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1、南昌大学硕士学位论文基于正弦相位调制的光栅干涉法测量振动物体面形的研究姓名:赖秀娟申请学位级别:硕士专业:工程热物理指导教师:马力20090601ABSTRACTThcsinusoidalphasc・modulating(SP21)intcrfcromctryisthatphysicalquantities羽.cmeasuredbyanalyzingintcrfcrcnccsignalwithrcfcrenccbcamssinusoidalphase—modu1ated・Theinterferometryhassomeadv
2、antages,suchassimp1esystem,high・accuratcmeasuremenl,slronganlijammingcapabi1iLyandS0on,thusithasbeenusedtodisplacementmcasurcmcnt,vibrationmeasurement,surfaceprofi1emeasurement,etc•Inthispaper,thediffractionandinterferenccphcnomcnonoftwogratesandfrequencyPrincip1ea
3、reanalyzed・TheprincipleofgratingomodulatingmeasunngsurfaccPr0fi1eisintroduced•BasQed0nth•eprincip1'eofsinusoida1phase—modulatinggratingintierferometer,inth•spaPeratwo.grat•ng•nterferometerw•ths•nus0•da1phase'modu1at•0nisusedf0rmcasur•1nga1argcm0Vcmcnt0fasurfaceprof
4、•11c0fan0b•Jcct•choosingaPpr()Prate0pt•ca1e1ement9bysett•ngUpanddebuggingIh•S0PI•ca1system,Lhem0Vementsofmesu]rf.aCeprofileofaplaslicplalewithsinusoidalphase—modulatingaremeasured*Theinterferencestripepatternswithdifferenttimesarecol1ectedwithinonegratingperiod・At1
5、ast,accordingtothewaysofphase——objectopticreveling,acomputerprogramat•1onandf•1gUrcP10I,aftcrwa•1ned,fartherthmere1at•10nbetwe(?nsurface1cu1isgarewiisorganizcdbythcMATLABsoft・Thisprogramisforimageprocessing,n啪encbutionof2—Disfounded,rdthcdistributionofthcphaprofile
6、andphase,thedistriatthesametimethefigureaprofileisdrawinthecoordinateofthreedimensions•Resu1tfromexitIeriments,thereso1utionofthistechniqueisintheorderoftenm•cr0nsanda2-Dsurfacepr0f•1eoed•s0th•smcth0d•1smorcPract•1ca1•1tythanoerways■Kcyw0rd■MoVcmcnImcasurcmcnL:Ga1p
7、hase'modulation:Surfaceprofi1efavibratingobjectCanbemeasurthratinginterferometer;Sinusoid学位论文独创性声明学位论文独创性声明本人声明所呈交的学位论文是本人在导师指导下进行的研究工作及取得的研究成果。据我所知,除了文中特J§cI,Du以标注和致谢的地方外,论文中不包含其他人已轻发表或撰写过的研究成果,也不包含为获得直昌太堂或其他教育机构的学位或证书而使用过的材料。与我一同工作的同志对本研究所做的任何贡献均已在论文中作了明确的说明并表示谢意
8、。学位论文作者签名(手与):赖磊姻签字日腿立綁議無除月tfI目本学位论文作者完全了解..直昌太堂有关保留、使用学位论文的规定,有权保留并向国家有关部门或机构送交论文的复印件和磁盘,允许论文被查阅和借阅。本人授权直昌太堂可以将学位论文的全部或部分内容编入有关数据库进行检索,可以釆用影印、缩印