.3.ᵨATLAS3᪀ä#$᪀.¸DMìÒí%ì#5ìPÒíiᵨîᩭïðᑭ,ᦑÕïò☘Ṇ.ᙠõö}%~iᵨìPÒí.3.2NMOS᪀ḄATLASHIᙠõö}%ᡃ÷~ø¨᝞fHIÜl.Vds=0.1V^Id-Vgsᐵùúû.2.#üᘤýᦪ%᝞Vt,Beta5Theta.3.Vgs=l.IV,2.2V,3.3V^Id-Vdsᐵùúû.ᙠìPþᵨATHENAãäNMOS᪀%ÿᩭ,NMOSᘤḄᵯᱯឋ.3.3ATLASᐭDECKᦻATLASᘤᐭgoatlasᐭᵫATHENAḄ!᪀ᦻ“nmos.str”ᙠATLASCommands$ᓫ&'(⌱*Structure—>Mesh...”ᡭATLASMesh$ᓫ.a.ᙠType,-ᓫ.Readfromfile.b.ᙠFilename•-0ᐭ!᪀ᦻ1“nmos.str”.c.ᓫ.WRITEᢥ3.3.4456789:NMOS!᪀;<ᙠATHENA&ᦑ>?!᪀56789.ᙠ456789&,ᡃABCᑖEᵨModelஹContactHInterface564ஹIJᱯឋKLM☢Oឋ.3.4.1456PQRᓫḄMOS,S₞Uᵨ4SRHHCVT.SRHVShockley-Read-HallWᔠ4YCVTVLombardiZ4[4(]^ATLASUser'sManualvol.lpp.3-43),_`a,bᒹdefஹgfஹhijஹᚖlj'mḄnᵨop᳛4.56rsb4a.'(⌱*"Commands—>Modcls—>Models..."ᡭATLASModel$ᓫ.b.⌱*K⌱⚗Category:MobilityMobility:CVTPrintModelStatus:YesᦋvCVT4wxy(᝞{B⌕Ḅ})1.ᓫ.DefineParametersLCVT…ᓽᑮCVT$ᓫ.2.ᦋ]ᦪᓫ.Apply.Wᔠ4a.ᙠCategory,-⌱*Recombination”ᑮbWᔠ4:Auger,SRH(FixedLifetimes)HSRH(Conc.Dep.Lifetimes).

28b.⌱*SRH(Conc.Dep.Lifetimes).c.ᓫ.WRITE.3.4.256IJឋᵯ᩽ḄIJᙠwxᎷ`ᡂIJ.᝞{56ᦪᵯ᩽VᾠᱯIJContactᵨᩭ56•bᡈbᵯ᩽ḄOᦪ.56n4ᨔấḄᦪa.'(⌱*"Commands—>Models—>Contacts…”ᡭATLASContact$ᓫ.b.ᐭᡈ⌱*᝞Electrodename:gaten-polyc.ᓫ.WRITE.3.4.356M☢ឋ56NMOS!᪀ḄM☢ឋ,UᵨInterface.¢ᵨᩭ56/¤¥M☢ḄM☢ᵯ₹§fH⊤☢Wᔠ©f.56Si-SiO2M☢ᜐ«ᙠ☢§f3X101%!?Ḅ¬5ᵯ₹a.'(⌱*aCommands,>Models,>Interface”ᡭATLASInterface$ᓫ.b.ᙠFixedChargeDensity—*-ᐭ3el0.c.ᓫ.WRITE.3.5ᦪy®¯⌱*789IᩭᡃA⌱*ᦪy®¯Ḅ°4.ᙠ±ᘤ²⚪´KUᵨµ¶Ḅ®¯.PQMOS!᪀,Uᵨ±὚ᔠ(GUMMEL)Hᐰ὚ᔠ(NEWTON)®¯.Rᓫ¹ᩭ±὚ᔠ®¯(᝞GUMMEL®¯)ᙠºᢝᐸ½v¾µvḄ¿À±ÁbÂþrb?Ä,lᢝÅᑮÆÇ,bÈ5±.ᐰ὚ᔠ®¯(᝞NEWTON®¯)V¶´±ÉÊ&ᡠᨵḄÂþ.MethodÍÎ᝞a.'(⌱*"Commands—>Solutions—>Method..”ᡭATLASMethod$ᓫ.b.ᙠMethod,-¶´⌱*NewtonHGummcl.c.Max.numofinterationswxy25.᝞ᨵB⌕ᦋv.d.ᓫ.WRITE.¶´⌱*NewtonHGummelϱÐ?ÄᐜÒiGummelÓÔ,᝞{ÕÖᦈØḄ}IḼᵨNewton®¯Ú±.3.6±56789ᙠ±789Û,Logᵨᩭº«ATLASÜÝḄᒹÞᡠᨵßàឋḄáâᦻ,Solveᵨᩭ±µ¶ãä´Ḅå,Loadᵨᩭᐭᡠᨵ±ᦻ(solutionfiles).3.6.1Vds=0.1V´Id-Vgsæçᙠèéê&,ᡃAëìÆᑮNMOS!᪀Ḅ,ᩩRᓫḄVds=0.1V´Id-VgsæçîᑮïðḄa.'(⌱*"Commands—>Solutions—>Solve...”ᡭATLAStest$ᓫ.b.ᓫ.Prop…ᢥ3òóATLASSolveproperties$ᓫ.

29c.ᙠLogfile,-ᐭáâᦻ1“nmosl_"ôᓫ.OKᢥ3.d.IḼõ᪗p÷ø⊤ùú,ᓫ.õ᪗û⌱*“Addnewrow”᝞ü3.4ᡠý.e.þõ᪗p÷gate]ᦪIḼᓫ.õ᪗û.ᙠ,ᑡᵯ᩽⌱ᵯ᩽drain.ᯠInitialBias0.1ᓫWRITE.f.Ḽ᪗⊤,ᓫ᪗!⌱“Addnewrow”.g.ᙠ“gate”-$᪗CONST,ᓫ᪗!⌱“VAR1”ᨬ'()FinalBias3.3,*+Delta0.1.,3.4-./Ḅ1$h.ᓫWRITE.ᙠDECKBUILDᦻ3456ᑮ᝞9:;

300Vᓄᑮ3.3V.im:;Ḅnameᦪpᵯ᩽xᑖᜧᑏḄ.3.6.2?ᘤᦪ1ᘤᦪ᝞Vt,BetaIThetaḄ?ᵨATLASExtract¢ᓫᩭ¤¥Extracts—>Device..."ᡭ¨ATLASExtraction¢ᓫ.b.ᙠ©ªW«9,VtᙠTestname1¬g⌱.ᯠᵨᡝ¯ᦋ©ªḄ?⊤±².c.ᓫWRITEᢥ´,VtExtract:;µ¥ᙠDECKBUILDᦻ345.¶·=¸*¹YZ*ḄVt¦ᦋBetaஹTheta.ᙠ»$(run)z{¼½ᡃ¿◤⌕ᵨTonyplot:;Áµz{|a.ÃÄÁµId-VgsᐵÆÇÈᙠᨬḄExtract:;!ᐭ9Tonyplot:;ᓽ

3147G-14.3*-22.9*ElectrodeVaCV)Jp(A/um)source0.000e+00-5.847e-05-2.976e-27-5.847e-05-5.847e-05drain1.000e-U15.847e-052.019e-235.847e-055.847L05gate3.300e+00-O.OOOe+OO-0.000e+00-0.000e+00o.onnH-onbackside0.000e+00-1.8826-14-7.709e-16-1.959e-14-1.959e-14Total-1.25413Timeforbiaspoint:24.00sec.Totaltime:1067.96sec.ATLAS>EXTRACT>initinf="nmos1_0.log"EXTRACT>extractnam9="vt"(xinterceptCmaxslopeCcurve(abs(v."gateM),absCi."drain"))))-absfaveCv.,,drainM))/2.0)vt=0.203864VEXTRACT>extractname="beta"slopeCmaxslopeCcurveCabsCv."gate").absCi."drain"))))*C1.0/absCaveCv."drain")))b9ta=0.000280309A/V2EXTRACTுextractname="theta"((nrax(abs[v.'drain"))*$"beta")/maxCabsCi."drain"]))1(1.0/(max(abs(v."gate")]-theta=0.1563941/VEXTRACTுquitATLAS>Òtonyplotnmos1_0.logFinishedexecutingIine49ATLAS,3.6ÓÔ?ᘤᦪḄDECKBUILD»$е453.6.3ᵨLog,SolveILoad:;ÕÖÇÈ×3ØÙḄ91[Ú᪗xÕÖVgs=l.lVஹ2.2VI3.3V,Vds0Vᓄlj3.3VḄId-VdsÇÈ×.■ᐜ½ÕÖḄ“nmosl_0.log”~☢Ḅ'ឋᡃ¿◤⌕-Ý5ᵨ1[Log:;Solutions"—>Solve...”ᡭ¨DECKBUILD:ATLASTest¢ᓫ.b.ᓫProp...ᢥ´áâATLASSolveproperties¢ᓫ.c.ᙠWritemode1¬⌱LineãxTestᓫOK.d.᪕᩽()᝞,3.7ᡠÔ.-IDeckbuildBATLASTest_1Mode:Z|DefinoTestsLoad.,iSave…]Props...)Namey/i/QTypeScaleInitialDiasFinalDiasDelta__▼gate'ஹ/CONSTiun1.1J:.ii&,3.7᪕᩽()e.ᓫWRITEᢥ´,DECKBUILDᦻ345ÓÔ᝞9Solve:;

32solvevgate=l.loutf=solvelçè᪕)2.2VI3.3V,¶·=*¹solveᦻᑖd~“solve2”é“solve3”.6ᑮḄx᝞9Ḅsolve:;Solutions—>Solve...”ᡭ¨DECKBUILD:ATLASTest¢ᓫ.b.ᙠATLASTest¢ᓫᓫProp...ᢥ´áâATLASSolveproperties¢ᓫ.c.Writemode⌱Test.d.logfileᦻᦋnmos2_.e.ᓫOK.f.ᙠ⊤ᙠName1¬ᦋgatedrain,Type1¬ᦋCONSTVARI,InitialBias,FinalBiasIDeltaᑖd0ஹ3.3é0.3.g.ᓫWRITE.9ᩭᡃ¿ᑭᵨLoad¢ᓫJᐭUᦻ(solutionfile),ᓽ᪕)1.1VḄSolve1ᦻ.îï“solveinit”:;.a.ðñ:;"solveinit".b.¦ì"Commands—>Solutions—>Load...”ᡭ¨DECKBUILD:ATLASLoad¢ᓫ.c.ᙠFilename1¬Ðᐭsolve1.d.ᙠFormat1¬⌱SPICES.e.ᓫWRITEᢥ´µ¥1[?Ô᪾.Ḽᓫ“Yes,replaceselection”ᢥ´.Load:;ïsolveinit:;.noLoad:;(ᓽloadinfile=solvel)ᑮSolve:;ó;:;ÕÖVgs=l.lVḄId-VgsÇÈ.ÕÖVgs=2.2Vé3.3VḄId-VgsÇÈô◤õᓫḄö÷w;:;ᯠ

331|DeckbuildV320Q.R-nmos_devsim,in(edited),dirB/sDace/silvaco_software)|N|Filer)Viewr)Editr)Findr)MainControlv)Commandsv;Toolsv)solvenarne=gacevgate=0vflnal=3.3vstep=O.1extractnajne='vt*CxinterceptCmaxslopeCcurvefabsCv."gate'),abs(i.'drain"))))\-absCaveCv."drain"5)/2.o5extractnainG=,beta"siope(maMslop©(curv©(absCv."gace"),absCi."drain"})))*\Cl.O/abs(aveCv."drain")))extractnafne='thetafC(maxCabsCv."drain"))$"beta")^max(absC1."drain")))-X(1.0/(maxCabsCv."gateO)-($"vt")))tonyplotnmosl_0.loglogoffsolvevgate=1.1outfile=solve1solvevgate=2.2outfi1e=solve2solvevgate=3.3outfile=solve3tiloadinfi1e=golve1logoutf=nnio52_0.1ogsolvename-drainvdrain=0vfinal=3.3vstep=O.3ttloadinfi1e=solve2logoutf-nmos3_0.1ogsolvename=drainvdrain=0vfinal=3.3vstep=O.3ttloadinfile=solve3ogoutf-nmos4__0.1ogsolvename=drainvdrain=0vfinal=3.3vstep=O.3next)line)stoprj

343.9NMOSḄ4ᱯឋ

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44\"#SILVACO᪗|H᪀ᦻm.yzᦻmᒹ~ḼS1LVACO᪗|ᦻm$_ḄH᪀.1ᐭ"#yzᦻm,ᐭ᝞yzᓽLDevedittest.de&c4.11jkDEVEDITH᪀ᦻm

45Chapter5:ᵨATHENA
"#ↈᵯ'Ạe.g.pSi,ᑴS"#n+poly-Siᵯ᪷ᵯw(5.1)(5.2)ᐸ,Ro¦S§ᙽᵯ.©ªU«,ↈᵯ1§ᙽᵯ¬M®.ᑴᵯᩞᧇḄᵯ᳛\ᩞᧇ²,LM³ᑮ〉,Ḅ§ᙽᵯᙠµ☢¶·ᑴ®ªLM³ᑮ◤⌕Ḅᵯ-.º᪗H᪀File-•Plot-Toob-Print-Propertioi-Help-AYHENACSIIVACOInternational200dc5.1»᦮ḄↈᵯH᪀H᪀ᦪ½¾0.6umX0.8um,Si,p+,1X1014cm஺Èᓄʲ,0.04um_ᨔấÊ:²,0.2um,n+,lX10m-3

46ÎÏKÐ1.=>UVa.ᙠDECKBUILDÑÒATHENA.b.ᙠᦻÓÔÕÖᐭ᝞×Øgoathenac.ᡭÚ./hiÔÕ:ÛÜ9Commands—Ý⌱MeshDefine...d.ᙠᡭÚḄMeshDefineÞ☢,Direction"0561X,Location"0Öᐭ0.00(ÖᐭDᑗàà³ᢥáâ.D☢Ḅ©U᝞ã.YäåæSpacing•0Öᐭ0.10,Comment"0ÖᐭNon-unifromGrid(0.6umX0.8um),᝞cc5.2hi./ᦪe.ᓫ9InsertᢥQ.£èé☢vêëFLocation=0.20ìSpacing=0.01;Location=0.60ìSpacing=0.01.g.FᙠY§ᔣḄ./ᙠDirection•0ᓫ9Y.ᐸîêïðd,eêïëF᝞:c5.3Y§ᔣ./hi

47h.ᓫ9View…ᢥQᓽLNᑮ./ᑖgÔÕ.(:;ñᐳ]^1786#/Ü\3404#`ab.)i.ᓫ9WRITE.ᙠDECKBUILDNᑮḄ×Ø᝞ᡠqgoathena#Non-unifroinGrid(0.6umX0.8um)linexloc=0.00spac=0.10linexloc=0.20spac=0.01linexloc=0.60spac=0.01#lineyloc=0.00spac=0.008lineyloc=0.2spac=0.01lineyloc=0.5spac=0.05lineyloc=0.8spac=0.152.hi½¾a.ᡭÚATHENAMeshInitializeEᓫ:ÛÜ9Commands">MeshInitialize.b.ᙠóôḄÔÕSô᝞⌱Material:SiliconOrientation:100Impurity:BoronConcentration:ByConcentration1.0el4Dimensionality:2DGridscalingfactor:1.0Comment:InitialSilicon3.^ᡂÈᓄÊᩭᡃ÷⌕ᙠấ⊤☢ᙠ1000࠷ஹ3%HCLஹ1#ᜧúûᩩmýᵨþÈÿᢝ
30ᑖᡂᓄ.ᐜ⌱uCommands—>Process—>DifTuse”ᡭATHENADiffuseᓫ.⌱ᡈᐭTime(minutes):30Temperature(C):1000Ambient:Dry02Gaspressure(atm):1.0Hcl%:3Comment:GateOxidation4.ᓄ⌱aCommands—>Extract”ᐭATHENAExtractᓫ.⌱ᡈᐭExtract:MaterialthicknessName:OxidethickMaterial:SiOY2Extractlocation:X=0.3

48next)line)stoprJcont)run)quit)Line:17pasteJinit)pause)clear)restart)kill)Stop:NoneATHENA>structoutfi1e=/tmp/deckbjcPaKDstructoutfile=/tmp/deckbjcPaKDATHENA>EXTRACT>initinf="/tmp/deckbjcPaKD"EXTRACT>extractname="Oxidethick"thicknessmaterial—Si32"mat.occno=1xval=03______________________________________________|0xidethick=419.388angstroms(0.0419388um)Xval=0.3EXTRACT>quitATHENA)!1!inishedexecutingline16ATHE"5.4#$ᓄ%&ᓄấḄ419.388).5.*ᓄᓄ.ᐜᓫ+“MainControl—>Optimizer”ᓽᐭDECKBUILDOptimizer-☢.ᙠMode0Setup1⌱ᨬᜧ4501%------"Maximumerror%
=1"6Stopcriteria78.ᦋMode0Parameters.ᙠ:;<,᪕*ᓄ?ᦪ⌱ABCD.0E1ᡃGHIᑮDECKBUILDAdd"1⌱tempBpress⚗1ᓫ+Apply."5.5#$᡽ᦣ%&ᦋMode0Targets.OptimizerSᵨDECKBUILDAdd"1ᙠTargetvalue7ᐭW᪗^“400”.

49"5.6#$*ᓄW᪗_ḼMode⌱Graphics,a+Optimize,ᓽbc"

50_Ḽ1Mode⌱parametersa+Editᓫ⌱“copytoDeck”1*ᓄḄABjC^Sklmᦻ:[\<.6.nopᨔấ_ᩭ1ᵨᐳtnouno0.2vwḄpᨔấ.xy᝞a.✌ᐜᡭATHENAD{ositᓫ---⌱uProcess—>Deposit—>Deposit...”ᓽb.b.⌱ᡈᐭType:ConformalThickness(um):0.2Totalnumberofgridlayers:107.}~ᐭa.⌱“Commands—>Process—>Implant...”ᡭATHENAImplantᓫ.b.⌱ᡈᐭImpurity:ArsenicDose(ions/cm2):l.0el5Energy(KeV):40Model:DualPealsonTilt(degrees):7Rotation(degrees):30Materialtype:Crystaline8.⌨ᜐᳮᐜ⌱uCommands—>Process>DifTuse”ᡭATHENADiffuseᓫ.ᙠ]ஹAஹ᛻jஹjCஹDiffusion7ᑖᐭᡈ⌱2ஹ1000ஹjஹ1ஹFermi.9.ᙽᵯ^a.ᡭATHENAExtractᓫ----⌱"Commnds—>Extract”ᓽb.b.⌱?:Sheetresistance.ᐸ⌱᝞

51"5.8ᙽᵯ]Ḅ?ᦪ⌱c.ᓫ+WRITECont.bHᙽᵯ077.8174ohm/square.(᝞"ᡠ.)next)line)stopvjcont)run)quit)Line:27paste)Inlt)pause)clear)restart)kill)Stop:NoneATHENA>^structoutfi1e=/tmp/deckbM8oFnQstructoutfi1e=»/tmp/deckbM8oFnQATHENAWEXTRACT>initinf="/tmp/deckbM8oFnQwEXTRACT>extractname="sr"sheet.resmaterial=HPolysi1icon"mat.occno=1xval=U3regionoccno=1semi.poly|sr=778174ohm/squareX.val=0.3EXTRACT>quitATHENA)©|finishedexecutingline25"5.9ᙽᵯ^Ḅ%&10.⇨pᨔta.⇨ᣵX=0.15Ḅpᨔấ.✌ᐜᡭATHENAEtchᓫ1ᯠ⌱ᡈᐭ:EtchMethod:GeometricalGeometricaltype:LeftMateriallocation(um):0.15Comment:PolysiliconDefinitionb.⇨ᣵx=0.45¡Ḅpᨔấ.u¢!.⇨pᨔấḄ"t᝞.

52ATHENADatafrom.history07.str0.5—0.6—MaterialsSilicon0.7—SiO2Pdysilicon00.1020.30.40.5Microns"5.10⇨pᨔấḄ£᪀"11.ᓄpᨔấᙠᡭḄATHENADiffuseᓫ<1¥ᵨᡈ¦ᦋḄ?ᦪ᝞M(ᙠḄxy<1ᶍ¨ᡭAHENA᡽ᦣஹᓄஹ⇨©ᓫḄgh)Time(minutes):3Temperature(c):900Ambient:Wet02Gaspressure(atm):1.00Diffusion:fenniOxidation:CompressibleComment:PolysiliconOxidation12.⇨ᵯ᩽_«¬ᙠATHENAEtchᓫ1¥ᵨᡈ¦ᦋḄ?ᦪ᝞EtchMethod:GeometricalGeometricaltype:AnyshapeMaterial:OxideArbitrarypoints:x=0.25y=-0.25x=0.35y=-0.25

53x=0.35y=-0.2x=0.25y=-0.2Comment:PolysiliconDefinitionATHENADatafromhistory09.strSUOJQ工0.50.6-0.7—0.8-00.10.20.30.40.5Microns"5/l⇨ᓄḄ£᪀"13.no®ᵯ᩽ᡭḄATHENADepositᓫ,⌱ᡈ¦ᦋḄ?ᦪ᝞M.:Type:ConformalMaterial:AluminumThickness(um):0.05Totalnumberofgridlayers:10

54ATHENADatafrom.history10.str"5.12no¯Ḅ£᪀"14.⇨ᵯ᩽Ḅta.⇨ᣵX=0.2Ḅ¯.ᡭATHENAEtchᓫ1ᯠ⌱ᡈᐭ:EtchMethod:GeometricalGeometricaltype:LeftMaterial:AluminumEtchlocation(um):0.2b.⇨ᣵX=0.4¡Ḅ¯.u¢!.£°᝞

55ATHENADatafrom.history23.strSUOJ.Q工0.800.10.20.30.40.5Microns"5.13±᦮Ḅↈ´ᵯḄ£᪀

56Chapter6:ZenerDiodeµẠ·¸¹º»᩽¼1½¾¿C»᩽¼1ÀÁấᩞᧇᑴᡂḄ☢_«ᨔÅ»᩽¼1ƾ¿C¼.¿C¼ÇÈÉ»᩽¼ᨵḼËÌÍḄÎÏᱯឋ——ᐸÓᔣᱯឋ0ᢣᦪÖ×;ᡠÙ¢ḄÀ1Ú¿C¼᜜ÜÝᔣᵯCᜧᑮUh]ᑣ+ß1+ßàḄÖ×á▽1ãäåæçèé,⊤ëáìḄ¿Cᱯឋ1Yíîïðᵨç¿CᵯñÇ▲óᵯôõ<.öh÷#goathena#ùúUVlinexloc=0.00spac=0.2linexloc=lspac=0.1linexloc=l.lspac=0.02linexloc=2spac=0.25#lineyloc=0.00spac=0.02lineyloc=0.2spac=0.1lineyloc=0.4spac=0.02lineyloc=2spac=0.5#ûüUVinitsiliconc.phos=5.0el8orientation=100#tᡂᓄdepositoxidethick=O.5Odivisions=5etchoxideleftpl.x=l#}~ᐭÇ⌨implantborondose=1.0el5energy=50pearsontilt=7rotation=0amorphmethodfermicompressdiflfustime=30temp=1000nitropress=1.00#£ýBᙽᵯextractname=Hxjnxjmaterial=HSiliconnmat.occno=lx.val=0junc.occno=1extractname=,,rhonsheet.resmaterial=,,Siliconnmat.occno=lx.val=0region.occno=l#ᓄ⇨etchoxideall#tᡂAl_«depositalumthickness=0.2div=3etchalumrightpl.x=1.0

57#ᵯ᩽UVelectrodename=anodex=0.0electrodename=cathodebackside#£᪀þÿ&
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IV%logoutWiodeex05.logsolvevanode=-0.25vstep=-0.25vfinal=-10name=anodetonyplotdiodeex05.log-setdiodeex05_log.set#&IV%'()ᘤ+ᦪextractinitinfile="diodeex05.1ognextractname=Hbvnmin(v.nanodeH)extractname=,,leakagenx.valfromcurve(v.Hanode",abs(i."anode"))wherey.val=le-10#⌨-quit-./xj=0.437199umfromtopoffirstSiliconlayerX.val=0rho=171.057ohm/squareX.val=0bv=-l0leakage=-5.68681IVᱯឋ᝞%6.1.

58ATLASDatafromdiedeexO5.logCalhodeCurrenl(A)0.0250.020.0150.010.005AnodeVoltaae(V)%6.1345᩽7IV89%

59Chapter7:ᵨATLAS:;<=MS.>Ạ@ABC(BE-CGH)JK>LM:ᾠᱯ>PᚠRSTJK.ᾠᱯ>Pᚠᢣ<ᐹᨵᜧḄPᚠXY(Z[஺Bnᡈ^Bp»kT),`abᩖdYeGfᡈgfh᝱jYkḄBE-CGHJK.ᾠᱯ>5᩽7>ᾠᱯ>PᚠḄ5᩽7.l᪗ᦪno:12umX5um.᪀:p(lel9)n(5el6)n+(1e20)-qr#stgoatlasmeshspace.mult=1.0#x.meshloc=0.00spac=0.5x.meshloc=3.00spac=0.2x.meshloc=5.00spac=0.25x.meshloc=7.00spac=0.25x.meshloc=9.00spac=0.2x.meshloc=12.00spac=0.5#y.meshloc=0.00spac=0.1y.meshloc=1.00spac=0.1y.meshloc=2.00spac=0.2y.meshloc=5.00spac=0.4#uvregionnum=lsilicon#ᵯ᩽electrname=anodex.min=5length=2electrname=cathodebot#wᡂNSi(N-epidoping)dopingn.typeconc=5e16uniform#wᡂPSi#yz(Guardringdoping)dopingp.typeconc=lel9x.min=0x.max=3junc=lrat=0.6gaussdopingp.typeconc=le!9x.min=9x.max=12junc=lrat=0.6gauss#wᡂN+{☢}dopingn.typeconc=le20x.min=0x.max=12y.top=2y.bottom=5uniform

60##$&
5᩽7.᪀saveoutf=Schottky_Diode.strtonyplotSchottkyDiode.str#~modelconmobfldmobsrhaugerbgncontactname=anodeworkf=4.97#("solveinit#ᦪ!methodnewton#
IV89logoutfile=SD_IV.logsolvevanode=0.05vstep=0.05vfinal=lname=anodetonyplotSD_IV.log#f%#getenergybandsolveinitoutputqfnqfpcon.bandval.bandsaveoutfile=SD_band.strtonyplotSDband.str#⌨quit.[`ᑮ5᩽7.᪀%Schottky_Diode.str,IV89%SD_IV.bg,`aᐸf%SD_band.str..᪀ᙠᡭḄSchottky_Diode.str',ᙠ%'<ᜐ⌱“᪗<>display—>showmesh%᪗(<=%᪗⊤stᑖ)<>Apply"¡stᑖ.Display'¢ᵨᐸ£%᪗:¤=——showcontours(¦§Ḅ¨bᩖdYᑖ);᎔ᦪ¤=---showjunctions(«.Ḅ¬);᎔ᦪ®=----showelectrodes(«ᵯ᩽Ḅ¬).⌱¤=%᪗ᑮ<=¯⁐±⁑Ḅ%³ᐸ'´µ¯⁐¶⊤´µbᩖdY·¸¹ᐸᦪ.ᙠºᓫ¼'⌱“Tools—>Cutline”ᢥ᯿◤⌕¡´µLINEḄᑖÁᓄÃᙠᵨᨬ<=%᪗ᵨÅ᦬ᐭÈ(2,0)ᑮÈ(2,5),`aÈ(6,0)Èᑮ(6,5).ᨬ./᝞%7.1.

61ATLASDatafromSchottky_Diode.stro23402681012Microns%7.1ᾠᱯ>5᩽7.᪀%

62%7.2ᾠᱯ>5᩽7Ḅbᩖᑖ%

63IV89%ÉᙠᑮḄIV89%'⌱''᪗<>display—>YQuantities—>AnodeCurrent”yËᙶ᪗ᣚᡂÎ᩽ᵯÏÐᵨ[`Ñᑮ5᩽7ḄIV89᝞%.ATLASDatafromSD_IV.log0.0005AnodeCurrent(A)0.0004-0.00030.00020.0001AnodeVoltaqe(V)%73ᾠᱯ>5᩽7ḄIV89%

64f%Éᓫ“᪗<display—ÒÓÔ%᪗(¤=)<ÒDefine—Selected<Quantity<ConductionBandEnergy<ÒApplyv`Ñᑮ5᩽7ḄᑮGfÕ%.ᯠᵨ“Tools■—Cutline”9(6,0)×(6,5),ᙠᑮḄ%'Ø"<Display—ValenceBandEnergy"ᨬÚ5᩽7Ḅf%᝞%.SectionfromSD_band.str(deleted)DatafromSD_band.str--------CondidbnBandEnergy(V)Y-----ValenceBandEnergy(V)0.6—0.4—0.2-x..........................o-..-0.2-0.4--0.6—-0.8-"I-------------1--------------1--------------1---------------1--------------1012345Distancealongline%7.4ᾠᱯ>5᩽7Ḅ᝱%

65Chapter8:MESFET>Ạ@AMESFETᐹᨵàMOSFETâãḄᵯÏ-ᵯäᱯឋ.ᯠÚᙠᘤ+Ḅ᪕ᵯ᩽æᑖ,MESFETᑭᵨBE-CGHḄ᦮ÏJK)¶éMOSFETḄMOS.᪀;ê᜜,ᙠì᩽àí᩽æᑖ,MOSFET`STJK)¶MOSFET'Ḅp-n..Z[ð,MESFET'ᐳᨵ®=B-CJK:<=ᾠᱯ>JKò¹᪕᩽`aL=óòì᩽àí᩽ḄSTJK.>ô.᪀᝞%8.1.àJFETâe,MESFETᨵLᜧøÈÉùlûMESFETḄüýþᓫ.M-Süýᐕ
⍝ᵯ,ᨵᑭᘤḄᐵ⚣᳛!"2$MESFET+ᵨ-ᓄ/ᩞᧇᑴ,3ᓄ4Ḅᵯ567᳛ᜧ9:ấḄ<=,>?@Aᑴ⌼C⚣ஹᘤ.FGHGaA*᩟JK8.1GaAsMESFETḄRS᪀Example1:U5VᐭGaAsMESFETᑴXYVtZ[\]^ᵨATHENAḄFLASH_ᙽATLASḄBLAZEcapabilityᩭ_bMESFETḄᑴ⌼cdYᐸᵯfᑖ᪆.ij"contactname=gatework=4.87"ᵨᩭkl᪕᩽opᦪ.r/tuvᎷkxyzuv.{|V}Ḅ:ᓽᙠATHENA_bᵨᱥcontact:{◤Ḅ.ATLASSchottkyᚠḄ^ᵨ᝞Ḅbarrierheight=metalworkfunction-semiconductorelectroneffinity
MESFET█ᵯḄxᡠᨵuvḄ¡.ᯠ£t᩽ᵯklxO.1V.LOGᡭlogᦻ¦
ᡠᨵḄ§¨ᱯឋ«¬ᙠᦻ.ᨬ§ḄSOLVE᪕¯ᑮ3V±ᓄ.V}ATLASᙠ²³᎛µ◤⌕ᐜ¸¡.>?᪕¹\¯ᑮᡠ◤º±ᓄ.᝞»ᡠ◤Ḅ᪕ᨵ¼ᨵ½¡◤⌕¸¾¿._bdÀgoathena#GaAsMESFETfabricationandanalysisusingDevEdit#ÂÃÄÅlinexloc=-1.5spac=0.2linexloc=-.7spac=0.1linexloc=-.5spac=0.05linexloc=0.0spac=0.1linexloc=0.5spac=0.05linexloc=0.7spac=0.1

66linexloc=1.5spac=0.2#lineyloc=0.00spac=0.02lineyloc=2.00spac=0.5#ÆJÄÅ:FGHGaAsÆJ,pÈinitgaasc.beryllium=1.0el3orient=100space.mult=l#implantberylliumenergy=100dose=2el1implantsiliconenergy=100dose=lel2#nÈdiffiistime=10temp=850#ÉÊË⇨ÍᡂÏÐ᪕᩽deposittitaniumthick=.3divisions=10etchtitaniumrightpl.x=0.5etchtitaniumleftpl.x=-0.5#ÍᡂÑᜋdepositoxidethick=0.35divisions=8etchoxidethick=.4#VᐭÓÔÕÄÅÂÃ:xÖᩖḄprofileØ,ÙÚÛÜᡈὅß.#regridbeforeimplantgodeveditbase.meshheight=0.08width=0.08#àᨬáâḄÂÃ(0.08x0.08)bound.condapply=falsemax.ratio=300#ãäᩩbound.condwhen=automaticmax.slope=28md.unit=0.001line.straightening=2align.pointsconstr.meshmax.angle=90max.ratio=300max.height=lmax.width=l\min.height=0.0001min.width=0.0001constr.meshtype=Semiconductordefaultconstr.meshtype=Insulatordefaultconstr.meshtype=Metaldefaultimp.refinemin.spacing=0.02#ÄÅᨬÂú◣imp.refineimp=nnetdoping1*sensitivity=l#mesh#rtVᐭgoathenaimplantsiliconenergy=50dose=lel3#çèᩖéêÂÃᨬëᓄ#çVᐭéêìëÂÃ

67godeveditbase.meshheight=0.4width=0.4bound.condapply=falsemax.ratio=300bound.condwhen=automaticmax.slope=28md.unit=0.001line.straightcning=2\align.pointsconstr.meshmax.angle=90max.ratio=300max.hcight=lmax.width=l\min.height=0.0001min.width=0.0001constr.meshtype=Semiconductordefaultconstr.meshtype=Insulatordefaultmax.angle=180constr.meshtype=Metaldefaultimp.refinemin.spacing=0.03imp.refineimp=,'netdoping**sensitivity=.5meshgoathenadifftime=10temp=850#Íᡂr/tuv:yzuvdepositaluminumthick=.2divisions=4etchaluminumstartx=-ly=10etchcontx=-ly=-10etchcontx=ly=-10etchdonex=ly=10#ᵯ᩽ÄÅelectrodename=sourcex=-1.4electrodename=drainx=1.4electrodename=gatex=0.0#godeveditbase.meshheight=0.1width=0.1bound.condapply=falsemax.ratio=300bound.condwhen=automaticmax.slope=28md.unit=0.001line.straightening=2\align.pointsconstr.meshmax.angle=90max.ratio=300max.height=lmax.width=l\min.height=0.0001min.width=0.0001constr.meshtype=Semiconductordefaultconstr.meshtype=Insulatordefaultmax.angle=180constr.meshtype=Metaldefaultimp.refinemin.spacing=0.03imp.refineiinp=,,netdoping"sensitivity=lmeshstructureoutfile=Examplel_O.strtonyplotExamplelO.str-setExamplel_0.set

68goatlas#kl᪕᩽opᦪcontactname=gatework=4.87#ᾠᱯRuv#ÄÅGaAsᵯ5îïðiY_Èmaterialmaterial=GaAStaun0=l.e-8taup0=l.e-8modelsconmobfidmobsrhoptrprint#ñòÄÅmethodnewtontrapsolvevdrain=0.1#¸IVó/¦ô«ᑮlogᦻlogoutf=Examplel.logmastersolvevgate=0.0vstep=-0.1vfinal=-3name=gate#¯1õó/Cvtextractinitinfile="Examplel.log”extractname="vt”(xintercept(maxslope(curve((v."gate,f),(i."drain")))))saveoutfile=Example11.strtonyplotExamplel.logquit

69ö÷»1.᪀KDEVEDITDatafrommesfetexOIO.stro64suoNowNetDoping(/cm3)IIAluminum-1.2-0.8-0.400.40.81.2MicronsK8.2MESFET᪀K

702.Id-Vgó/KATLASDatafrommesfetexOl.log1e-05-DrainCurrent(A)8+066e-064e-06GateVoltage(V)K8.3MESFETḄId-Vgó/KCḄ█ᵯ:vt=-0.399607VExample2:EpitaxialGaAsMESFETS-parameterᙠ\]øᵨYᵨATLASÄÅMESFET᪀YklGaAs67᳛_È᪕᩽opᦪYVgs=0ḄId/VdsᱯឋYᙠúûüḄýþ⚣᳛Ḅÿᑖ᪆ATLASᑮs-parametcrsᵯᵯᦪḄᣚYᵨTonyPlotMESFETs-parametersḄSmithChartsREGIONᵨᩭGaAsᙠ☢"#$%&'(Ḅ)ᩖ.ELECTRODEᵯ᩽Ḅ,-./.᪕᩽23ᦪᵨCONTACTᩭ4/.5GaAsᙳᒴ)ᩖ.89n:ᨵ<.=>)p:?@AB.

71CD᝱ḄFGᡠᵨḄᦪIJK(numericalmethods)LMNḄ."methodgummelnewton”P5QRSFGTᵨḄJKLU὚ᔠ(gummel)JK.᝞YZ[%ᦈ]"ᣚᑮᐰ὚ᔠ(newton)JK._=`ᩖḄᘤbcdJKeCDQ/fᨬhiḄJK.j"klmnḄCPUo$fp,rᨵstᙠuᵯfvw8xy⚪.᝞Yy⚪{|Ps}~ᵨ"methodnewton".FGLᑭᵨSOLVEᓄR3.0VᙠA8logᦻbᡭᑖ᪆DFG.⚣᳛ᓄL᪵wsolveac.analysisdirectfrequency=l.e9fstep=2.e9nfsteps=20ᐸᦪac:ᑖ᪆;direct:ᏉᐰḄUᘤ(solver)ᵨ=u⚣ᑖ᪆&fᑖFGmnḄᑁ.᝞YḄᨵ¡Ḅ¢Gᑁ,FG"£¤¥vw┯§¨©.ᡠ◤ᑁḄᜧ¬®=¯°⁚SḄᦪ²;frequencyḄI³¨´CD⚣᳛Ḅᜧ¬;fstep³µ¶⚣᳛;nfsteps³µᦪ.ATLASḄᑖ᪆Z[·=Ḅ¬¨´ᵯḄ¸¢¸.xᵯATLASsZ[v5_ᵯ᩽pḄᵯᵯ.Cdrain>gate⊤º.᪕ᵯ-1*Cgate>gate⊤º»Ḅ᪕᩽ᵯ.s-parameters(ᡈὅZ,X¿ABCDparameters)ḄZ[Lᙠ#$ᑖ᪆f4/logḄÀparampᡈὅy.paramÁÁ)w.ᨬÃ⌕Ḅᦪ⌕ᦪ*portᦪf.parameterᑖ᪆ḄÆÇᎷ4LᘤbL8ÉÊËËÌᘤb.ᐸÍᐭÍvᢣᔜÑḄᵯ᩽.ᵨᡝÓ◤ÔÕᡠᨵḄËÌᙠÖ×ÍᐭË̳᪕᩽ÍvË̳᩽.FGØÙgoatlasTitleMBEEpitaxialGaAsMESFET-Sparameterscalculation#¯°meshspace.mult=1.0#x.meshloc=0.00spac=0.3x.meshloc=2.3spac=0.02x.meshloc=2.7spac=0.02x.meshloc=5spac=0.3#y.meshloc=0.00spac=0.01y.meshloc=0.04spac=0.03y.meshloc=0.12spac=0.02y.meshloc=6spac=1.0#regionnum=lGaAsx.min=0x.max=5y.min=0y.max=0.12regionnum=2GaAsx.min=0x.max=5y.min=0.12y.max=6.12#ᵯ᩽

72elecnum=lname=sourcex.min=0.0y.min=0.0x.max=1.0y.max=0.0elecnum=2name=drainx.min=4.0y.min=0.0x.max=5.0y.max=0.0elecnum=3name=gatex.min=2.35length=0.3#)ᩖdopingregion=luniformconc=1.0el7n.type#?@dopingregion=2uniformconc=1.0el5p.type#Û⍝#4/ÝÞஹGaAsàá᳛¿`ᔠF:ஹᩞᧇᱯឋcontactnum=3work=4.77#ᾠᱯ·ÝÞmodelsregion=lprintconmobfldmobsrhoptrmodelsregion=2srhoptrmaterialregion=2#4/Z[JK#Solution-usegummclnewtonforinitialthenswitchtofullnewtonmethodgummelnewton#eU᪕R³çfḄÍvᱯឋsolvevgate=0saveoutfile=mesfetex02_l.strtonyplotmesfetex02_l.str-setmesfetex02_0.setsolvevdrain=0.025vstep=0.025vfinal=0.1name=drainmethodnewtonsolvevdrain=0.2vstep=0.1vfinal=0.6name=drainsolvevdrain=0.8vstep=0.2vfinal=3name=drain#¬¨´ᑖ᪆#Smallsignalacanalysiswiths-parametercalculationlogoutf=mesfetex02_ac.logs.paraminport=gateoutport=drainwidth=100solveac.analysisdirectfrequency=l.e9fstep=2.e9nfsteps=20tonyplotmesfetex02_ac.log-setmesfetex02_l.settonyplotmesfetex02_ac.log-setmesfetex02_2.setquit

73o$èY:1.è᪀ëATLASDatafrommesfetex021.strdrainsuolo工MaterialsGaAsConductorElecIrodes23Micronsë8.4MESFETè᪀ë

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753.tìëATLASSection1frommesfe(QxO2_bandstrDatafrommesle

76tðñ⊝F:_ᱥᳮᘤ
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77########################################EBcalculation########################################modelsprintconmobfidmobevsatmod=lhcte.elmaterialtaurel.el=l.e-12taumob.el=l.e-12vsat=l.e7#[\]^ஹ⛳ab/##cdeᑖ:gh8gsolveinitsaveoutf=mesfetexOS.strtonyplotmesfetex03.str-setmesfetex03_0.set##cieᑖ:jgklmnmethodnewtonmaxtrap=6outpute.velocity#proben.mobmaxdir=0name=,,muxnproben.mobmaxdir=90name="muy”logoutf=mesfetex03_1.log#solvevdrain=0.0vstep=0.05vfinal=0.5name=drainmethodnewtonsolvevdrain=0.6vstep=0.1vfinal=2name=drain#Vdsaveoutf=mesfetex03_l.str##############################################DDcalculation##############################################goatlas#coeᑖ:pqUVஹ?᪀=>meshinfile=mesfetex03.str#contactnum=3work=4.87modelsprintconmobfidmobevsatmod=lmaterialtaurel.el=l.e-12taumob.el=l.e-12vsat=l.e7##ceᑖ:klmnmethodnewtonmaxtrap=6outpute.velocityproben.mobmaxdir=0name=',muxHproben.mobmaxdir=90name=^^muy^,logoutf=mesfetex03_2.log

78solvevdrain=0.0vstep=0.05vhnal=0.5name=drainmethodnewtonsolvevdrain=0.6vstep=O.1vfinal=2name=drainsaveoutf=mesfetex03_2.strtonyplotmesfetex03_l.log-overlaymesfetex03_2.log-setmesfetex03_log.setquitIJ1.I᪀ATLASDatafrommesfetex03.strgatesuoN஺n一NetDoping(/cm3)0.70.8Materials0.9GaAsConductor100.20.30.40.50.6Microns8.7MESFETI᪀

792.stuvwḄXyᔣᵯ|}~᳛ATLASOVERLAYDatafrommultiplefilesmux73107308—7306mesfetex03_1Jogmesfetex03_2.log73047302—7300DrainVoltage(V)8.8EBaDDuvwXyᔣᵯ|}~᳛

803.stuvwḄyᔣᵯ|}~᳛ATLASOVERLAYDatafrommultiplefilesmuy731073087306mesfetex03_1Jogmesfetex03_2.log730473027300—DrainVoltaae(V)8.9EBaDDuvwyᔣᵯ|}~᳛

814.¡¢Ḅ£~¤¥ATLASOVERLAYDatafrommultiplefiles0.0001DrainCurrent(A)8e-056e-05mesfetex03_1.logmesfetex03_2.log4e-052e-051.6DrainVoltaae(V)8.9EBDD¢£~¤¥¦§Example4:¨Pᑖ᪆ª]«¬◍▟¢ᩭḄ¯/;j*(ᙠ◍▟᝱MESFETI᪀Ḅ(.K;ᒹ²@¢³/ᑖ:7µᡂMESFETI᪀·ᩖ(ᵨFLASH)«ὃ⇋◍▟Ḅ¨P(Id/VgsᱯឋYὃ⇋◍▟Ḅ᪕᩽ᐵ¿WḄÀ᝱(Yὃ⇋◍▟Ḅ⚣ÂÃP(Yὃ⇋◍▟Ḅslᦪ1Ä

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83#ᵯ᩽bcelectrodename=sourcex=0.1electrodename=gatex=1.0electrodename=drainx=1.9#I᪀&ôõstructureoutf=mesfetex04_0.str#8.10tonyplotmesfetex04_0.str-setmcsfetex04_0.setgoatlas#bcò&contactname=gatework=4.87modelsprintfldmobsrh#⛳ஹᵯjøùSRHúᔠÔÕmaterialvsat=0.92e7taun0=le-9taup0=le-9#TRAPrsᵨᩭÅƬ◍▟᝱Ḅlᦪ.trapacceptore.level=0.45density=1.0el6degen=12sign=le-14sigp=3,e-14fast#ÎÌ◍▟#methodnewtontrapsolveprevsolvevdrain=0.01solvevdrain=0.05solvevdrain=0.2solvevdrain=0.5#logoutf=mesfetex04_ltr.logmastersolvevgate=0.0vstep=-0.1vfinal=-1.0name=gatesaveoutf=mesfetex04_2tr.strtonyplotmesfetex04_2tr.str-setmesfetex04_l.setgoatlascontactname=gatework=4.87modelsprintfldmobsrh#materialvsat=0.92e7taun0=le-9taup0=le-9#methodnewtontrapsolveprevsolvevdrain=0.01solvevdrain=0.05solvevdrain=0.2solvevdrain=0.5#logoutf=mesfetex04_l.log

84solvevgate=0.0vstep=-0.1vnnal=-1.0name=gate#V=0--0.1Vgsaveoutf=mesfetex04_2.strtonyplotmesfetex04_l.log-overlaymesfetex04_ltr.log#8.11quitIJ1.I᪀ATHENADatafrommesfetex04O.strsuoN஺三6.30.4MaterialsGaAsAluminum0.500.20.40.60,811.21.41.61.82Microns8.10MESFETI᪀

852.ü¤¥ATLASOVERLAYDatafrommultiplefilesDrainCurrent(A)8e-057e-056e-055e-054e-053e-052e-051e-050-0.8-0.6-0.4-0.2Gate8.11ᨵäª]«Id-Vgs¤¥¦§Example5:À᝱ᑖ᪆ª]«¬◍▟:;ýþ;4ḄI᪀.ᡠ
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86784
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87GH=I1.᝱JKATLASOVERLAYDatafrommultiplefilesDrainCurrent(A)8e-057e-056e-055e-05-mesfetex05_2Jog4e-05mesfetex05_2tr.log3e-052e-051e-05-02e-074e-076e-078e-071e-06Transienttime(s)L8.12ᨵMNOPḄ᝱JKQR

882.~mnATLASOVERLAYDatafrommultiplefilesDrainCurrent(A)8e-057e-05—6e-05—5e-05mesfetex05_2.log4e-05mesfetex05_2tr.log3e-05—2e-05—1e-05-GateVoltaqe(V)L8.13ᨵMNOPḄSTUVQRExample6:WXᑖ᪆NOPZ◍▟=᪀[\8A.WXḄ]^_7`a&8bc
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90lineyloc=0.07spacing=0.01lineyloc=0.1spacing=0.01lineyloc=0.12spacing=0.01lineyloc=0.3spacing=0.02lineyloc=0.5spacing=0.06lineyloc=1.0spacing=0.35#nATHENAMeshInitializeinitsiliconc.arsenic=2el6orientation=100#ATHENAImplant&ATHENADiffuseimplantboronenergy=18dose=2.5e13crystaldiffusetime=60temp=920nitro#ᨔấ᩽ATHENADepositdepositpolythick=0.3divisions=6#ᨔấᩖATHENAImplantimplantarsenicdose=7.5el5energy=50crystal#⇨ᨔấATHENAEtchetchpolyrightpl.x=0.2#⌱"#$relaxy.min=.2x.min=0.2relaxy.min=.2x.min=0.2#ᨔấ%ᓄ'(ᡂ*+,ATHENADiffusemethodcompressfermidiffusetime=25temp=920dryo2press=1.00#⌨.ᜐᳮATHENADiffusediffusetime=50temp=900nitrogenpress=1.00#123ᐭ,67p+89ᨵ;<8ATHENAImplantimplantborondose=2.5el3energy=18#=>?@3ᐭ#(ᡂAᜋ#ATHENADepositdepositoxidethick=0.4divisions=10inin.space=O.1#ATHENAEtchetchoxidedrythick=0.5#CDᑮFG'HᑮḄJ᪀L᝞L9.1#(ᡂ᩽89ATHENADiffuse&Diffuseimplantborondose=lel5energy=30crystal#=N?@3ᐭ'(ᡂp+diffusetime=60temp=900nitrogenpress=1.00

91#OPQHᑮR᦮J᪀ATHENAMirrorstructurereflectleft#TU⇨TQHᑮ89ATHENADeposit&Etchdepositalumthick=0.05div=2#TVḄJ᪀LUW⇨XYL9.2Z9.3etchalumstartx=-0.16y=-4etchcontinuex=-0.16y=0.2etchcontinuex=-0.6y=0.2etchdonex=-0.6y=-4etchalumrightpl.x=0.15#ᵯ᩽ATHENAElectrodeelectrodex=0.0name=emitterelectrodex=-0.65name=baseelectrodebacksidename=collector#\]ᨬ_J᪀ATHENAFileI/Ostructureoutfile=bjtex01_0.str#L9.4#`agodeveditbase.meshheight=0.25width=0.25bound.condapply=falsemax.ratio=300constr.meshmax.angle=90max.ratio=300max.height=lmax.width=l\min.height=0.0001min.width=0.0001constr.meshtype=Semiconductordefaultconstr.meshtype=Insulatordefaultmax.angle=170constr.meshtype=Metaldefaultmax.angle=180#ᨬbc◣imp.refinemin.spacing=0.025#Selectalistofsolution(impurity)gradientstorefineupon....imp.refineimp="Arsenic”sensitivity=0.5imp.refineimp=nBoron"sensitivity=0.5#meshstructoutfile=bjtex01_0.str######################GummelPlotTest###########################goatlas#efᩞᧇiஹ89ឋl#ATLASCommands——>Models——>Material,;

92materialnumber=2taun0=5e-6taup0=5e-6#ấmᵯ2ஹnoSRHpᔠrsᙳu5x10-6s#ATLASCommands—>Models—>Contactse,•contactname=emittern.polysurf.rec#᩽89un+ᨔấ'vᨔấ/ấ#x☢Ḅ⊤☢pᔠ{ᨵ▲#ATLASCommands;>Models;>Models,,•modelsbipolarprint#ᦪ#ATLASCommands;>Solutions—>Method---⌱ᐰ὚U(newton)ᓽmethodnewtonitlimit=25trapatrap=0.5maxetrap=4autonrnrcriterion=0.1\ToLtime=0.005dt.min=le-25#writesolveinit#efᵯ᩽solvevcollector=2local#ef᩽solvevbase=0.1#\]&IC-VBᐵLlogougbjtex01_2.bgmastersolvevbase=0.2vstep=0.05vfinal=0.9name=baseacfreq=le6aname=base#Nowdumpastructurefile,fbrtonyplotting...butfirstdecidewhat#youwantinit,ontopofthedefaultquantities...outpute.fieldflowlinesjx.eljx.hojy.eljy.hosaveoutf=bjtexO1_3.strtonyplotbjtex01_3.str#ᘤᦪextractname=Hpeakcollectorcurrent"max(curve(abs(v.Hbase"),abs(i."collector")))extractname=Hpeakgain"max(i."collector7i.nbasen)extractname=nmaxfTHmax(g."collector,n,base'7(2*3.1415*c.nbase'H,base"))#tonyplotbjtex01_2.log#J᪀solveinitoutputqfhqfpcon.bandval.bandsaveoutfile=bjtexO1band.strtonyplotbjtexOlband.str

93#⌨iquitL9.1(ᡂAᜋ

94L9.2ᙠR᦮BJTJ᪀TPoint4Point1(x=-0.6,y=-0.35)(x=-0.16,y=-0.35)EmitterBasePoint3Point2x=-0.6,y=0.1)(x=-0.16,y=0.1)L9.3▢ᑖAluW⇨X

95CDJpeakcollectorcurrent=0.000397951Aᨬᜧᵯ᩽ᵯ¢ICMpeakgain=83.1365maxfT=7.69477e+09ᱯ⚣᳛:6ᵯ᩽ᵯ¢7᩽ᵯ¢§¨©ᑮ1Ḅª«⚣᳛'¬®¯°±ᐭª«²ᜧGḄ⚣᳛.´F¬µ¶·⚣᳛.1.J᪀LATHENADatafrombitexO1_O.str0.2suoNo工0.40.60.81-0.8-0.6-0.4-0.200.20.40.6MicronsL9.4R᦮ḄNPNJ᪀L

962.¸ᩖ¹ᑖºᑭᵨ½ᐹ¿mCutline½ᐹ(ÁÂ),Ä(-0.7,0)ᑮÄ(-0.7,5),QZÄ(0,-0.28)Äᑮ(0,1).ᨬVJ᝞L.QÅ:᩽ஹ᩽ஹᵯ᩽Ḅ¸ᩖ¹ᑖÆu10Ḅ19ஹ17(89ᜐu19)ஹ16?ÇÈ.L9.5NPNḄᩖ¹ᑖºL

973.ICTBᐵLATLASDatafrombjtex01_2.logCollectorCurrent(A)0.00040.00030.00020.00010.20.30.40.50.60.70.80.9BaseVoltaqe(V)L9.6NPNḄILVBᐵL

984.ATLASSectionIfromb]texO1_bandstrDatafromb|exOi_bandstr(0.-0.28)to(0.1)12,CorducitonBandEneigy(ViVatenmBandEneigy(V)9.7NPNḄExample2:NPN-GummelPlotandIc/VceCharacterizationugoatlasTITLEBipolarGummelplotandIC/VCEwithconstantIB#UV=>meshx.m1=0.0spacing=0.15x.m1=0.8spacing=0.15

99x.m1=1.0spacing=0.03x.m1=1.5spacing=0.12x.m1=2.0spacing=0.15y.m1=0.00spacing=0.006y.m1=0.04spacing=0.006y.m1=0.06spacing=0.005y.m1=0.15spacing=0.02y.m1=0.30spacing=0.02y.m1=1.00spacing=0.12#ᩞᧇregionnum=lsilicon#ᵯ᩽electrodenum=lname=einitterleftlength=0.8electrodenum=2name=baserightlength=0.5y.max=0electrodenum=3name=collectorbottom#BஹCஹEN᩽dopingreg=luniformn.typeconc=5e!5#,ᵯ᩽dopingreg=lgaussn.typeconc=lel8pcak=1.0char=0.2dopingreg=lgaussp.typeconc=1e18peak=0.05junct=0.15#᩽dopingreg=lgaussn.typeconc=5el9peak=0.0junct=0.05x.right=0.8#᩽peakᢣyÊ$dopingreg=lgaussp.typeconc=5e19peak=0.0char=0.08x.left=1.5#᩽89#imodelsconmobfldmobconsrhaugerprint#89contactname=emittern.polysurf.rec#BJTJ᪀Ḅ\]&solveinitsaveoutf=bjtex04_0.strtonyplotbjtex04_0.str#ᦪmethodnewtonautonrtrap#Gummelplot#VcË0VÌᓄᑮ2Vsolvevcollector=0.025solvevcollector=0.1

100solvevcollector=0.25vstep=0.25vfinal=2name=collector#V=2VC#VbÍÎᑮ0.2Vsolvevbase=0.025solvevbase=0.1solvevbase=0.2logoutf=bjtex04_0.1og#IC-VBᐵL(VB=0.3YIV)solvevbase=0.3vstep=0.05vfinal=lname=basetonyplotbjtex04_0.log-setbjtex04_0_log.set#I-VÏÐÑCce#VB=0Y0.7Vlogoffsolveinitsolvevbase=0.025solvevbase=0.05solvevbase=0.1vstep=0.1vfinal=0.7name=base#V=0.7VB#efᵯ¢Òxᩩ:᩽ᵯ¢\ᢝÕÌcontactname=basecurrent#Ö×ÕÁ᩽ᵯ¢(h=lஹ2ஹ3ஹ4ஹ5uA)©Ḅ±ÏÐ#MASTER±HIᦻu᪗ÚJ᪀(Û.ÜÝJ᪀(ÛḄᦻQᙠTONYPLOTm.solveibase=l.e-6saveoutf=bjtex04_I.strmastersolveibase=2.e-6saveoutf=bjtex04_2,strmastersolveibase=3.e-6saveoutf=bjtex04_3,strmastersolveibase=4.e-6saveoutf=bjtex04_4.strmastersolveibase=5.e-6saveoutf=bjtex04_5,strmaster#±ÏÐḄ\ᔡloadinf=bjtex04_l.strmasterlogoutf=bjtex04_l.logsolvevcollector=0.0vstep=0.25vfinal=5.0name=collectorloadinf=bjtex04_2.strmasterlogoutf=bjtex04_2.logsolvevcollector=0.0vstep=0.25vfinal=5.0name=collectorloadinf=bjtex04_3.strmasterlogoutf=bjtex04_3.logsolvevcollector=0.0vstep=0.25vfinal=5.0name=collectorloadinf=bjtex04_4.strmasterlogoutf=bjtex044.logsolvevcollector=0.0vstep=0.25vfinal=5.0name=collectorloadinf=bjtex04_5.strmaster

101logoutf=bjtex04_5.logsolvevcollector=0.0vstep=0.25vfinal=5.0name=collector#°ÕÁßGḄ±ÏÐᑴᙠ;áLtonyplot-overlaybjtex04_l.logbjtex04_2.logbjtex04_3.logbjtex04_4.logbjtex04_5.log-setbjtex04â_log.setquitCDJ1.¹ᑖºLᑭᵨ½ᐹ¿mCutline½ᐹ(ÁÂ),Ä(0.4,0)ᑮÄ(0.4,1),Ä(1.2,0)ᑮÄ(1.2,0.3)QZÄ(1.8,0)ᑮÄ(1.8,0.3).ᨬVJ᝞L.QÅ:᩽ஹ᩽ஹᵯ᩽Ḅ¸ᩖ¹ᑖÆu10Ḅ19ஹ17(89ᜐu19)ஹ15?ÇÈ.L9.8NPNḄ¹ᑖºL

1022.GummeIplot-ITonyPlotV2.828.RI"âFilevjUizPlotvJToolsrjPrintrjஹPrÎartia'▼)HelpriATLASGummelPlot1o10『1o-12三一-1e-13=二F1e-14=二一1e-15=二O.b0.60.70.00.9BaseVoltage(V)Dragoperationcancelled©SILUACOInternational2005L9.9GummelPlot

1033.IcTcᐵLATLASOVERLAYDatafrommultiplefiles0.0007ColleclorCijrrenl(A)0.00060.00050.0004------bjtex04_1.logbjtex04_2.bgbjtex04_3.bg0.0003bjtex04_4.bgbjiex04_5.bg0.00020.0001012345CollectorVoltage(V)L9.10NPNḄIcVcᐵLExample3:NPNḄ-åæᵯBVCEOᵯ᩽-᩽çᔣåæᵯ:éᵯ®ᢣêᨔëì᩽íîG,ᐸᵯ᩽7᩽§cḄᨬᜧᐕñçᔣᵯ,;òᵨVCEOᡈBVCEO⊤ô.J᪀᝞õ>öÁ'ÕÁ®ᙢ®ef.iøùgoatlasTITLEBipolarBVCEOsimulation#meshx.m1=0spac=0.1x.m1=2spac=0.1

104#y.m1=0spac=0.002y.m1=1spac=0.10###############################################################################regionnum=lsilicon#electrodenum=lname=emitterleftlength=0.8electrodenum=2name=baserightlength=0.5y.max=0electrodenum=3name=collectorbottom#dopingreg=luniformn.typeconc=5el5dopingreg=lgaussn.typeconc=lel8peak=1.0char=0.2dopingreg=lgaussp.typeconc=lel8peak=0.05junct=0.15dopingreg=lgaussn.typeconc=5el9peak=0.0junct=0.05x.right=0.8dopingreg=lgaussp.typeconc=5el9peak=0.0char=0.08x.left=1.5#saveoutf=bjtex05_0.strtonyplotbjtexO5_O.str-setbjtexO5_O.set#contactname=emittern.polysurf.rec#ᵯ2/noḄSRHrsmaterialtaun0=5e-6taup0=5e-6#imodelsbipolarprintimpactselb#ᵨúåæᑖ᪆ḄSelberherrüýᵯ1i.#þÿ
solveinitmethodnewtontrap#

.᝞ᑖᦣ,ᵯ᩽ᩭ1/2.#solveprevsolvevbase=0.025solvevbase=0.05solvevbase=0.2#V=0.2VB#contactname=basecurrent#methodnewtontrapir.tol=l.e-20ix.tol=l.e-20#ឋ!"#$%&ᡠ(◤Ḅ——,ᵨ./᩽ᵯ01,Ḅ2•4"/᩽ᵯ0#6789Ḅ:Jb=3.e-15AAim.solveibase=3.e-15

105logoutf=bjtex05.1ogmaster#rampcollectorvoltagesolvevcollector=0.25solvevcollector=0.5solvevcollector=lsolvevcollector=3solvevcollector=5#;<ᵯ᩽ᵯ0=▲?,ᵨ@ᦪ"compl=vnum>cname=collector”.num=᩽▲:?ᓫC#A/um,Dcname⊤FGHḄ"I8ᵯ᩽Ḅᵯ0.7J<ᵯ᩽ᵯ0K=Ḅ᩽▲:?%&#LMNO,DPQR7S%&.solvevstep=0.5vfinal=10name=collectorcompl=5.e-lle.comp=3#V=0.25~10Vc#plotresultstonyplotbjtex05.log-setbjtex05_log.setquitATLASDatafrombjtexO5.logColleclorCiirfenl(A)4e-10-3e-1072e-10—1e-10-0-BaseVoltaqe(V)T9.11NPNḄUVᱯឋXY

106Chapter10:SolarCell/Ạ[\]^"7_Ḅᓄaᵯbc"d□fᵯb?ᐸhiᱯឋ•_j"ᵨ᝞RTᡠkḄᵯ0-ᵯmXYᩭ⊤k.ᵫᐝᵯbḄpqᱯឋXY?rstᑮvwd□fᵯbḄx8hi@ᦪ.klᵯklᵯ(a)□ᵯ(b)═ᵯT10.1d□ᵯb{═}ᵯbḄIVXYজᵯmV࠷R=8,I=O,ᓽ:MM.L1=0ᐭᐝᵯbḄᵯ0ᵯm?tᵯm:9+1)(10.1)ঝᵯ0Ise᝞Lpn(V=0)?DIF=0,ᡠtḄᵯ0ᵯ09.ᯠ?ᵯ0ᐝᵯ0?ᓽ:L=LঞᐙFF¢⊤kᨬᜧhi¥᳛§ᡠ;¨Ḅ©ª☢¬ᙠVoc{Iscᡠ°ᡂḄ©ª☢¬²ᡠᓰḄ´ᑖµ.ᱯឋ¶Ḅd□fᵯb·"f¸t¹ᜧ¥᳛hiḄd□fᵯb?º·"Voc.lsc{FF¼¬¹ᜧḄᵯb.;ᨵᔠ〉ᦔ᳛Ḅᵯb?#:¨ᙠ0.70-0.85ÅÆᑁ.10.2□ᵯḄᱯឋa(•)⊤ᨬ(O)⊤▭ᐸ:Éᜧ⊤kd□fᵯbḄhi¥᳛Éᜧ.FFḄ:ÊË91.FFrᵫRᑡÍÎÏÐÑi:(Ò+0-72)FF(10.2)%+1

107вVÓ"Ô7ᓄḄᵯm,ᓽUoc/
nKT/q.ÕVoc>15,#ÏÐḄÖ×rØ4CᨵᦔᦪÙ.Ú▭Ü?ᵫÝÞὶᵯà{áὶᵯàḄâã?Ú▭d□fᵯbᐙḄ:⌕ÜÐᡠÑiḄᳮæ:.টfHèᓄᦔ᳛n¢⊤kᐭéḄd□ᐝfHᨵêëfèᣚᨵᦔḄᵯf.n=!d□fᵯbḄhi¥᳛/ᐭéḄd□ᐝ¥᳛1x100%=
VopIop/PinSX100%VockFF(10.3)PExample1:ᓫᨔấd□fᵯbᙠôõ²,L✌ᐜᵨATHENA%&Ḅ"ᨔýấd□fᵯbḄ᪀!pn1?ÿḼᵨATLAS□ᵯḄឋ:V*ஹlஹᐝὃ⇋!"#$%ᐝḄ&'.ᙠ□ᵯḄ*+,-.ὃ⇋ᑮ᜜1ᐝ2Ḅ&'.34-,.ᵨᑮBEAM56.719ᓫ⁐ᐝbeamnum=lwavelength=0.6x=0.5y=-2.0ang=90.0min=-0.1max=0.1\Min.power=0.05W56XYZ[\]^_90^ஹ`a_0.6UmḄᓫ⁐ᐝ,ᐸefᙶ᪗_i0.6,-0.5j.kᐝlmnofᐝp᳛Ḅ5%s[\tu.iᐭwᐝxy᝞y10.3j72:|ᐝᐝxbeamnum=2x=0.0y=-1.0ang=45.0power.file=source.spcwavel.start=0.4\wavel.end=0.6wave.num=4W56XYefi0.0,-LOjஹᐭw]^_45^Ḅ|ᐝᐝx.Wᐝxᵫᐝᦻsoure.spcᐭ-`a_0.4mn0.6um.4᜜-*+.ᵨᑮ"#iᡈw#,anti-reflectioncoatingj.INTERFACE56ᵨᩭXY"#ᐸ☢Ḅᐝឋ.ᦪar.ChickXY#;ar.IndexXYᢚw᳛.ᜧᦪ¢£¤,ᓫ¥"#^¦1/4`aiᙠ#¨j.%|¥#,©ª«¬ᦪcoatinglayerᩭ®¯▊±.᝞²#ᵫᔾᦈᱥᑴ·¸ᡂ,Wᐭar.Absorbᦪº»ὃ⇋.

108¼½goathena#¿ÀXYlinexloc=0.00spac=llinexloc=10spac=l#lineyloc=0.00spac=0.05lineyloc=0.25spac=0.02lineyloc=lspac=0.1lineyloc=50spac=10#ÁÂXYinitsiliconc.boron=1.0el4orientation=100#ÃÄÅᓄ¥depositoxidethickness=0.05div=l#ÇÈÉᐭÊᡂn+¥implantphosdose=lel5energy=30#⌨Ìᜐᳮdiffusetime=10temp=900#ÏÐÑÒextractname=,,junc_depth"xjmaterial=MSilicon"mat.occno=lx.val=0.1junc.occno=l#ÊᡂÓÔetchoxiderightpl.x=8depositalumthickness=O.1div=3etchalumleftpl.x=8#¿ÀÕÖ!ᜧ#relaxy.min=0.6×ᢣ.yÙᔣÛÜ0.6ᑮyḄᨬᜧÞᑁḄ¿Ààárelaxy.min=0.6relaxy.min=2.0relaxy.min=10#âãäåæç᦮Ñ᪀structuremirrorright#ᵯ᩽XYelectrodename=cathodex=10electrodename=anodebackside

109#ëìÑ᪀structureoutf=optoex08_0.strgoatlas#íîÓÔᩞᧇñò"ómaterialmaterial=Aluminumimag.index=1000#íîấḄឋ#ÁÂấ,ᵯÈஹõöḄ÷ᔠùú_le-6smaterialmaterial=Silicontaun0=le-6taup0=le-6#ᐝ᯿ឋXY#XYᐝx×ᓫ⁐ᐝ-üýþ_(10஺-2.0),ᚖ
ᐭ□ᐝᦻᩭ᜜ᦻ(ᢣᦻ#optoex08.spec,ᒹAM0□ᐝᦪ.)beamnum=lx.origin=10.0y.origin=-2.0angle=90.0power.file=optoex08.spec#ᐝឋsolutionᦻoutputopt.int#!"#$modelsconmobfidmobsrhprintsolve#%&'(ᵯ*logoutf=optoex08_0.1ogsolveb1=1.Oe-15##$ᐝ+᳛extractname=,,short_circuit_ciirrentnmax(abs(i."cathodeH))saveoutf=optoex08_l.str#%&-(ᵯ.solveinitcontactname=cathodecurrent#/01#ᵯ*/2ᐜ14ᵯ*56ᩩsolveicathode=0bl=le-15extractname=nopen_circuit_voltagenmax(abs(vint.Hcathode"))saveoutf=optoex08_2.strtonyplotoptoex08_2.strgoatlas##ᐝ89(spectralresponse):;#materialmaterial=Aluminumimag.index=1000#materialmaterial=Silicontaun0=1e-6taup0=1e-6

110#beamnum=lx.origin=10.0y.origin=-2.0angle=90.0#outputopt.intmodelsconmobfldmobsrhprint#spectralresponsesolveinitbl=0logoutf=optoexO82.logsolveb1=1lambda=0.3solvebl=llambda=0.35solvebl=llambda=0.4solveb1=1lambda=0.45solvebl=llambda=0.5solvebl=llambda=0.55solvebl=llambda=0.6solvebl=llambda=0.65solveb1=1lambda=0.7solvebl=llambda=0.75solvebl=llambda=0.8solvebl=llambda=0.85solvebl=1lambda=0.9solveb1=1lambda=0.95solvebl=llambda=1.00tonyplotoptoex08_2.log-setoptoex08_3.setgoatlas##ὃ⇋>?@ḄBC##DEFG#$meshspace.mult=1.0x.meshloc=0.0spacing=10.0x.meshIoc=10.0spacing=10.0y.meshloc=0.0spacing=0.2y.meshloc=50.0spacing=0.2regionnum=lmaterial=Silicon#elecname=cathodebottom#

111dopinguniformconc=lel4n.type#defineabeam(besuretoincludeREFLECTandBACKparameters)##$ᐭHᦪIஹKLMஹᐭNOஹὃ⇋8PQRᜧTஹᨬTᐝ+᳛beamnum=lx.origin=5.0y.origin=-1.0angle=90.0back.reflfront.reflreflect=5min.w=-2\max.w=2min.power=0.001solveinitlogoutf=optocx09_noarc.logsolvebl=llambda=0.3index.checksolvebl=llambda=0.325index.checksolvebl=llambda=0.35index.checksolvebl=llambda=0.375index.checksolvebl=llambda=0.4index.checksolvebl=llambda=0.425index.checksolvebl=llambda=0.45index.checksolvebl=llambda=0.475index.checksolvebl=llambda=O.5index.checksolvebl=llambda=0.525index.checksolvebl=llambda=0.55index.checksolvebl=llambda=0.575index.checksolvebl=llambda=0.6index.checksolvebl=llambda=0.625index.checksolvebl=llambda=0.65index.checksolvebl=llambda=0.675index.checksolvebl=llambda=0.7index.checksolvebl=llambda=0.725index.checksolvebl=llambda=0.75index.checksolvebl=llambda=0.775index.checksolvebl=llambda=0.8index.checklogoffgoatlasmeshspace.mult=1.0x.meshloc=0.0spacing=10.0x.meshIoc=10.0spacing=10.0y.meshloc=0.0spacing=0.2y.meshloc=50.0spacing=0.2regionnum=lmaterial=Silicon#elecname=cathodebottom#

112dopinguniformconc=lel4n.type#defineabeam(besuretoincludeREFLECTandBACKparameters)beamnum=lx.origin=5.0y.origin-1.0angle=90.0back.reflfront.reflreflect=5min.w=-2\max.w=2min.power=0.001##$>?@(VW)interfaceopticalar.index=2.05ar.thick=0.07pl.x=0.0pl.y=0.0p2.x=10.0p2,y=0.0solveinitlogoutf=optoex09_1arc.logsolvebl=llambda=0.3index.checksolvebl=llambda=0.325index.checksolvebl=llambda=0.35index.checksolvebl=llambda=0.375index.checksolvebl=llambda=0.4index.checksolvebl=llambda=0.425index.checksolvebl=llambda=0.45index.checksolvebl=llambda=0.475index.checksolvebl=llambda=0.5index.checksolvebl=llambda=0.525index.checksolvebl=llambda=0.55index.checksolvebl=llambda=0.575index.checksolvebl=llambda=0.6index.checksolvebl=llambda=0.625index.checksolvebl=llambda=0.65index.checksolvebl=llambda=0.675index.checksolvebl=llambda=0.7index.checksolvebl=llambda=0.725index.checksolvebl=llambda=0.75index.checksolvebl=llambda=0.775index.checksolvebl=llambda=0.8index.checklogoffgoatlasmeshspace.mult=1.0x.meshloc=0.0spacing=10.0x.meshloc=10.0spacing=10.0y.meshloc=0.0spacing=0.2y.meshloc=50.0spacing=0.2

113regionnum=lmaterial=Silicon#elecname=cathodebottom#dopinguniformconc=lel4n.type#defineabeam(besuretoincludeREFLECTandBACKparameters)beamnum=lx.origin=5.0y.origin=-1.0angle=90.0back.reflfront.reflreflect=5min.w=-2\max.w=2min.power=0.001##$>?@(XW)interfaceopticalmatcrial=Oxidcar.thick=0.06\x.min=0.0y.min=0.0x.max=10.0y.max=0.0z.min=0z.max=10interfaceopticalmaterial=Nitridear.thick=0.05coating=llayer=2solveinitlogoutf=optoex09_2arc.logsolvebl=llambda=0.3index.checksolvebl=llambda=0.325index.checksolvebl=llambda=0.35index.checksolvebl=lIambda=0.375index.checksolvebl=llambda=0.4index.checksolvebl=llambda=0.425index.checksolvebl=llambda=0.45index.checksolvebl=llambda=0.475index.checksolvebl=llambda=0.5index.checksolvebl=llambda=0.525index.checksolvebl=llambda=0.55index.checksolvebl=llambda=0.575index.checksolvebl=llambda=0.6index.checksolvebl=llambda=0.625index.checksolvebl=llambda=0.65index.checksolvebl=llambda=0.675index.checksolvebl=llambda=0.7index.checksolvebl=llambda=0.725index.checksolvebl=lIambda=0.75index.checksolvebl=llambda=0.775index.checksolvebl=llambda=0.8index.checktonyplot-overlayoptoex09_noarc.logoptoex09_1arc.logoptoex09_2arc.log-setoptoex09.setquit

114!YZ[1.Z᪀]/VTL^AuSSAO2SMoonI1Alvimtrtcan]10.4ᓫᨔấ□aᵯbḄZ᪀2.ᐝc᳛ᑖe]fgSILVACOḄTONYPLOT!ᙽiẆkᙠᐝ᯿n□aᵯbᑁḄp*qᐝcr⁚tuva.wx!YyZᘤ{/F⌕.n]}~Ḅấ□aᵯbᐝc᳛Ḅᑖe].ᙠ],ᘤḄᑖᨵV?Ḅᵯ᩽.V%u0ᐝc᳛᝞[⍝ᵯ*v□aᵯbḄqᦔ᳛.ATUASDatafromoptoexOB1.str_1O2030<40o6e101214ie1820Microns]10.5ấ□aᵯbḄᐝc᳛ᑖe]

1153.ᐝ89]]0ᐝᵯ*ஹvᑭᵨḄᐝᵯ*P¡▭£᩽ᵯ*¤¥¦tᓄḄx¨].©Hᓽᐝ«¬ᵯ*H/ᙠᐝ᯿n□aᵯbvᑭᵨḄᵯ*®¯H/¡▭£᩽ᵯ*.ᐸ±XὅḄ³´ᵫ8¶·〈¹ᑖᐝº»ᘤ¼½K.᝞[ὃ⇋ᨬ'Ḅ¥¦ᑖ¾¿À½KÁὑḄÃ⌕¿À.ÄXὅḄÁὑᑣᵫÆᔠ½K.ᵫÈ]ÉvÊ#ᵯbḄ᜜qᦔ᳛——/v]10.7ᨵÌ>?@x□aᵯbÍᵯ*ḄÎÏ]⊤xÑVWARC,0.6um¥¦▬ÓÔ£᩽ᨵᵯ*Õ».VÖW@vᙠ×ØḄ¥¦ÚᑁÛÜᢚ᳛.

116Example2:PINᨔÞấ/àᨔấ□aᵯbÈáâ!YḄpin"c-Si/a-Si□aᵯb.x¾ã®äàᨔấVGᱥ.ᦑ◤èᵨ#$GᱥḄéêᩭ#$àᨔấ.#$GᱥḄëVìᙠ᪀íᡠ◤Z᪀Ôᵨãïᨵᱥðñ¹òóÞᵨòóÞðñᵨðñ᝞.¼.ëÖìᙠôõᘤ!YÔö÷#$ᱥøᐵúᦪ᝞û◣ஹý¶aஹþᵯÿᦪ

ஹஹᡠ◤ᦪᶍᨵ.goathcna#linexloc=0.00spac=10linexloc=300spac=10#lineyloc=0.00spac=0.001lineyloc=0.3spac=0.001lineyloc=0.6spac=0.02lineyloc=lspac=0.2lineyloc=2spac=llineyloc=5spac=15lineyloc=350spac=15#pc-Siinitsiliconc.boron=1.0el6orientation=100#ia-Sidepositpolysiliconthick=0.005div=5#na-Sidepositpolysiliconthick=0.02c.phosphor=1.0el8div=10#ᓄdepositoxidethickness=0.02div=l#ᡂetchoxidestartx=145.00y=-0.045etchcontx=155.00y=-0.045etchcontx=155.00y=-0.025etchdonex=145.00y=-0.025#!&#⇨%depositalumthickness=0.02div=letchaluminumabovepl.y=-0.045

117#ᵯ᩽()electrodename=cathodex=150.00electrodename=anodebacksidestructureoutf=0.strgoatlas#*+ᱥ-%./0materialmateriaI=Aluminumimag.index=1000#*+.ᨔấḄឋ-materialmaterial=polysilicontaun0=le-6taup0=le-2afifinity=3.86\EG300=1.70NC300=2.5e+20NV300=2.5e+20mun=2mup=le-3\VSATN=1e+7VSATP=1e+7#*+ấḄឋ-materialmaterial=silicontaun0=le-6taup0=le-6#56ᐝ89solutionᦻ;outputopt.int#<()modelsconmobfldmobsrhprint#()#whiler=100,con.resist=100*1Oum*1um=1e-5ohm*cmA2contactname=cathodecon.resist=lE-5#ὃ⇋᜜@AB#CDEsolveinit#ᐝ᯿()beamnum=lx.origin=150.0y.origin="langle=90wavelength=1.101#GHIᵯJlogoutf=0_ls.logsolvebl=0extractname=,,0_leak-anmax(abs(i.nanode'*))extractname=H0_leak-cnmax(abs(i."cathode"))#GHKLᵯJlogoutf=0_lsc.logsolvebl=0.0609extractname=,*short_circuit_currentnmax(abs(i.Manode"))

118saveoutf=0_lsc.strtonyplotOlsc.str#GHMLᵯNsolveinitcontactname=anodecurrentsolveianode=0bl=0.0609extractname=,,open_circuit_voltagenmax(abs(vint.Hanode"))saveoutf=0_Vdc.strtonyplotOVbc.strOPQRS0_leak-a=8.17859e-200_leak-c=3.86358e-24short_circuit_current=3.23193e-08open_circuit_voltage=0.522253TᩭVᦋX᜜@ABḄᜧZ(\]HOohm^lOOohms),`ᑭᵨFFcdefgnhiefVjkl᝞TQnSR(Q)Leak_a(A)Leak_c(A)Isc(A)Uoc(V)FFn(%)01.46e-24508.18e-203.86e-243.232e-80.5220.8099.1001002.12e-23⊤10.1᜜@ABpq□sᵯtḄuvCwQn:᜜ᵯyzᜧ,A᩽IᵯJzᜧ{|p}~ᱯឋᦪuv.

119Chapter11:TFTẠᑴTFTḄᨬᵨᩞᧇ:ᓄ.ᨔấ(a-Si:H)ᨔấ.ᨬᵨQ᪀:ᑖ⚔᪕᩽Q᪀^᪕᩽Q᪀.(:ᴻ/ᡈ⌚¢ↈSiChḄấ
)ᵫ¦§¨▲ᑴVᓄ.ᨔấTFTªᵨ᪕᩽Q᪀VᨔấTFTªᵨ⚔᪕᩽Q᪀.ᘤᱥᳮP202-204Examplel.«ᓄḄ.ᨔấTFTᘤ;®¯«ᓄḄa-Si:HTFTᘤ;ḄId/Vgsᱯឋ.°ᒹ²S7ᵨATLASQ᪀{Y«ᓄa-SiḄmaterial^model*+{7µ¶Id/Vgsᱯឋ:IN5V,᪕N-1Y20V.TFT¸Ḅᐵº»¼defect½¾.°¯()ấ¸¿ÀᑡÂÃḄ◍▟᝱ÇÈ^Éᐵ◍▟ÊË☢.Id/VgsᱯឋMOSᘤ;█ÎᵯNÏÐÑÒ.QRj.«ᓄa-Siᘤ;ÓÔ.goatlasTITLEa-siTFTsimulation#ÕÖ()meshx.m1=0spac=0.5x.m1=2spac=0.5x.m1=3.5spac=1.0x.m1=5spac=0.25x.m1=10spac=1.5x.m1=15spac=0.25x.m1=16.5spac=1.0x.m1=18spac=0.5x.m1=20spac=0.5#y.ml=-0.1spac=0.05y.m1=0spac=0.0075y.m1=0.05spac=0.01y.m1=0.1spac=0.0075y.m1=0.5spac=0.25y.m1=10.spac=5

120#¡=>#l=oxide2=silicon3-oxideregionnum=ly.max=0.oxideregionnum=2y.min=0.y.max=0.1siliconregionnum=3y.min=0.1oxide#ᵯ᩽=>#l=gate2=substrate3=source4=drainelecnum=lx.min=5x.max=15y.min=-0.1y.max=-0.1name=gateelecnum=2substratename=substrateelecnum=3x.min=0.x.max=2.y.min=0.y.max=0.name=sourceelecnum=4x.min=18.0x.max=20.0y.min=0.y.max=0.name=drain#£ᩖ=>dopingreg=2uniformconc=7.el4n.typedopingreg=2gaussconc=3.el8n.typex.right=5char=0.3dopingreg=2gaussconc=3.el8n.typex.left=15char=0.3#¥ᨔấ¨ᦪª«materialrcgion=2mun=20mup=1.5nc300=2.5e20nv300=2.5e20eg300=1.9#defectsnta=l.e21ntd=l.e21wta=0.033wtd=0.049

121ga=1.5e!5ngd=1.5el5ega=0.62egd=0.78wga=0.15wgd=0.15\sigtae=l.e-17sigtah=l.e-15sigtde=l.e-15sigtdh=l.e-17\siggae=2.e-16siggah=2.e-15siggde=2.e-15siggdh=2.e-16#᪕᩽¬=>contactnum=lalum#uv=>modelstemp=300#®¯y°=>methoditlimit=30#?᪀OP&²³solveinitsaveoutf=tftex01_0.strtonyplottftexOlO.str-settftexOlO.set#®¯y°=>methodgummelnewtonsolvevgate=-1.0

122methodnewtonsolvevdrain=0.1solvevdrain=0.2solvevdrain=0.5solvevdrain=lvfinal=5vstep=lname=drain#Vd#Id-Vg×Ø56&ÙÚlogoutf=tftexOl_l.logsolvevstep=0.5vfinal=20.name=gatevdrain=5#Vrampgtonyplottftex01_l.log-settftexOllog.set#ÛH█ÎᵯNஹIᵯJஹÜ█ÎÝ᳛ᶍOPQRSvt=2.24776Vleak=1.55261e-06A/umsubvt=0.666109V/decade1.Q᪀ßATLASDatafromtftexO1__O.str-0.2ao..24SL1QJO乏0.60.82468101214161820Mirmnsß11.1⚔᪕᩽TFTQ᪀ß

1232.àáᩖÇÈᑖãßATLASDatafromtftexOIO.str-0.20suoNo工NetD■oping(/cm3)_0.6__=Materials=SiO20.81SiliconConductorElectrodes2468101214161820Micronsß11.2⚔᪕᩽TFTḄàáᩖÇÈᑖãß

1243.Id-VgᐵÀ×ØßATLASDatafromtftexO1_1.log1.6e-06DrainCurienl(A)1.4e-061.2e-061e-064e-O72e-O712ß11.3⚔᪕᩽TFTḄId-VgᐵÀ×ØßExample2:.«ᓄḄ.ᨔấTFTᘤ;ᙠ®¿¸Vᡃæç«ᓄḄ.ᨔấTFT,TᩭV¯p.«ᓄḄ.ᨔấTFTèP.éQ᪀¿êV§¨¿ê.Ḅë.ᨔấḄឋ-.ᡃæë◤p®¿ìíîᦋ,ᓽjðᑮòḄ:¯®¿¸DEFECT½¾¸ngaஹngdÑóôஹõôs᝱ö÷ᑖãøpùḄsúᦪÎᵫ1.5el5ᦋ4.5el5.OPQRvt=2.30924Vleak=1.54646e-06A/umsubvt=0.513561V/decadeQn:.«ᓄḄ.ᨔấVtÔᜧ.

125Example3:µ/¶᪕ᱯឋᙠû☢®¸Vᡃæç⚔᪕᩽Q᪀TFTgᐸýþᱯឋ.ᙠ®¸¯TFTḄÿᑭ᪀——᪕᩽᪀.ᙠẠᡃὃ⇋᪕᩽ᵯḄᓄ.!"#ᓄấ.%ᨔ'(Ḅ)*᪕ᙠ᪕᩽+,'ᵫ#ᓄ./0ᓄ.1ᡂ.34Ḅ56ấ.7"8⍝:;<ấḄ=ᑖ"?6,=ᑖ56.AᵨḄCᑖDE34F.GḼ!I/GK.ᯠMN⇨PᡂI/ATLASId/Vgextractionexample#²³!linexloc=0spac=0.2linexloc=1.0spac=0.1linexloc=3.0spac=0.25lineyloc=0spac=0.1lineyloc=0.2spac=0.1#!initializeoxide#´4µ7"᪕᩽depositaluminumthick=O.3Ospaces=2#´4MIS+,.depositoxidethick=0.20spaces=4depositnitridethick=0.2spaces=4#´4ᨔấdepositsiliconthick=0.15div=10c.phos=le!4

126depositsiliconthick=0.05c.phos=1.0e20div=4#´4I/GKdepositaluminumthick=0.2div=2#´4¶ᢱ.depositbarrierthick=0.1div=letchbarrierpl.x=1.0rightetchaluminumdrythick=0.20etchsilicondrythick=0.10etchbarrierall#´4#ᓄ.depositoxidethick=0.2div=2#¸¹º»¼᦮᪀structuremirrorright#ᵯ᩽!electrodename=sourcex=0y=-1.0electrodename=gatex=3electrodename=drainx=6y=-1.0#᪀`¢&¿Àstructureoutf=tftex05_0.strtonyplottftex05_0.str-settftex05_0.setgoatlas#Titlea-siTFTsimulation#ᨔấÁᦪnomaterialmaterial=siliconmun=20mup=1.5nc300=2.5e20

127v300=2.5e20eg300=1.8taun0=le-8taup0=le-8#defectsnta=l.e21ntd=l.e21wta=0.05wtd=0.05

128ga=1.0el6ngd=1.0el6ega=0.6egd=0.6wga=0.3wgd=0.3\sigtae=l.e-17sigtah=l.e-15sigtde=l.e-15sigtdh=l.e-17\siggae=2.e-16siggah=2.e-15siggde=2,e-15siggdh=2.e-16interfaceqf=3e10#᪕᩽!contactname=gatealum#f!#ÃÄÅ᳛ffgÇᔣᵯḄt⍒Êf("modelsbbt.std"),bb.bCtËÊfh

129#ḄᢣᦪÁᦪᙠªÍ,bb.b=7.5e6Cᵨᩭfgᨔấ.modelssrhtemp=300printbbt.klbb.b=7.5e6#ÎÏST!methodnewton#ÐÑÒÓÎsolveinit#ᓄÔ+10V.ᯠM`¢ªYḄ᪀solveprevvdrain=0.1solveprevvdrain=0.2solveprevvdrain=0.5solvevdrain=lvfinal=10vstep=lname=drain#Vd=10V#outpute.fieldsaveoutf=vds.str#ᵯÕÖ×Ø¢ᙠvds.strᦻmh#SolveIdversusreverseVcurveg#Çᔣ᪕ᓄÔ20V.ᙠÚ"TFTḄ⍒ÊᦔÜ᩽ᵯÝÞ(Ḅᜧát⍒#ÊfÁᦪâᑴ).ᨬÇä᪕Ḅ᪀ᦻmåæ`¢.logoutf=tftex05_l.logsolvevgate=0vstep=-0.5vfinal=-20.name=gate#Vg=-0.5ç-20Vsaveoutf=tftex05_l.strtonyplottftex05_l.str-settftex05_l.set#èéᨬᜧÇᔣᵯextractname=nmax_rev_idny.valfromcurve(v."gaten,i.ndrainn)wherex.val=-20#SolveIversusforwardVcurvedgloadinf=vds.strmasterlogoutf=tftex05_2.logsolvevgate=0vstep=0.5vfinal=20.name=gate#Vg=0ç20V#èéê█ì᳛(subthresholdslope)#ê█leakageslope,=s'ᑁz◍ᑖîᐸᐺ"0.5-1.5V/decade.extractname="subvtslopeH1.0/slope(maxslope(curve(abs(v.,,gaten),logl0(abs(i.,,drainH)))))ðñòtonyplot-overlaytftex05_l.logtftex05_2.log-settftex05_log.setquit

130óæô1.᪀òATHENADatafromtftex05_0.strg8suoQ6N஺一工94Q2MaterialsAluminumoSiliconSi3N4SiO2o123456Micronsò11.4᪕᩽TFT᪀ò

1312.õÅᱯឋATLASOVERLAYDatafrommultiplefilesDrainCurrent(A)1e-078e-086e-08tftex05_1Jogtftex05__2.log4e-082e-080-20-1001020GateVoltaqe(V)ò11.5TFTḄIdMðñò

132AppendixAppendixA:ATLAShÃᵨSTATEMENTSᐸᑖÁᦪBEAMpqøBEAMpqᵨᩭ!᪥úḄᐝüPýþᐭḄᐝ.angle:ᐝḄ10.3
,ᓫ.angle=90⊤ᘤ⚔ᚖᐝ᯿ᩭ.ᦪḄ!"#phi.back.refl:⊤ὃ⇋&'Ḅ().*+ᦪ,ᘤ-᜜Ḅ/0Ꮇ234ᓽn=1.0,k=0.0
.b:ᐝ6ᦪ7n
8ᐝ9᳛,ᓫW/cn?.ᐸ<=ᐝ6ᦪ7>?#1ᑮ10-AḄ᦮ᦪ.front.refl:⊤ὃ⇋C⊤☢Ḅ().*+ᦪ=ᘤ-᜜Ḅ/0Ꮇ234.reflect:EFḄ()Gᦪ.max.windowஹIJKLᐝᙶ᪗OP᯿QRSᐝ6ḄᨬᜧXVW10.3
,ᓫNm.ᦪḄ!"#xmax.min.window:JKLᐝᙶ᪗OP᯿QRSᐝ6ḄᨬXXV.ᦪḄ!"#xmin.min.power:JKLYᐝZḄᨬXᐝ[,ᓫW/cn?.\K▲ᑴᐝ᯿ᐝ6Ḅᦪ7_`ᨵᵨ.number:ᐝ6Ḅᦪ71cU10
.\dᦪ7ᵨᙠSOWEfg<=ᵨᩭh!ᐝ6ḄJK[.power.file:idᐝjᦻḄᦻl.waveLstart:*mnoᐝjpqrᐝZᐝ6ḄᨬXst34?ÃᨔÄAÅÆÆ☢ÇÈÉÊ)ÅÆᩭpq.ega:ËÌ᝱¾¿ᑖÍKÎḄ¦.®ÏÐѦx¤ḄÅÒÓÔ.egd:ÕÌ᝱¾¿ᑖÍKÎḄ¦.®ÏÐѦ֤ḄÅÒÓÔ.

133f.tftacc:ᙠᵨCfØÙÚᘤDEFECTr,ᵨᩭ⊤ᒹÜCfØᦪḄᦻl=ÝÞËÌ᝱ᑖ¦Ḅᦪ.f.tftdon:ᙠᵨCfØÙÚᘤDEFECTr,ᵨᩭ⊤ᒹÜCfØᦪḄᦻl=ÝÞÕÌ᝱ᑖ¦Ḅᦪ.nta:x¤ÅÒ¼ᑖ(taildistribution)ᜐËÌḄ᝱.ntd:Ö¤ÅÒ¼ᑖᜐÕÌḄ᝱.nga:¾¿ᑖ<¡ḄËÌ᝱.ngd:¾¿ᑖ<¡ḄÕÌ᝱.siggae:ËÌḄ¾¿ᑖ<ᵯàḄáÓâ☢.siggah:ËÌḄ¾¿ᑖ<4ãḄáÓâ☢.siggde:ÕÌḄ¾¿ᑖ<ᵯàḄáÓâ☢.siggdh:ÕÌḄ¾¿ᑖ<4ãḄáÓâ☢.sigtae:ËÌḄ¼ᑖ<ᵯàḄáÓâ☢.sigtah:ËÌḄ¼ᑖ<4ãḄáÓâ☢.sigtde:ÕÌḄ¼ᑖ<ᵯàḄáÓâ☢.sigtdh:ÕÌḄ¼ᑖ<4ãḄáÓâ☢.wga:ËÌ᝱Ḅ¾¿ᑖᡠKÎḄᱯä⊦å(characteristicdecayenergy).wgd:ÕÌ᝱Ḅ¾¿ᑖᡠKÎḄᱯäçå.wta:ËÌ᝱Ḅ¼ᑖᡠKÎḄᱯä⊦å.wtd:ÕÌ᝱Ḅ¼ᑖᡠKÎḄᱯä⊦å.DOPINGfgIDOPINGfgᵨᩭèᩖᑖ.char:êᐭḄÌ⌕ᱯät.᝞ᦪ¢=V®¯᩽ឋᦪஹÅÆᦪ(PolarityParametersஹBoundaryParameters)ìí.dose:¾¿ᑖ<¡Ḅᑺ¦.junct:¾¿ᑖ<ïð(ᓽïñ).*JUNCT+=ᱯät®ÏÐѦpeak:¾¿ᑖÍVóḄð.EXTRACTfgIEXTRACTfg®ᵨᩭôõᘤᦪ.ö®¯ᮣøùᵨ=ú®ûᵨüý¤Ḅþÿ
᪷◤⌕᪀Ḅ
.EXTRACTᨵḄᡈ᪀ᦻ.!"#,EXTRACT%ᵨ'(ᡭ*Ḅlogᦻ.᝞,-ᡭ*Ḅ.(Ḅlogᦻ%ᵨ#☢Ḅᓽ1EXTRACTINITINF=""INTERFACE1INTERFACEᵨᩭ345/78☢ᵯ₹;<=⊤☢?ᔠA<.ar.absorb:34BCDḄᔾᦈGᦪ.IJ0.0cmK.ar.thick:34LBCDḄM<.material:34BCDᩞᧇ.optical:34PQ8☢ḄᐝSឋUVᵨW▣Yᣚ[\(TransferMatrixMethod)]^.ᐹ`aATLASbcd10fḄ2.4⁚"MatrixMethod".qf:345/78☢ᜐi3ḄjᓄLᵯ₹;<(cm-2).

134s.n:34ᵯl⊤☢?ᔠA<.s.p:34mn⊤☢?ᔠA<.pl.x,pl.y,p2.x=p2.y34opqlboundingbox
.ᙠsqlᑁuvw⊤BCDḄ8☢.pl.x,p2.x,pl.y=p2.yᑖyJsqlḄx[ᔣ{ஹ}I=y[ᔣ~Ḅ#ஹ~I.MATERIAL1MATERIALᵨᩭ34ᩞᧇḄᱥᳮᦪ.eg300:300KḄ◣.mun:ᵯ#ᵯl᳛ᦪᵨ<᳛].mup:ᵯ#mn᳛~.nc300:300Kᨵᦔ᝱;<.nv300:300K⚔ᨵᦔ᝱;<.taumob.el:<Ḅ᳛]ᵯlḄ.IJ0.4X10K2s.taunO:ᵯlḄShockley-Read-HallSRH
.taupO:mnḄShockley-Read-HallSRH
.taureLel:¡¢£⊝]ᵯlḄ.IJ0.4X10K2s.tmun:<Ḅᵯl¥¦᳛Ḅ¥¦

135MODELᱥᳮḄᵨMODELSIMPACT.ᦪᒹ:MODELS,IMPACT,MOBIL1TMATERIAL.ᱥᳮ:᳛ஹ"ᔠஹ$%&'(ஹ)*ᵯ,-..1.$%&'(bgn:/◣12(BandgapNarrowing)@ABCDEFGC⌕.boltzmann:IJᐻL'((MN).fermi:OP-RST'(@ᵨBCDḄUVWXY.2.᳛analytic:Z[\]^]Ḅ᳛.conmob:Z[\]Ḅ᳛.cvt:ὃ⇋NஹTஹE“ஹELabḄcᐰ.fidmob:Z[efgḄ᳛.3."ᔠauger:ᓽij"ᔠ@⊤lmn$%&Ḅopq.consrh:rsZ[B\]ḄSRH"ᔠ.t₞vᵨBSi.optr:/w"ᔠ.xᵨBop/◣ᩞᧇ.s.n{s.p:ὃ⇋WXY-|}YḄ~☢"ᔠ.ᙠINTERFACE.srh:Shockley-Read-Hall.ᙠḄᎷᦪ$%&Ḅrs.〉ᵨBᜧᦪ.4.)*ᵯ,impactselb:Selberherr)*ᵯ,.5.-.bbt.kl:Klaassen/w-.——ᙠnᜧḄᵯg¡@ᘤ£Ḅ¤¥¦/§¨©ª@«¬B/ᵯ&-.¬X/.ᐸ¯°@X/±ᨵ³᜜Ḅᵯ&,/±ᨵ¶·Ḅ¸¹.º¨»ᑴ«ᵨ½¾¿Àᩭ⊤Â:-.Ã᳛GBBºBB.AXEBBGAMMAexp(_BB.B/E).Ì,Eᵯgᒹopqwpq.(bb.a,bb.bbb.gammaᙳ/w-.ᦪ.ÎÏatlas_usersÑP163.)ᙠATLAS,MODELḄbipolarᦪÖ᩽ᘤ£ᔠᳮḄMNḄᱥᳮØ.ᐸᒹ:Z[\]Ḅ᳛(CONMOB)ஹZ[gḄ᳛(FLDMOB)ஹἭ/12(BGN)ஹrsZ[B\]ḄSRH(CONSRH)ij"ᔠ(AUGER).ᐸÚᦪevsatmod:Z[efgḄ᳛ÛᵨBᵯ&.print:ᢣÝᦪᡭᓺàᩭ.áâᙠᡠᨵATLASäfvᵨᦪ.ir.tol:|Aᵯ%ᦈæçᑣ(absolutecurrentconvergencecriteria).ix.tol:êAᵯ%ᦈæçᑣ(relativecurrentconvergencecriteria).PROBEPROBEᵨᩭìàlogᦻ£•ᑖð·(distributedquntities)Ḅᨬᡈὅõᱯ÷Ḅ.dir:ᱯᔣ·ù,XúḄû]@MNü].ᱯᔣ·ᒹfield,n.mob,p.mob«{polarization.maxஹmin:PROBEᑮḄᨬᜧஹ.name:ᙠTONYPLOTḄ.

136n.mob:!ᑮᵯ#$%᳛.᝞()ᵨ+,ᦪn.mob,./dir,ᦪ.SOLVE012ATLAS3ḄSOLVE01ᵨᩭ5678ᡈ:8;<=Ḅᵯ?.

137e.fieldᡈefield:BḄᵯC+ᒹ<=᪗./᪀ᦻ4>?.e.velcocity:BḄᵯDE+ᒹ<=᪗./᪀ᦻ4>?.flowlines:ᵯFG(currentflowlines)+ᒹ<=᪗./᪀ᦻ4>?.jx.electronஹjx.hole:ᵯஹᵯFHEXIᔣᑖL+ᒹ<=᪗./᪀ᦻ4>?.jy.electronஹjy.hole:ᵯஹᵯFHEXIᔣᑖL+ᒹ<=᪗./᪀ᦻ4>?.qfnஹqfp:ᵯஹ.MNOP+ᒹ<=᪗./᪀ᦻ4>?.opt.intens:ᐝR+ᒹ<=᪗./᪀ᦻ4>?.

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